• Transactions on Electrical and Electronic Materials
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• v.11 no.1
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• pp.1-10
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• 2010

This is an overview paper reporting our most recent work on processing and microstructure of nano-structured oxides and their photoluminescence and photo-catalysis properties. Zinc oxide and related transition metal oxides such as vanadium pentoxide and titanium dioxide were produced by a combination of magnetron sputtering, hydrothermal growth and atmosphere controlled heat treatment. Special morphology and microstructure were created including nanorods arrays, core-brushes, nano-lollipops and multilayers with very large surface area. These structures showed special properties such as much enhanced photoluminescence and chemical reactivity. The photo-catalytic properties have also been promoted significantly. It is believed that two factors contributed to the high reactivity: the large surface area and the interaction between different oxides. The transition metal oxides with different band gaps have much enhanced photoluminescence under laser stimulation. Use of these complex oxide structures as electrodes can also improve the energy conversion efficiency of solar cells. The mixed oxide complex may provide a promising way to high-efficiency photo emitting materials and photo-catalysts.

• Bulletin of the Korean Chemical Society
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• v.34 no.1
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• pp.313-316
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• 2013

• Journal of Industrial Technology
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• v.43 no.1
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• pp.49-55
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• 2023

Cluster tools are extensively employed in various wafer fabrication processes within the semiconductor manufacturing industry, including photo lithography, etching, and chemical vapor deposition. Contemporary fabrication facilities encounter customer orders with technical specifications that are similar yet slightly varied. Consequently, modern fabrications concurrently manufacture two or three different wafer types using a cluster tool to maximize chamber utilization and streamline the flow of wafer lots between different process stages. In this review, we introduce two methods of concurrent processing of multiple wafer types: 1) concurrent processing of multiple wafer types with different job flows, 2) concurrent processing of multiple wafer types with identical job flows. We describe relevant research trends and achievements and discuss future research directions.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.2
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• pp.241-249
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• 2000

In this study, UV-catalyzed $H_2O_2$ oxidation and $H_2O_2$ oxidation to remove contaminants from photo processing chemicals were investigated at various conditions. Photo processing chemicals contains high concentrations of organic compounds and has very low biodegradability. Hydrogen peroxide is subjected to gradual decomposition as metastable substance. In the process, short-lived and highly reactive hydroxyl radicals are formed. The decomposition can be significantly accelerated by use of appropriate catalyst, such as ultraviolet radiation. The experiments were conducted in a UV-free reflecting reactor in batch and a high-pressure mercury lamp was used as UV source. Mixing, cooling and ventilation of the reactor were operated during experiments. In $UV/H_2O_2$ oxidation and $H_2O_2$ oxidation, the removal efficiencies of $COD_{Cr}$, TOC and chromaticity increased with the increase of $H_2O_2$ dosage and were higher in the controlled pH condition of 3 than in original pH condition of 8. In $UV/H_2O_2$ oxidation under the optimum condition of pH 8 and 1.3 stoichiometric $H_2O_2$ dosage, the removal efficiencies of $COD_{Cr}$, TOC and chromaticity were 47.5%, 75.0% and 91.5% respectively and $BOD/COD_{Cr}$ ratio was significantly increased from 0.04 to 0.21.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.269-271
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• 2009

We investigated on the sintering behaviors and electrical properties of photo-sensitive aluminum (Al) electrode materials in plasma display panels. General characteristics of Al electrodes was totally different to that of conventional Ag materials; resistivity was decreased with the increasing of metal particle sizes and the amount of frit content and there is almost no width difference between developed and fired electrodes layers. Microstructures of fired electrodes revealed that Al electrodes had different mechanism on necking between metal particles and making electrical conducting path. Chemical durability (especially, antialkalinity) and adhesion of Al electrodes must be carefully controlled. Nevertheless there are difficulties of processing Al electrodes, we developed and optimized photo-sensitive Al materials as address electrodes without any changes of existing patterning equipment and sintering conditions.

• Journal of Ceramic Processing Research
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• v.20 no.3
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• pp.222-230
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• 2019

Microwave hydrothermal-assisted sol-gel method was employed to synthesize the Fe doped TiO2 photocatalyst. The morphological analysis suggests anatase phase nanoparticles of ~20 nm with an SBET area of 283.99 ㎡/g. The doping of Fe ions in TiO2 created oxygen vacancies and Ti3+ species as revealed through the XPS analysis. The reduction of the band gap (3.1 to 2.8 eV) is occurred by doping effect. The as-prepared photocatalyst was applied for removal of NOx under solar light irradiation. The doping of Fe in TiO2 facilitates 75 % of NOx oxidation efficiency which is more than two-fold enhancement than the TiO2 photocatalyst. The possible reason of enhancement is associated with high surface area, oxygen vacancy, and reduction of the band gap. Also, the low production of toxic intermediates, NO2 gas, is further confirmed by Combustion Ion Chromatography. The mechanism related NOx oxidation by the doped photocatalyst is explained in this study.

• Applied Chemistry for Engineering
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• v.26 no.3
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• pp.270-274
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• 2015

We develop advanced oxidation processes for the treatment of spent electroless nickel plating solution. Apart form recovering nickel by leaching and enrichment, more emphasis is placed on rendering the waste water recyclable via oxidizing phosphite and hypophosphite into phosphate which can then be precipitated easily. $UV/H_2O_2$ process is employed and the conversion efficiency of COD and $PO_4-P$, and $H_2O_2$ consumption are analyzed. Furthermore, the $UV/H_2O_2/O_3$ process in conjunction with $O_3$ generator enables us to not only save the treatment time by 6 hours but also reduce $H_2O_2$ consumption by 30%.

• Proceedings of the Korean Institute of Building Construction Conference
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• 2022.04a
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• pp.103-104
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• 2022

Cracks may occur in reinforced concrete (RC) structures due to various physical and chemical factors, and the growth of cracks causes deterioration of the structure's performance. It is important to prevent the expansion of cracks through periodic diagnosis of cracks in structures. In order to enable free crack exploration even in a narrow space, a construction robot using a Mecanum wheel that can move up, down, left and right and rotate in place was designed. High-quality crack images were periodically collected through the camera, and the image fragments stored during the exploration were combined into a single photo after the exploration was completed. The robot detected cracks with a width of 0.2 mm or more on the concrete probe surface with an accuracy of about 90% or more.

• Korean Journal of Materials Research
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• v.23 no.1
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• pp.31-34
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• 2013

Trivalent cerium-ion-doped $Y_3(Al,\;Ga)_5O_{12}$ nanoparticle phosphor nanoparticles were synthesized using the reverse micelle process. The Ce doped $Y_3(Al,\;Ga)_5O_{12}$ particles were obtained from nitrate solutions dispersed in the nanosized aqueous domains of a micro emulsion consisting of cyclohexane as the oil phase and poly(oxyethylene) nonylphenyl ether (Igepal CO-520) as the non-ionic surfactant. The crystallinity, morphology, and thermal properties of the synthesized $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ powders were characterized by thermogravimetry-differential thermal analysis (TGA-DTA), X-ray diffraction analysis (XRD), scanning electron microscopy (SEM), and transmission electron microscopy. The crystallinity, morphology, and chemical states of the ions were characterized; the photo-physical properties were studied by taking absorption, excitation, and emission spectra for various concentrations of cerium. The photo physical properties of the synthesized $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ powders were studied by taking the excitation and emission spectra for various concentrations of cerium. The average particle size of the synthesized YAG powders was below $1{\mu}m$. Excitation spectra of the $Y_3Al_5O_{12}$ and $Y_3Al_{3.97}Ga_{1.03}O_{12}$ samples were 485 nm and 475 nm, respectively. The emission spectra of the $Y_3Al_5O_{12}$ and $Y_3Al_{3.97}Ga_{1.03}O_{12}$ were around 560 nm and 545 nm, respectively. $Y_3(Al,\;Ga)_5O_{12}:Ce^{3+}$ is a red-emitting phosphor; it has a high efficiency for operation under near UV excitation, and may be a promising candidate for photonic applications.

• Journal of the Korean Ceramic Society
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• v.56 no.1
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• pp.98-103
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• 2019

Optical filters to control light wavelength of displays or cameras are fabricated by multi-layer stacking process of low and high index thin films. The process of multi-layer stacking of thin films has received much attention as an optimal process for effective manufacturing in the optical filter industry. However, multi-layer processing has disadvantages of complicated thin film process, and difficulty of precise control of film morphology and material selection, all of which are critical for transmittance and coloring effect on filters. In this study, the composite $TiO_2$, which can be used to control of UV absorption, coated on nano hollow silica sol, was synthesized as a coating material for optical filters. Furthermore, systematic analysis of the process parameters during the chemical reaction, and of the structural properties of the coating solutions was performed using SEM, TEM, XRD and photo spectrometry. From the structural analysis, we found that the 85 nm nano hollow silica with 2.5 nm $TiO_2$ shell formation was successfully synthesized at proper pH control and titanium butoxide content. Photo luminescence characteristics, excited by UV irradiation, show that stable absorption of 350 nm-light, correlated with a 3.54 eV band gap, existed for the $TiO_2$ shell-nano hollow silica reacted with 8.8 mole titanium butoxide solution. Transmittance observed on substrate of the $TiO_2$ shell-nano hollow silica showed effective absorption of 200-300 nm UV light without deterioration of visible light transparency.