• Title/Summary/Keyword: Phase Shifting

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Recent Trends of Lithographic Technology (반도체 공정용 리소그래피 기술의 최근 동향)

  • Chung, T.J.;You, J.J.
    • Electronics and Telecommunications Trends
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    • v.13 no.5 s.53
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    • pp.38-52
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    • 1998
  • Phase-shifting masks (PSM), optical proximity correction (OPC), off-axis illumination (OAI), annular illumination (AI)의 리소그래피 분해능 향상 기법과 deep ultraviolet photoresist의 개발 및 리소그래피의 최근 기술 동향을 요약 소개한다. DUV 리소그래피의 대안으로 관심을 끌고 있는 scattering with angular limitation projection electron-beam lithography (SCALPEL), extreme ultraviolet lithography (EUVL), X-ray lithography (XRL), ion projection lithography (IPL) 등의 새로운 리소그래피 기술들의 기본 원리와 최근 기술 동향도 소개하였다. 리소그래피는 반도체 공정에 있어서 가장 중요한 부분을 차지하기 때문에 리소그래피의 최근 기술 동향을 검토해 봄으로써 국내 리소그래피 장비 산업의 기술 개발을 위한 방향 설정에 도움이 될 것으로 생각한다.

A Multiband Shunt Hybrid Active Filter with Sensorless Control

  • Kumar S, Surendra;Sensarma, Partha Sarathi
    • Journal of Power Electronics
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    • v.8 no.4
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    • pp.317-324
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    • 2008
  • This paper proposes a Multiband Shunt Hybrid Active Filter (SHAF) with sensorless control. A plant is modeled in the discrete- time domain and a controller is designed using the Pole shifting law in the polynomial domain. This control approach is very useful for filtering the load harmonics with reduced sensor counts where a low cost solution like SHAF is required. Multiple Synchronous Reference Frames (MSRF) and low pass filters are used to measure the $5^{th}$ and $7^{th}$ harmonic components separately from the load and filter currents. Individual current controllers are designed for the $5^{th}$ and $7^{th}$ harmonic currents. Control is realized in the stationary, three-phase (abc) reference frame. Performance of the controller is validated through simulation, using realistic plant and controller models, as well as experimentally on a full-scale distribution system.

The Development of AC Motor Control System Using DIP-IPM (DIP-IPM을 이용한 전동기 제어시스템 개발)

  • Kim, Nam-Hun;Baik, Won-Sik;Kim, Min-Huei;Kim, Dong-Hee;Choi, Ho-Kyeong
    • Proceedings of the KIEE Conference
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    • 2002.11d
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    • pp.232-234
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    • 2002
  • Due to development of power electronics technology, power conversion system are tend to small size, easy to use and light weight. Especially motor control system have increased concerns and interests about IPM(Intelligent Power Module) inverter, which contains protection circuit, drive circuit and power devices. So, we manufactured 3-phase inverter using DIP-IPM(Dual in-line package IPM) PS21245- E(1.5 Kw) made by MITSUBISHI Electric. Some of these features include -HVIC to Provide level shifting and gate drive for high-side IGBTs. The interface circuit between pwm controller and DIP-IPM can made by direct connection. In order to validate dynamic performance of the proposed system, the actual experiment worked out at wide speed range. The developed system is shown as a good dynamic characteristics.

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Fabrication of Conducting Polymer Thin Films Using Molecular Layer Deposition

  • Han, Gyu-Seok;Seong, Myeong-Mo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.289-289
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    • 2011
  • The conducting polymer thin films were deposited using the gas phase method which known as molecular layer deposition (MLD). Terephthalaldehyde (TPA) and p-phenylenediamine (PD) were used as monomers to deposit conducting polymer. Self-terminating nature of TPA and PD reaction were demonstrated by growth rate saturation versus precursors dosing time. Infrared spectroscopic and X-ray photoelectron spectroscopy were employed to determine the chemical composition and state of conducting polymer thin films. Layer by layer growth and polymerization of thin films can be showed by shifting of absorption edge using UV-VIS spectroscopy. This conducting polymer fabricated by using MLD method gives the opportunity to develop new hybrid materials by combining inorganic materials in nanoscale.

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Advanced PWM Method for Reducing Common-Mode Noise in Converter/Inverter System (컨버터/인버터 시스템의 커먼 모드 노이즈 억제를 고려한 PWM 기법)

  • Lee, Young-Min;Lee, Hyeoun-Dong;Sul, Seung-Ki
    • Proceedings of the KIEE Conference
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    • 1998.07f
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    • pp.1882-1885
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    • 1998
  • This paper proposes the advanced PWM method which can reduce common-mode voltage in 3 phase PWM converter/inverter system. By shifting the zero voltage vector of inverter in a sampling period, it is possible to cancel out a common-mode voltage pulse defined by switching functions of converter and inverter. Without any loss of control performance of converter/inverter system, overall common-mode voltage can be reduced by one-third compared with that of conventional PWM scheme.

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Parenting Stress of Adolescent Children (청소년기 자녀의 발달기적 갈등과 부모의 스트레스)

  • Yoo, Il-Young
    • Korean Parent-Child Health Journal
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    • v.8 no.1
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    • pp.17-22
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    • 2005
  • Adolescence can be a time of turmoil and of stress. Rebellion against authority and against convention is to be tolerated for the sake of growth. The adolescence of children is a difficult time for parents. It is difficult to tolerate his/her manners, language, shifting moods, and constant confrontations of an adolescent child. Because of his/her egocentric thought process, he/she will be truly surprised if parents feel hurt by his/her behaviors. The parents need to learn that all these irrational behaviors fit his/her developmental phase. Adolescents have to free themselves from childhood ties with parents, establish new identification with peers, and find their own identity. The parents can be role models, maintain communication channels, and show their love while adolescents go through temporary disorganization and madness necessary for reorganization which will lead to mature human beings.

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Soft-switching Bridgeless Boost PFC Converter with Phase-shifting Control (위상 천이 기법을 적용한 소프트 스위칭 토템폴 브리지리스 부스트 PFC 컨버터)

  • Park, Moo-Hyun;Baek, Jae-Il;Moon, Gun-Woo
    • Proceedings of the KIPE Conference
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    • 2018.07a
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    • pp.204-206
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    • 2018
  • 본 논문에서는 대용량 전력 어플리케이션에 적합한 인터리브드 토템폴 브리지리스 부스트 PFC 컨버터의 전입력전압 범위, 전부하에서 소프트 스위칭을 달성하여 높은 효율을 얻는 새로운 PFC 컨버터를 제안한다. 기존의 회로는 하드 스위칭에 의해 큰 스위칭 손실을 가져 효율이 낮을 뿐만 아니라 소자에 부담을 주어 높은 성능의 방열 시스템을 필요로 한다. 제안하는 컨버터는 하나의 인덕터가 추가되었으며, 위상 천이 기법을 통해 적절한 크기의 전류를 생성하여 소프트 스위칭을 달성하면서도 추가적인 손실을 최소화 한다. 따라서 전 부하에 걸쳐 높은 효율을 얻을 수 있다.

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Roughness Measurement Performance Obtained with Optical Interferometry and Stylus Method

  • Rhee Hyug-Gyo;Lee Yun-Woo;Lee In-Won;Vorburger Theodore V.
    • Journal of the Optical Society of Korea
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    • v.10 no.1
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    • pp.48-54
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    • 2006
  • White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

Effect of Slot Opening on the Cogging Torque of Fractional-Slot Concentrated Winding Permanent Magnet Brushless DC Motor

  • Yan, Jianhu;Zhang, Qiongfang;Feng, Yi
    • Journal of Magnetics
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    • v.21 no.1
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    • pp.78-82
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    • 2016
  • Cogging torque will affect the performance of a permanent magnet Brushless DC Motor (BLDCM), thus the reduction of cogging torque is key for BLDCM optimization. In this paper, the phase shifting of cogging torque for a fractional-slot concentrated winding BLDCM is analyzed using the Maxwell tensor method. Moreover, a 9-slot 10-pole concentrated winding BLDCM driven by ideal square waveform is studied with the finite element method (FEM). An effective method to reduce the cogging torque is obtained by adjusting the slot opening. In addition, the influences of different slot openings on back electromotive force (back-EMF), air gap flux density and flux linkage are investigated and experimentally validated using the prototype BLDCM.

Characteristics of Surface Roughness in Micro fuming using PCD Tools (PCD공구를 이용 미소가공시 표면거칠기 특성)

  • 한복수;이소영
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.10 no.5
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    • pp.31-38
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    • 2001
  • This paper deals with the micro turning property of setting angle using diamond tool. The bed of the system has used the granite which has the thermal and vibrational characteristics superior to the cast iron bed for the common machine tool. To minimize the inner and outer vibration of the fuming system, an air pad system was manufactured and tested. The aero-static spindle system which has the excellent rotation accuracy was designed and manufactured. As a result of the micro-cutting test on aluminum alloy, tool setting angel have effected on surface roughness. From the results, the micro-cutting conditions hope to provide the useful actual data using in industrial fields.

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