• 한국소음진동공학회논문집
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• 제22권9호
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• pp.903-909
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• 2012

In elliptical vibration cutting(EVC) where the cutting tool traces a micro-scale 2-dimensional elliptical trajectory, the kinematical and vibrational characteristics of the EVC device greatly affect cutting performance. In this study, kinematical and vibrational characteristics of an EVC device constructed with two orthogonally-arranged stacked piezoelectric actuators were investigated both analytically and experimentally. The step voltage was applied to the orthogonal EVC device and the associated displacements of the cutting tool were measured to assess kinematical characteristics of the orthogonal EVC device. To investigate the vibrational characteristic of the orthogonal EVC, sinusoidal voltage was applied to the EVC device and the resulting displacements were measured. It was found from experiments that coupling of displacements in the thrust and cutting directions and the tilt of the major axis of the elliptical trajectory exists. In addition, as the excitation frequency is in vicinity of resonant frequencies the distortion in the shape of the elliptical trajectory becomes greater and change in the rotation direction occurs. To correct the shape distortion of the elliptical trajectory, the shape correcting procedure developed for the parallel EVC device was applied for the orthogonal EVC device and it was shown that the shape correcting method successfully corrects distortion.

• 한국소음진동공학회논문집
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• 제14권6호
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Tribology and Lubricants
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• 제27권1호
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• pp.13-18
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• 2011

The ultra-precision products which recently experienced high in demands had included the large areas of most updated technologies, for example, the semiconductor, the computer, the aerospace, the media information, the precision machining. For early 21st century, it was expected that the ultra-precision technologies would be distributed more throughout the market and required securing more nation-wise advancements. Furthermore, there seemed to be increasing in demand of the single crystal diamond tool which was capable of the ultra-precision machining for parts requiring a high degree of complicated details which were more than just simple wrapping and policing. Moreover, the highest degree of precision is currently at 50 nm for some precision parts but not in all. The machining system and technology should be at very high performed level in order to accomplish this degree of the ultra-precision.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.131-132
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• 2006

This paper presents a micro-positioning platform based on the unique parallel mechanism recently developed by the authors. The platform has a meso-scale rectangular shape whose size is $20{\times}23m$. The stroke is 5 mm for both the x- and y-axis and 100 degrees for the ${\alpha}$-axis(the rotational axis along the x-axis). The platform is actuated by the three sets of two-stage linear actuators: a linear motor for rough positioning and a piezo actuator for fine positioning. The platform is already assembled. Experimental results of the positioning measurements and control performance are presented.

• 한국생산제조학회지
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• 제22권3_1spc호
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• pp.593-599
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• 2013

In this study, a test-bench for developing and verifying a 1- or 2-axis nanopositioner was manufactured. Using this test-bench, adesigned and manufactured flexure stage based on an analysis can configure nanopositioning systems. A breadboard and fixture were fabricated to be equipped with various types of mechanisms and sizes of stages. The test-bench has linear encoders for calibrating sensors and verifying the orthogonality and parasitic motion of 2-axis nested-type nanopositioners. The controller was developed using LabVIEW and a TI microcontroller. A case study that exemplified the test bench for developing a nanopositioner by senior undergraduate students is shown.

• 소음진동
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• 제10권6호
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• pp.1048-1058
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• 2000

본 논문에서는 압전 세라믹 재료를 작동기 및 감지기로 이용한 사각 경계면이 고정된 얇은 사각평판의 능동 진동제어 방법을 제시한다. 실험 데이터에 기초한 다중 입출력계의 주파수영역 모델링방법을 이용하여 분포된 센서 및 구동기 특성이 포함된 구조물의 동적 특성이 규명된다. 제어기 구조로는 혼합형을 채택하고 되먹임 제어기는 LQG 제어기법에 의해 설계된다. 앞먹임 제어기는 다중 filtered-$x$ 최소자승오차법에 의해 적응되도록 한다. 진동제어에 대한 시뮬레이션 및 실험결과는 제안된 제어기법이 지속적 외란 및 과도적 외란에 효율적으로 적용될 수 있음을 보인다.

• International Journal of Precision Engineering and Manufacturing
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• 제7권4호
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• pp.3-7
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• 2006

Confocal scanning microscopy is a measurement technique used to observe micrometer and sub-micrometer features due to its high resolution, nondestructive properties, and 3D surface profiling capabilities. The design, implementation, and performance test of a confocal scanning microscopy system are presented in this paper. A short-wavelength laser (405 nm) and an objective lens with a high numerical aperture (0.95) were used to achieve the desired high resolution, while the x- and y-axis scans were implemented using an acousto-optic deflector and galvanomirror, respectively. An objective lens with a piezo-actuator was used to scan the z-axis. A spatial resolution of less than 138 nm was achieved, along with successful 3D surface reconstructions.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.295-298
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• 2005

This paper is concerned with the precision material property measurement of a micro metal thin foil that is used in MEMS technology. Since these MEMS components require great precision and accuracy, evaluation of reliability such as the lift cycle endurance test, impact test, and residual stress test is necessary for these components. However, in practice, real reliability tests are not easy to perform due to consideration of various factors. Rather than actual testing, it would be much easier to evaluate the reliability of components by the analytical approach. Although the analytical method is utilized by software tools, it is obviously necessary to acquire fundamental properties of materials through real test methods. In this paper, the oriented mechanical properties of aluminum thin foil are measured by nano scale material property measurement system.

• 한국전기전자재료학회논문지
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• 제21권4호
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• pp.335-340
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• 2008

In this study, novel structured thin ultrasonic rotary motor has been proposed. Ultrasonic motors are based on an elliptical motion on the surface of elastic body. Thin brass plate was used as a cross shaped vibrator and eight ceramic plates were attached on upper side and bottom side of the brass plate. From the thin stator, elliptical displacements of the four contact tips were obtained. To find the optimal size of the stator, motions of the motors were simulated using ATILA by changing length, width and thickness of the ceramics. The stators had commonly three resonance peaks and contact tips of the stator moved on tangential or normal trajectories at these resonance peaks. The maximum displacements at the resonance peaks were compared. As results, maximum displacements of the contact tips were obtained at the length of 16 mm, width of 6 mm and thickness of 0.4 mm. Changes of the resonance frequencies were inversely proportional to the length of ceramic and proportional to the width of ceramic. The motor was fabricated by using the designed stator. And, the characteristics of the motor were compared with the simulated results. When the motor was fabricated with these results, speed fo 935 rpm was obtained by input voltage of 25 Vrms at 93.5 kHz.

• Smart Structures and Systems
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• 제9권5호
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• pp.427-439
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• 2012

The present paper deals with the analytical solution of a functionally graded piezoelectric (FGP) cylinder in the magnetic field under mechanical, thermal and electrical loads. All mechanical, thermal and electrical properties except Poisson ratio can be varied continuously and gradually along the thickness direction of the cylinder based on a power function. The cylinder is assumed to be axisymmetric. Steady state heat transfer equation is solved by considering the appropriate boundary conditions. Using Maxwell electro dynamic equation and assumed magnetic field along the axis of the cylinder, Lorentz's force due to magnetic field is evaluated for non homogenous state. This force can be employed as a body force in the equilibrium equation. Equilibrium and Maxwell equations are two fundamental equations for analysis of the problem. Comprehensive solution of Maxwell equation is considered in the present paper for general states of non homogeneity. Solution of governing equations may be obtained using solution of the characteristic equation of the system. Achieved results indicate that with increasing the non homogenous index, different mechanical and electrical components present different behaviors along the thickness direction. FGP can control the distribution of the mechanical and electrical components in various structures with good precision. For intelligent properties of functionally graded piezoelectric materials, these materials can be used as an actuator, sensor or a component of piezo motor in electromechanical systems.