• 한국세라믹학회지
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• 제29권2호
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• pp.89-94
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• 1992

The kinetics of volatilization of phosphorous oxide from phosphosilicate glassceramic powders prepared by a sol-gel process were investigated at a given temperature. The rate of P2O5 vaporization increased with the P2O5 concentration in the phosphosilicate powder. Vaporization from the powder containing 46% P2O5 was analyzed using a kinetic model for diffusion limited evaporation. The diffusion through phosphosilicate glass in the surface of each particle in the temperature range 800~85$0^{\circ}C$ are presented.

• 한국세라믹학회지
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• 제42권2호
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• pp.77-80
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• 2005

A series of proton conductive composite membranes based on poly(vinyl alcohol) and phosphosilicate gels powders were successfully prepared. The proton conductivity of these composite was attributed to the phosphosilicate gel, which derived from tetraethoxysilane and phosphoric acid by sol-gel process at a molar ratio of P/Si = 1.5. The proton conductivity increased with increasing both the content of phosphosilicate gel and relative humidity. Temperature dependence of conductivity showed a Vogel-Tamman-Fulcher type behavior, indicating that proton was transferred through a liquidlike phase formed in micropores of phosphosilicate gel. The high conductivity of 0.065 S/cm with a membrane containing 60 wt$\%$ of the gel was obtained at $60^{\circ}C$ at $90\%$ relative humidity.

• Maxillofacial Plastic and Reconstructive Surgery
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• 제41권
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• pp.32.1-32.7
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• 2019

Background: Tooth extraction commonly leads to loss of residual alveolar ridge, thus compromising the room available for the implant placement. To combat the post-extraction alveolar loss, alveolar ridge preservation is practiced, with the advent of the biomaterial available. The purpose of this study was to assess the efficiency of calcium phosphosilicate biomaterial in alveolar ridge preservation. Twenty patients indicated for extraction were selected followed by socket grafting using calcium phosphosilicate. Implant placement was done 6 months postoperatively during which a core was harvested from the preserved sockets. Clinico-radiographic measurements of hard and soft tissues were taken at baseline and 6 months post-grafting. Results: There were no significant changes in the radiographic and soft tissue parameters while significant changes in hard tissue parameters with 1.9 mm (p = 0.013) gain in mid-buccal aspect and 1.1 mm (p = 0.019) loss in horizontal bone width were observed. The histomorphometric evaluation depicted the vital bone volume of 54.5 ± 16.76%, non-mineralized tissue 43.50 ± 15.80%, and residual material 2.00 ± 3.37%. Conclusion: The implants placed in these preserved ridges presented 100% success rate with acceptable stability after a 1-year follow-up, concluding calcium phosphosilicate is a predictable biomaterial in alveolar ridge preservation.

• Transactions on Electrical and Electronic Materials
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• 제2권2호
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• pp.32-36
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• 2001

A new solid source for low temperature diffusion into silicon was developed. The source wafer consists of an “active” compound, which is sol-gel prepared phosphosilicate glass-ceramics containing 56% P$_2$O$\sub$5/, embedded in a skeletal foam-like, inert substrate. Phosphorus diffusion from the new solid sources at low temperatures (800-875$^{\circ}C$) produced reprodecible sheet resistances and shallow junctions. From a series of one hour doping runs, the life time of the phosphosilicate source was determined to be over 40 hours. The effective diffusion coefficient of phosphorus into silicon and the corresponding activation energy at 850$^{\circ}C$ were determined to be 7.5${\times}$10$\^$-15/ $\textrm{cm}^2$/sec and ∼3.9 eV, respectively.

• Journal of the Optical Society of Korea
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• 제17권2호
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• pp.182-187
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• 2013

We present a comparative experimental analysis of the thermal spectroscopic characteristics of a phosphosilicate (P)-based ytterbium-doped fiber (YDF) against an aluminosilicate (Al)-based YDF in the temperature range of 25 to $150^{\circ}C$. We also characterize the fibers as gain media in a cladding-pumped amplifier configuration. While both fibers exhibit comparable trends in their thermal characteristics, there are noticeable distinctions in the fluorescence lifetime reduction rate and the spectral dependence of the transition cross-sections. The P- and Al-based YDFs present thermal lifetime reduction rates of $0.012%/^{\circ}C$ and $0.026%/^{\circ}C$, respectively. In particular, in the spectral region at ~940 nm, the absorption cross-section of the P-based YDF undergoes significantly less thermal change compared to that of the Al-YDF. In the cladding-pumped amplifier configuration operating at a total gain of 10 dB, the Al-based YDF generally performs betters than the P-based YDF in the temperature range of 25 to $75^{\circ}C$. However, it is highlighted that in the high temperature range of over $75^{\circ}C$, the latter shows a less gain reduction rate than the former, thereby yielding higher relative output power by 3.3% for a 1060-nm signal, for example.

• 한국입자에어로졸학회지
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• 제6권3호
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• pp.139-145
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• 2010

In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM) and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.

• Bulletin of the Korean Chemical Society
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• 제26권2호
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• pp.241-247
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• 2005

A series of proton conductive inorganic-organic hybrid membranes doped with phosphoric acid ($H_3PO_4$) and/or triethylphosphate (PO(OEt)$_3$) have been prepared by sol-gel process with 3-glycidoxypropyltrimethoxysilane (GPTMS), 3-aminopropyltriethoxysilane (APTES) and tetraethoxysilane (TEOS) as precursors. High proton conductivity of 3.0 ${\times}$ $10^{-3}$ S/cm with composition of 50TEOS-30GPTMS-20APTES-50$H_3PO_4$ was obtained at 120 ${^{\circ}C}$ under 50% relative humidity. Thermal stability of membrane was significantly enhanced by the presence of SiO$_2$ framework up to 250 ${^{\circ}C}$. XRD revealed that the gels are amorphous. IR spectra showed a good complexation of $H_3PO_4$ in the matrix. The conductivity under 75% relative humidity was significantly improved by addition of APTES due to the increase in concentration of defected site in hybrid matrix. The effect of PO(OEt)$_3$, humidifying time, and heat-treatment were also investigated. PO(OEt)$_3$ had no improvement on conductivity and conductivity increased with humidifying time, however, decreased with heating temperature.

• 대한전자공학회논문지TE
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• 제39권1호
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• pp.31-36
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• 2002

낮은 에너지의 보론 이온을 선비정질화된 실리콘 기판과 단결정 기판에 이온 주입하여 0.2μm 정도의 접합 깊이를 갖는 박막의 P/sup +/-n 접합을 형성하였다 이온주입에 의한 결정결함의 제거 및 주입된 보론 이온의 활성화를 위해 급속 열처리기를 이용하였으며, BPSC(bore-phosphosilicate glass)를 흐르도록 하기 위해 노 열처리를 도입하였다. 선비정질화 이온주입은 45keV, 3×10/sup 14/cm/sup -2/ Ge 이온을 사용하였으며, p형 불순물로는 BF2 이온을 20keV, 2×10/sup 15/cm /sup -2/로 이온주입 하였다. 급속 열처리와 노 열처리 조건은 각각 1000。C/ 10초와 850。C/4O분이었다. 형성된 접합의 접합깊이는 SIMS와 ASR로 측정하였으며, 4-point probe로 면 저항을 측정하였다. 또한 전기적인 특성은 다이오드에 역방향 전압을 인가하여 측정된 누설전류로 분석하였다. 측정 결과를 살펴보면, 급속 열처리만을 수행하여도 양호한 접합 특성을 나타내나, 급속 열처리와 노 열처리를 함께 고려해야 할 경우에는 노 열처리 후에 급속 열처리를 수행하는 공정이 급속 열처리 후에 노 열처리를 수행하는 경우보다 더 우수한 박막 접합 특성을 나타내었다.

• 대한전자공학회논문지
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• 제26권11호
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• pp.1637-1643
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• 1989

In this study, phosphosilicate glass(PSG) film was deposited by the oxidation of phosphine (PH3) and silane(SiH4) in nitrogen ambient with a conventional conveyerized Atmospheric Pressure Chemical Vapor Deposition(APCVD)system and phosphorus concentration is measured by using FT-IR technique. The flow characteirstics and etch rate variations ofthe films, depending on phosphorus concentrations, are investigated. Special emphasis is focused on the yield variations of NMOS-based 256K DRAM with 1.2\ulcorner metallization spacing with increasing phosphorus concentrations. As a result, the data indicates that the fairly good yield can be obtained within the range of between 8 and 10wt% phosphorus concentration, which result in a slope of flow within 45\ulcorner10\ulcorner The analysi of failure mechanism is also accompanied.

• The Korean Journal of Ceramics
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• 제1권3호
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• pp.131-136
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• 1995

It has been reported that the biocement obtained by mixing $CaO-SiO_2-P_2O_5$ glass powders with ammonium phosphate solution has biocompatibility as will as high strength. The hardening mechanism and hydroxyapatite forming mechanism were discussed when $53.6%CaO_1,\; 38.1%SiO_2,\; 7.7P_2O_6,\; 0.6%CaF_2$(mole %) glass powder was reacted with ammonium phosphate solution and reacted in tris-buffer solution, respectively. High strength hardened biocement was obtained for the specimen with $CaNH_4PO_4\;H_2O$ crystal when the glass powder was mixed with ammonium phosphate solution, and hydroxyapatite crystal was rapidly formed only in the sample with $CaNH_4PO_4\;H_2O$ crystal when it was reacted in tris-buffer solution.