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Modularized Flexure-Hinge Nanopositioner Based on Four-Bar-Link-Mechanism  

Chae, Ki-Woon (Graduate School of Knowledge-Based Technology & Energy, Korea Polytechnic Univ.)
Bae, Jin-Hyun (Graduate School of Knowledge-Based Technology & Energy, Korea Polytechnic Univ.)
Jeong, Young-Hun (Department of Mechanical Engineering, Korea Polytechnic Univ.)
Publication Information
Journal of the Korean Society for Precision Engineering / v.28, no.7, 2011 , pp. 851-858 More about this Journal
Abstract
Nanopositioning technologies play an important role in the progress of electronics, optics, bio-engineering and various nano-scale technologies. As a result, various practical nanopositioning methods have been successfully introduced. Flexure mechanism is a valuable method in nanopositioning because of smooth and friction-free motion and the infinitesimal movement near to sub-nm. In this study a modularized nanopositioner based on parallelogram four-bar linkage structure with right-circular flexure hinge was developed. The positioning performance of a single axis nanopositioner and a XY nanopositioner which was extended from single axis one were demonstrated using control experiments. Consequently, it was shown that the developed single axis nanopositioner possessed high performance and could be extended to various multi-axis nanopositioners.
Keywords
Nanopositioner; Flexure Hinge; Piezo-stack Actuator; Parallelogram Linkage;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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