• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.733-736
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• 2003

This paper presents two systems of two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. Two flapper moving mechanisms proposed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental results show that the first flapper moving mechanism has the frequency response of over 500 Hz and the second one has the response of over 600 Hz. And the first simplified servovalve system rising the first flapper moving mechanism has the frequency response of about 150 Hz, and the second system has the response of about 300 Hz at the supply pressure of 210 bar

• Journal of the Korean Society for Precision Engineering
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• v.20 no.6
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• pp.71-80
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• 2003

This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.6
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• pp.29-37
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• 2003

This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.821-826
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezo actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Journal of Drive and Control
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• v.9 no.4
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• pp.14-18
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• 2012

Two kinds of piezoelectric actuator are applied to the valve for controlling the direction, the flow and the pressure of the fluid. One is a stack type piezoelectric actuator which has very fast response characteristics but very tiny displacement. The other is a bender type piezoelectric actuator which has also fast response characteristics but lower than the stack type one, and has longer displacement than the stack type one. So, the bender type piezoelectric actuator has advantage to apply to the valve for controlling a large amount of flow and fast on-off operating. In this study, the bender type piezoelectric pneumatic valve for color sorter is designed and fabricated. The new type high speed piezo valve with the both side supporting mechanism for high operating frequency and high reliability is discussed for separating the foreign body from the grains. Finally, the performance characteristics of a fabricated valve are analyzed and the frequency characteristics are also discussed for substituting the conventional type solenoid actuator.

• Coupled systems mechanics
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• v.2 no.1
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• pp.53-83
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• 2013

Sea waves induce significant pressures on coastal surfaces, especially on rocky vertical cliffs or breakwater structures (Peregrine 2003). In the present work, this hydrodynamic pressure is considered as the excitation acting on a piezoelectric material sheet, installed on a vertical cliff, and connected to an external electric circuit (on land). The whole hydro/piezo/electric system is modeled in the context of linear wave theory. The piezoelectric elements are assumed to be small plates, possibly of stack configuration, under a specific wiring. They are connected with an external circuit, modeled by a complex impedance, as usually happens in preliminary studies (Liang and Liao 2011). The piezoelectric elements are subjected to thickness-mode vibrations under the influence of incident harmonic water waves. Full, kinematic and dynamic, coupling is implemented along the water-solid interface, using propagation and evanescent modes (Athanassoulis and Belibassakis 1999). For most energetically interesting conditions the long-wave theory is valid, making the effect of evanescent modes negligible, and permitting us to calculate a closed-form solution for the efficiency of the energy harvesting system. It is found that the efficiency is dependent on two dimensionless hydro/piezo/electric parameters, and may become significant (as high as 30 - 50%) for appropriate combinations of parameter values, which, however, corresponds to exotically flexible piezoelectric materials. The existence or the possibility of constructing such kind of materials formulates a question to material scientists.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.230-236
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT (lead (Pb) zirconia (Zr) Titanate (Ti)) based stack actuator incorporating with the PID (Proportional-Integral-Derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.11
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• pp.1134-1142
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• 2008

In this paper, a model-based stick-slip compensation for the micro-positioning is proposed using an enhanced stick-slip model based on statistical rough surface contact model. The smart structure is comprised with PZT(lead (Pb) zirconia(Zr) Titanate(Ti)) based stack actuator incorporating with the PID(proportional-integral-derivative) control algorithm, mechanical displacement amplifier and positioning devices. For the stick-slip compensation, the elastic-plastic static friction model is used considering the elastic-plastic asperity contact in the rough surfaces statistically. Mathematical model of system for the positioning apparatus was derived from the dynamic behaviors of structural parts. PID feedback control algorithms with the developed stick-slip model as well as feedforward friction compensator are formulated for achieving the accurate positioning performance. Experimental results are provided to show the performances of friction control using the developed positioning apparatus.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.10
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• pp.685-691
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• 2015

In this work, to identify effective parameter for performance of piezoelectric jetting dispenser, experimental investigation is carried out based on design of experiment. After preparing jetting dispenser using two stack-type piezoelectric actuators, basic working principle of the jetting dispenser is described. Eight operating conditions are chose as main factors and it is assumed that each factor has two levels. To reduce number of experiments for performance evaluation, the experimental sets are designed based on factional factorial design method. Experimental setup is established and the weight of single dot is measured by using precision scale. The main and interaction effects of factors are analyzed using commercial statistical program and optimal operating condition for small amount and small variation of weight of dispensed single dot are determined.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.7
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• pp.851-858
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• 2011

Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.