• 제목/요약/키워드: Piezo stage

검색결과 62건 처리시간 0.031초

이중 스테이지를 이용한 대면적 3차원 광/유체 마이크로 디바이스 제작에 관한 연구 (Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process)

  • 임태우;양동열
    • 설비공학논문집
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    • 제27권10호
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    • pp.552-557
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    • 2015
  • The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures.

리니어 초음파 모터를 이용한 X-Y stage의 마이크로 미터급 위치 구동회로 설계 (Design of Micro-meter Position Driver for X-Y Stage Using Linear Ultrasonic Motor)

  • 김정도;홍철호;김동진;함유경
    • 한국산학기술학회논문지
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    • 제6권2호
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    • pp.165-171
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    • 2005
  • 초음파 모터는 전자기식 모터들과는 달리 다양한 특징과 뛰어난 성능을 가진 새로운 형태의 모터이다. 그러나, 초음파 모터는 특히 구동시간에 따라 시스템의 비선형적인 특성과 파라미터의 변화들에 대한 문제를 갖는다. 그러므로 기존의 PID제어기를 사용함으로써 만족스러운 제어기의 성능을 내기가 어렵다. 본 논문에서는 원환형 초음파 모터와 선형 초음파 모터의 정밀 제어를 하기 위해 구동시간에 따른 응답 시간과 변화 등의 특성을 각각 분석하고, 리니어 초음파 모터에 대해서는 ${\mu}m$정도의 오차를 갖는 스텝 제어기와 PD제어기를 결합한 제어기를 제안한다. 제안된 제어기의 성능은 제어를 하지 않고 구동 시에 측정된 슬립 오차와 제안된 제어기를 사용하여 구동 시 측정된 슬립 오차를 비교하여 평가하였다. 실험 결과 스텝 제어기를 사용한 리니어 초음파 모터의 슬립오차는 $10{\mu}m$이하로 우수한 성능을 입증하였다.

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광섬유 EFPI 센서를 이용한 실시간 고정밀 변위 측정 (Real-time Measurement of Precision Displacement using Fiber Optic EFPI Sensor)

  • 박상욱;김대현;김천곤;홍창선
    • 한국복합재료학회:학술대회논문집
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    • 한국복합재료학회 2003년도 추계학술발표대회 논문집
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    • pp.154-157
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    • 2003
  • Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown, and the sinusoidal approximation algorithm that estimates past and coming fringe values was verified through the linearity. Real-time signal processing program was developed, and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.4 ~ 10 nm in the displacement range of $0 ~ 300\mu\textrm{m}$ was obtained by reducing the photodetector noise using low-pass filter and signal averaging. The nano-translation stage with a Piezo-electric actuator and the EFPI sensor system was designed and tested. This stage successfully reached to the desired destination in $15\mu\textrm{m}$ range within 1 nm accuracy.

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적층식 압전소자를 이용한 고속 서보밸브 시스템의 개발 (Development of a High-Speed Electrohydraulic Servovalve System Using Stack-Type Piezoelectric Elements)

  • 방영봉;이교일;임원규;주춘식;허재웅
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2003년도 춘계학술대회 논문집
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    • pp.733-736
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    • 2003
  • This paper presents two systems of two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. Two flapper moving mechanisms proposed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental results show that the first flapper moving mechanism has the frequency response of over 500 Hz and the second one has the response of over 600 Hz. And the first simplified servovalve system rising the first flapper moving mechanism has the frequency response of about 150 Hz, and the second system has the response of about 300 Hz at the supply pressure of 210 bar

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적층식 압전소자를 이용한 고속 서보밸브 시스템의 개발 (Development of a High-Speed Electrohydraulic Servovalve System Using Stack-Type Piezoelectric Elements)

  • 방영봉;주춘식;이교일;심영보
    • 한국정밀공학회지
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    • 제20권6호
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    • pp.71-80
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    • 2003
  • This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

Development of a High-Speed Electrohydraulic Servovalve System Using Stack-Type Piezoelectric Elements

  • Joo, Choon-Shik;Bang, Young-Bong;Lee, Kyo-Il;Shim, Young-Bo
    • International Journal of Precision Engineering and Manufacturing
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    • 제4권6호
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    • pp.29-37
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    • 2003
  • This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

마찰 구동형 압전 작동기를 이용한 카메라 손떨림 진동보상 기법 연구 (On the Compensation of Camera Hand Shaking Using Friction Driven Piezoelectric Actuator)

  • 조명신;황재혁
    • 항공우주시스템공학회지
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    • 제9권4호
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    • pp.23-30
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    • 2015
  • The focal plane image stabilization for a camera is one of the most effective method that can increases the digital camera's image quality by compensating the vibration disturbance. The optical image stabilization can be implemented by making the focal plane to trace the path of incident light. To control the position of focal plane motion compensating stage precisely, a nonlinear control algorithm has been applied by considering coulomb friction which is nonlinear behavior of the compensator system. In our study, we have analyzed the hand shaking vibration using the gyro sensor, and made a mathematical model of compensating stage containing optical sensor and piezo-actuator. Then the nonlinear control algorithm has been designed and its performance has been verified by experiment. In this study, a friction driven peizo-electric actuator with $1{\mu}m$ resolution and 10mm/s speed has been used for stage movement.

나노포지셔너 개발을 위한 테스트벤치 제작 (Manufacturing Test-bench for Developing Nanopositioner)

  • 권지용;박근제;유원진;이치범
    • 한국생산제조학회지
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    • 제22권3_1spc호
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    • pp.593-599
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    • 2013
  • In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.

Comparison of In Vitro Development of Porcine Embryos Derived from Transfer of Embryonic Germ Cell Nuclei into Oocytes by Electrofusion and Piezo-Driven Microinjection

  • Ahn, Kwang-Sung;Won, Ji-Young;Heo, Soon-Young;Kang, Jee-Hyun;Shim, Ho-Sup
    • Reproductive and Developmental Biology
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    • 제31권2호
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    • pp.127-131
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    • 2007
  • Embryonic germ (EG) cells are undifferentiated stern cells isolated from cultured primordial germ cells (PGC). These cells share many characteristics with embryonic stem cells including morphology and pluripotency. Undifferentiated porcine EG cell lines demonstrating capacities of differentiation both in vitro and in vivo have been established. Since EG cells can be cultured indefinitely in an undifferentiated state, whereas somatic cells in primary culture are often unstable and have limited lifespan, EG cells may provide inexhaustible source of karyoplasts in nuclear transfer (NT). In this study the efficiencies of NT using porcine EG and fetal fibroblast cells were compared. Two different techniques were used to perform NT. With conventional NT procedure (Roslin method) involving fusion of donor cells with enucleated oocytes, the rates of development to the blastocyst stage in EG and somatic cell NT were 16.8% (59/351) and 14.5% (98/677), respectively. In piezo-driven microinjection (Honolulu method) of donor nuclei into enucleated oocytes, the rates of blastocyst formation in EG and somatic cell NT were 11.9% (15/126) and 9.4% (9/96), respectively. Regardless of NT methods used in this study, EG cell NT gave rise to comparable rate of blastocyst development to somatic cell NT. Overall, EG cells can be used as karyoplast donor in NT procedure, and embryos can be produced by EG cell NT that may be used as an alternative to conventional somatic cell NT.

고속충돌시험기 개발 및 부재의 충돌특성 실험에 관한 연구 (I) (A Study on the Development of Test Rig for High Speed Frontal Crash and Test of Members ($\textrm{I}$))

  • 강신유;장인배;김헌영;정규진;박경환
    • 한국정밀공학회지
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    • 제17권6호
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    • pp.119-126
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    • 2000
  • In this paper. a simple high-speed crash test rig for members of vehicle was developed for the improvement of crashworthiness of vehicle's side rail. The cart hanging the specimen is accelerated up to 35 mph by the force of freely dropping weight and 1:3 accelerating pulleys. The cart with shock absorbers travels on the rail roads, so it does not transfer any additional vibration to the specimen. To measure the test results, two types of accelerator are considered. the one is a strain gage type and the other is a piezo type. The test rig is rated good to test the specimen like a side rail of vehicle as developing the vehicle's structures in the early design stage.

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