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http://dx.doi.org/10.5573/JSTS.2015.15.1.001

Stress-Sensors with High-Sensitivity Using the Combined Meandering-Patterns  

Cho, Chun-Hyung (Department of Electronic & Electrical Engineering, College of Science and Technology, Hongik University)
Cha, Ho-Young (School of Electronic & Electrical Engineering, College of Engineering, Hongik Unversity)
Publication Information
JSTS:Journal of Semiconductor Technology and Science / v.15, no.1, 2015 , pp. 1-6 More about this Journal
Abstract
In this work, the combined meandering-pattern stress-sensors were presented in order to achieve the high sensitivity of stress sensors. Compared to the previous works, which have been using the single meandering-pattern stress-sensors, the sensitivity was approximately observed to increase by 30%~70%. Also, in this paper, more simple and convenient stress-measurement method was presented.
Keywords
Meandering-pattern; sensitivity; stress sensors; piezo-resistive coefficients;
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Times Cited By KSCI : 1  (Citation Analysis)
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