• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.19 no.1
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• pp.101-107
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• 2010

This paper presents motion control of the precision stage composed of the piezoelectric actuator and flexible hinges. The stage shows approximately 27% overshoot when the stage was applied to 30V square wave input voltage. Also, the stage shows nonlinear response characteristics including hysteresis. This paper proposes feedback control technique to suppress the phenomenon of hysteresis and overshoot using the sliding mode control scheme with the integrator. Also, this paper suggests the method that searches important parameters of sliding mode control and observer using Genetic Algorithm. To demonstrate the effectiveness of the proposed control algorithm, experimental validations are performed.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.514-516
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• 2005

압전 구동기(Piezo actuator)는 수 나노미터 수준의 위치정밀도와 고분해능을 가지고 있으나 비선형 특성인 히스테리시스(Hysteresis)는 정상상태에서 위치 오차를 발생하는 주요 원인이 된다. 현재까지 히스테리시스를 보상하기 위해 피 프 포워드 제어 방법, Pl 제어 방법, $H_{\infty}$제어 방법 등이 연구되어 왔지만 저주파 대역의 외란(disturbance)까지 고려하여 시스 템을 주파수 영역에서 설계, 분석하는 방법에 대한 연구는 미흡하였다. 본 논문은 압전 구동기의 위치 제어를 위한 제어기의 설계와 이를 주파수 영역에서 분석하는 내용을 다룬다. 제어기의 설계는 히스테리시스를 보상하기 위해 극점 배치 방법과 외란 관측기(Disturbance observer)를 기본으로 하였으며 적분제어를 적용하여 시스템 민감도(sensitivity)를 개선하였다. 시뮬레이션과 실험을 통하여 설계한 제어기가 히스데리시스에 대한 보상과 민감도의 개선에 효율적임을 검증하였다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.190-194
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• 2001

Because, Piezo-electric transducer(PZT) transform electric energy into mechanical energy, it is a adequate material for positioning control and force control, take excellent properties as actuator with high speed and high performance. Recently, researches of ultra precision positioning using this PZT are advanced in. In this paper, we use a actuator of PZT, design a positioning apparatus with ultra precision position apparatus as hinge structure. Because of this purpose, before, we were confirmed in control properties of ultra precision stage by FEM method.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2002.04a
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• pp.422-428
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system (100mm stroke and ${\pm}$ 10nm positioning accuracy) with single plane X-Y stage are materialized.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.11 no.5
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• pp.65-72
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• 2002

In this study, actuator, sensor, guide, power transmission element and control method are considered for ultra-precision positioning apparatus. Through previous process, single plane X-Y stage with ultra-precision positioning is manufactured. Global stage for the purpose of materialization with robust system, is combined by using AC servo motor and ball screw and rolling guide. And ultra-precision positioning system is developed by micro stage with elastic hinge type and piezo element. global servo and micro servo for the purpose of materialization positioning accuracy with nm(nanometer) are controlled simultaneously by using incremental encoder and laser interferometer as displacement measurement sensor. Through previous process, ultra-precision positioning system(100mm stroke and $\pm$ l0nm positioning accuracy) with single plane X-Y stage are materialized.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.1
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• pp.107-111
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• 2015

This paper proposes an optimal design for a precision motion stage employing a parallelogram flexure hinge. The voltage applied to the piezo element produces motion that is amplified through a 3-stage amplification structure. Especially, instead of the generally used conic section flexure hinge a parallelogram shaped flexure hinge is used that improves the flexibility of the lever. An Finite Element Analysis is performed on each motion stage lever where optimal design was achieved using Response Surface Methodology(RSM).

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Korean Journal of Optics and Photonics
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• v.19 no.2
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• pp.132-139
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• 2008

In scanning laser optical tweezers, high speed scanning stages are used to manipulate a laser beam spot. Due to the inertia of the stage, the output scanning signal decreases with increased frequency of the input signal. This discrepancy in the signals is difficult to observe since most of the energy from the laser beam is blocked out to avoid CCD damage. In this paper, we propose two methods to alleviate these problems. Firstly, frequency responses of piezo stages are measured to analyze the signal drops and the input signal is compensated accordingly. Secondly, an overlay of the scanning path is drawn on the live monitoring screen to enhance the visibility of the scanning path. The result is a drop-compensated scanning with clear path view.

• Journal of the Korean Geotechnical Society
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• v.21 no.5
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• pp.215-223
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• 2005

Piezo-ceramics are special materials which transform energy from mechanical to electrical forms and vice versa. Bender elements are composite materials consisting of thin piezo-ceramics and elastic shims, and are widely used as actuators and transducers in the field of electronics, robotics, autos and mechatronics utilizing the effectiveness of energy transformation capability. In geotechnical engineering, commercial bender elements are used in laboratory as source and receiver in the measurements of soil stiffness. The elements were built by using various metal shims sandwiched between piezo-ceramics and coating over the composite in the research. A pair of elements were buried in a concrete block and used as source and receiver to measure the stiffness of the concrete. The test results were verified by comparing with the resonant column testing results. In a preliminary stage of the development of an in-situ seismic testing equipment using bender elements for soft clay materials, shear waves were generated and measured by burying the elements in the barrel of kaolinite and water mixture. The measured shear wave signals were so distinct for the first-arrival pick that applicability of the elements in the field measurements could be very promising.