Proceedings of the Korean Society of Precision Engineering Conference (한국정밀공학회:학술대회논문집)
- 2003.06a
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- Pages.733-736
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- 2003
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- 2005-8446(pISSN)
Development of a High-Speed Electrohydraulic Servovalve System Using Stack-Type Piezoelectric Elements
적층식 압전소자를 이용한 고속 서보밸브 시스템의 개발
Abstract
This paper presents two systems of two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. Two flapper moving mechanisms proposed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental results show that the first flapper moving mechanism has the frequency response of over 500 Hz and the second one has the response of over 600 Hz. And the first simplified servovalve system rising the first flapper moving mechanism has the frequency response of about 150 Hz, and the second system has the response of about 300 Hz at the supply pressure of 210 bar
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