• JSTS:Journal of Semiconductor Technology and Science
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• v.15 no.1
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• pp.1-6
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• 2015

In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%~70%. Also, in this paper, more simple and convenient stress-measurement method was presented.

• Smart Structures and Systems
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• v.25 no.1
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• pp.37-45
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• 2020

This paper aims at enlightening the properties, computational and implementation issues related to Kalman filter based state estimation algorithms and sliding mode observers, by applying them for estimating the states of a smart structure system. The Kalman based estimators considered in this work are Kalman filter and information filter and, the sliding mode observers considered are Utkin observer and higher order sliding mode observer. A fourth order linear time invariant model of a piezo actuated beam is used in this work. This structure is embedded with four number of piezo patches, of which two act as sensors, one as disturbance actuator and the other as control actuator. The performance of the state estimation algorithms is evaluated through simulation, for the first two vibrating modes of the piezo actuated structure, when the structure is maintained at first mode and second mode resonance.

• Journal of Sensor Science and Technology
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• v.25 no.1
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• pp.35-40
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• 2016

Pulse diagnosis is one of the representative diagnostic methods in Oriental medicine. In this study, a pulse pressure sensor array coated with silicone, which includes 6 piezo-resistive sensors and 1 thermistor, is fabricated for pulse measurement. It is necessary to coat the pulse sensor array with silicone to avoid the fracture or damage of pressure sensors when the sensor is in contact with the skin and a constant pressure is applied. However, the silicone coating on the pulse sensor array can cause signal interference among the sensors in the pulse sensor array. The interference number (IN), a calculation for expressing the degree of interference among channels, is changed according to the silicone thickness on the pulse sensor array. The IN is increased by a thick silicone coating, but the fabrication error, an important index for the mass production of the sensor array, is reduced by the thickness of the silicone coating. We propose that the thickness of the silicone on the pulse sensor array is an important consideration for the performance of the fabricated sensor and manufacturing repeatability.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.6
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• pp.756-760
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• 2011

This paper proposed an alignment stage driven by piezo actuators for alignment process of a contact-type lithography. Among contact-type lithography processes, an UV-curable nanoimprint process is an unique process to be able to align patterns on upper and lower layers. An alignment stage of the UV-curable nanoimprint process requires nano-level resolution as well as high stiffness to overcome friction force due to contact moving. In this paper, the alignment stage consists of a compliant mechanism using flexure hinges, piezo actuators for high force generation, and capacitive sensors for high-resolution measurement. The compliant mechanism is implemented by four prismatic-prismatic compliant chains for two degree-of-freedom translations. The compliant mechanism is composed of flexure hinges with high stiffness, and it is directly actuated by the piezo actuators which increases the stiffness of the mechanism, also. The performance of the ultra-precision stage is demonstrated by experiments.

• Journal of Korean Tunnelling and Underground Space Association
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• v.25 no.6
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• pp.509-523
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• 2023

The high-level nuclear waste (HLW) repository is exposed to complex environmental conditions consisting of high temperature, high humidity, and radiation, resulting in structural deterioration. Therefore, structural health monitoring is essential, and piezo sensors are used to detect cracks and estimate strength. However, since the monitoring sensors installed in the disposal tunnel and disposal container cannot be replaced or removed, the quantitative life of the monitoring sensor and its suitability must be assessed. In this study, the life of a piezo sensor for monitoring was assessed using an accelerated life test (ALT). The failure mode and mechanism of the piezo sensor under high temperature conditions were determined, and temperature stress's influence on the piezo sensor's life was analyzed. ALT was conducted on temperature stress and the relationship between temperature stress and piezo sensor life was suggested. The life of the piezo sensor was assessed using the Weibull probability distribution and the Arrhenius acceleration model. The suggested relationship can be used in multiple stress ALT designs for more precise life assessment.

• Journal of Sensor Science and Technology
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• v.19 no.2
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• pp.124-129
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• 2010

For the industrial printing applications, the stability of the piezo-driven inkjet printhead is a major requirement. In this paper, we focused on the failure modes of the inkjet printhead and realized a method to detect and repair them at high speed. The printhead monitoring is performed by detecting the residual vibration of the actuating plate using the self- sensing capability of the piezoelectric material. To measure the channel acoustics and to identify the malfunctioning nozzle, we devised the bridge sensing circuitry and failure detection algorithm. The residual vibration signals can be affected by the boundary conditions of the channel acoustics, so it is possible to identify the failure causes by analyzing the monitoring signals. Therefore it is also possible to apply a proper restoring process to the defective printhead. The experimental results show that this method is effective in improving the reliability of the industrial printing.

• Advances in materials Research
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• v.11 no.4
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• pp.331-349
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• 2022

In the present work, we proposed an analytical study on buckling behavior of a sandwich plate with polymeric core integrated with piezo-electro-magnetic layers such as BaTiO3 and CoFe2O4 reinforced by graphene platelets (GPLs). The Halpin-Tsai micromechanics model is used to describe the properties of the polymeric core. The governing equations of equilibrium are obtained from first-order shear deformation theory (FSDT) and the Navier's method is employed to solve the equations. The results show the effect of different parameters such as thickness, length, weight fraction of GPLs, and also effect of electric and magnetic field on critical buckling load. The result of this study can be obtained in the aerospace industry and also in the design of sensors and actuators.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.1 s.244
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• pp.84-89
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• 2006

A wireless capsule endoscope has been developed to replace the conventional endoscope. However, the commercialized capsule endoscope moves passively by peristaltic waves, which has some limitations for doctors to diagnose more thoroughly and actively. In order to solve this problem, a locomotive mechanism is proposed for wireless capsule endoscopes. Based on the tests of various actuators, a piezo actuator is selected as a micro actuator for capsule endoscope. In general, piezo actuators are known to have limited displacement with high voltage supply. In order to overcome the limitation of common piezo actuator, the impact based piezo actuator, is developed to realize long stroke up 11mm. By using the impact based piezo actuator, a prototype of an earthworm-like locomotive mechanism was developed. In addition, the proposed locomotive mechanism has engraved clamps mimicked the claw of an insect. The earthworm-like locomotive mechanism has 15 mm in diameter and 30mm under retraction stage and 41 mm under elongation stage in total length. Hollow space is allocated to comprise essential endoscope components such as a camera, a communication module, bio sensors, and a battery. For the feasibility test of proposed locomotive mechanism, a series of experiments were carried out including in-vitro tests. Based on results of the experiments, we conclude that the proposed locomotive mechanism is effective to be used for micro capsule endoscopes.

• 한국ITS학회:학술대회논문집
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• 2003.11a
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• pp.56-61
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• 2003

• Journal of the Korean Society for Precision Engineering
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• v.25 no.2
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• pp.115-122
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• 2008

Mostly used sensors have wired powering and two-way cable systems. It is difficult to employ wired sensor network in ubiquitous era because of a number of sensors and cables. Therefore, sensor networks move from wired systems to wireless systems for the future. However, the power source is a critical obstacle for wireless sensornodes. This research represents the new power source which supplies energy sensor node, maintains over 10 years, and thus replaces batteries with limit of lifetime. The system with piezo materials scavenges extra energies such as vibration and acceleration from the environment. Then it converts the scavenged mechanical energy to electrical energy for powering a sensor, a controller and a circuit for regulating voltage and transmitting sensor value. This study explains the properties of piezo material through theoretical analysis and experiments, and demonstrates powering sensor and transmitting data with stored energy (35mJ) for 14 sec. The developed system provides a solution to overcome the critical problem of making up wireless sensor networks.