1 |
Dauksher, W. J., Le, N. V., Ainley, E. S., Nordquist, J. J., Gehoski, K. A., Young, S. R., Baker, J. H., Convey, D., and Mangat, P. S., 2006, "Nano-imprint Lithography: Templates, Imprinting and Wafer Pattern Transfer," Microelectronic Engineering, Vol. 83, No. 4-9, pp. 929-932.
DOI
ScienceOn
|
2 |
Sreenivasan, S. V., Choi, J., Schumaker, P., and Xu, F., 2011, "Status of UV Imprint Lighography for Nanoscale Manufacturing," Comprehensive Nanoscience and Technology, Chap. 4.04, pp. 83-116.
|
3 |
Ha, J., and Jeong, K., 2009, "Fuzzy Controller Design for a Nano Precision Stage Driven by a PZT," Trans. of the Korean Society of Machine Tool Engineers, Vol. 18, No. 4, pp. 228-233.
|
4 |
Cho, B., and Seong, H., 2010, "The Design of Sliding Mode Controller for Precision Stage Using Genetic Algorithm," J. of the Korea Society of Machine Tool Engineers, Vol. 19, No. 1, pp. 101-107.
|
5 |
Physik Instrumente GmbH, 2007, The World of Micro and Nanopositioning, Physik Instrumente Catalogue.
|
6 |
Choi, K. -B., and Han, C. S., 2007, "Optimal Design of a Compliant Mechanism with Circular Notch Flexure Hinges," J. of Mechanical Engineering Science, Vol. 221, No. C3, pp. 385-392.
DOI
|
7 |
Kim, D., Lee, D. Y., and Gweon, D. G., 2007, "A New Nano-accuracy AFM System for Minimizing Abbe Errors and the Evaluation of its Measuring Uncertainty," Ultramicroscopy, Vol. 107, No. 4-5, pp. 322-328.
DOI
ScienceOn
|
8 |
Scire, F. E., and Teague, E. C., 1978, "Piezodriven 50-mm Range Stage with Subnanometer Resolution," Review of Scientific Instruments, Vo. 49, No. 12, pp. 1735-1740.
DOI
ScienceOn
|
9 |
Chang, S. H., Tseng, C. K., and Chien, H. C., 1999, "An Ultraprecision Piezo-micropositioner. Part I: Design and Analysis," IEEE Transactionson Ultrasonics, Ferroelectrics, and Frequecy Control, Vol. 46, No. 4, pp. 897-905.
DOI
|