• 멤브레인
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• 제34권2호
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• pp.140-145
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• 2024

에너지 패러다임의 변화가 요구되는 현대에 수소는 매력적인 에너지원이다. 이러한 수소를 정제하는 기술 중에서 분리막을 이용한 기술은 저비용으로 고순도의 수소를 정제할 수 있는 기술로 주목받고 있다. 그러나 수소 분리 성능이 뛰어난 팔라듐(Pd)은 가격이 매우 비싸 이를 대체한 소재가 필요하다. 본 연구에서는 수소 투과 성능은 좋으나 수소 취성에 약한 니오븀(Nb)과 수소 투과 성능은 떨어지나 내구성이 뛰어난 니켈(Ni)과 지르코늄(Zr)을 혼합한 합금으로 분리막을 제조하여 1~4 bar, 350~450 ℃ 조건에서 수소 투과 특성을 확인하였다. Pd를 코팅하지 않은 Ni₄₈Nb₃₂Zr₂₀ 분리막의 경우 최대 0.69 ml/cm²/min의 투과량을 보였으며, Pd가 코팅된 경우에는 최대 13.05 ml/cm²/min의 투과량을 보였다.

• 한국세라믹학회지
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• 제35권8호
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• pp.795-800
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• 1998

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 D
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• pp.1968-1970
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• 1999

본 연구에서는 RF 마그네트론 스퍼터링법으로 CoNbZrPd 비정질 연자성 박막을 제조하여 Pd의 첨가 효과와 자장중 열처리에 의한 특성 변화에 대해 연구하였다. Pd가 4.34 at% 첨가된 $Co_{87.56}Nb_{6.45}Zr_{1.65}Pd_{4.34}$ 박막은 비정질 구조이며 Pd 첨가에 의해 보자력은 0.54 Oe으로 감소하였으며, 이방성 자계는 10.45 Oe로 Pd를 첨가하지 않은 CoNbZr 비정질 박막 보다 특성이 향상되었다. $Co_{87.56}Nb_{6.45}Zr_{1.65}Pd_{4.34}$ 비정질 박막은 $400^{\circ}C$까지 비정질 상을 유지하고 있지만, 연자기 특성이 열화되어 보자력이 증가하고 이방성자계가 급격히 감소하였지만, 포화 자화는 크게 변화지 않았다.

• 한국전기전자재료학회논문지
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• 제15권9호
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• pp.818-821
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• 2002

We investigated the evolution of magnetic property with varying palladium (Pd) contents and elevating substrate temperatures up to 200 $^{\circ}C$ during dc-sputtering. We observed that saturation magnetization (Ms), remanence and anisotropic magnetoresistance (AMR) ratio decrease with Pd contents in the case of keeping the substrate temperature at 3$0^{\circ}C$. However they increase by adding 2 %Pd, then decrease above 3 %Pd when we keep the substrate temperature at 20$0^{\circ}C$. Coercivity does not change with Pd contents. Our results imply that we may tune the Ms and AMR with Pd contents and substrate temperature in permalloy films.

• 한국전기전자재료학회논문지
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• 제16권8호
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• pp.744-751
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• 2003

Co-Pd alloy thin films prepared by a DC-sputter that have self-organized nano structure(SONS), are promising for high-density information storage media in information era. We prepared the samples by varying Pd contents of 0~8.1 wt% at the substrate temperatures of room temperature (RT) and 200 $^{\circ}C$, respectively Microstructure and Pd contents of the Co$_{1-x}$ Pd$_{x}$ films are probed by a scanning electron microscope (SEM), a transmission electron microscope (TEM) and an energy dispersive spectrometer (EDS). We also investigated the saturation magnetization (Ms), remanence and coercivity of the Co$_{1-x}$ Pd$_{x}$ films. Surface roughness are measured by an atomic force microscope (AFM). We revealed that self-organized nano size Co-enriched phase and Pd-enriched phase existed with Pd contents at the substrate temperatures of RT and 20$0^{\circ}C$ through microstructure characterization. SONS helped to keep the saturation magnetization and enhance the perpendicular anisotropy with Pd contents. Out result implies that we may tune the perpendicular magnetic properties with keeping the saturation magnetization by varying substrate temperatures and Pd contents for high density magnetic recording.rding.

• 한국자기학회지
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• 제11권3호
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• pp.109-113
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• 2001

Presently, an inductor adapted at MMIC (Monolithic Microwave Integrated Circuit) which is used for cellular phone or PHS operates at quasi-microwave range over 800 MHz. However, a W-CDMA (Wideband Code Division Multiple Access) will use about 2 GHz range. Therefore magnetic film device should be compatible up to 2 GHz. We have deposited Co-Pd-Al-O system film using rf sputtering method which is expected up to 2 GHz, and investigated the effect of Pd content and magnetic field annealing. When Pd composition is 19%, Hk was 118 Oe, and ${\mu}$′showed flat frequency characteristics up to 1.5 GHz. The Q factor (=${\mu}$′/${\mu}$") was 23.3 at 1 GHz, 6.7 at 1.5 GHz and 1.5 at 2 GHz, respectively. Resonance frequency was 2 GHz. Therefore Co-Pd-Al-O thin film could be used at over 1 GHz, and also expected as an inductor material for wide band CDMA type cellular phone.

• 한국진공학회지
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• 제17권2호
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• pp.81-89
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• 2008

분자동역학을 이용하여 이온빔 스퍼터링 과정에서 원자의 거동을 연구하였다. Ar이온이 Au와 Pd(001) 표면에 다양한 에너지와 입사각도로 충돌할 때, 표면원자들 중 일부는 공간으로 떨어져 나갔으며, 반응 후 일부 원자들은 초기 표면보다 위쪽에 재증착 되는 현상이 관찰되었다. 재증착 원자의 수율은 스퍼터된 원자보다 Au의 경우 약 5배, Pd의 경우 약 3배 많이 입사 에너지와 입사 각도에 상관없이 발생됨을 확인하였다. 연속된 입사계산을 통해, 스퍼터링 과정에 발생되는 다양한 표면 패턴 형성 메커니즘을 식각만으로 설명하고 있는 종래의 개념과는 달리, 이온빔으로 인해 끊임없이 발생되는 재증착 원자들이 표면의 구조를 형성하는데 중요한 역할을 하는 것으로 확인되었다.

• 한국표면공학회지
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• 제45권6호
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• pp.248-256
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• 2012

A Pd-based hydrogen membranes for hydrogen purification and separation need high hydrogen perm-selectivity. The surface roughness of the support is important to coat the pinholes free and thin-film membrane over it. Also, The pinholes drastically decreased the hydrogen perm-selectivity of the Pd-based composite membrane. In order to remove the pinholes, we introduced various surface pre-treatment such as alumina powder packing, nickel electro-plating and micro-polishing pre-treatment. Especially, the micro-polishing pretreatment was very effective in roughness leveling off the surface of the porous nickel support, and it almost completely plugged the pores. Fine Ni particles filled surface pinholes with could form open structure at the interface of Pd alloy coating and Ni support by their diffusion to the membrane and resintering. In this study, a $4{\mu}m$ surface pore-free Pd-Cu-Ni ternary alloy membrane on a porous nickel substrate was successfully prepared by micro-polishing, high temperature sputtering and Cu-reflow process. And $H_2$ permeation and $N_2$ leak tests showed that the Pd-Cu-Ni ternary alloy hydrogen membrane achieved both high permeability of $13.2ml{\cdot}cm^{-2}{\cdot}min^{-1}{\cdot}atm^{-1}$ permation flux and infinite selectivity.

• Journal of Magnetics
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• 제2권4호
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• pp.147-156
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• 1997

An artificially modulated magnetic Co/Pd multilayer is one of the promising candidates for high density magneto-optic (MO) recording media, due to a large Kerr rotation angle in the wavelength of a blue laser beam. However, since multilayer structure, as well as amorphous structure, is a non-equilibrium state in terms of free energy and a MO recording technology is a kind of thermal recording which is conducted around Curie temperature (Tc) of the recording media, when the Co/Pd mulilayer is used for the MO recording media, changes in the magnetic properties are occurred as the amorphous structure do. Therefore, the assessment of the magnetic properties in the Co/Pd multilayer during interdiffusion is crucially important both for basic research and applications. As the parameter of the magnetic properties in this research, saturation magnetization and perpendicular magnetic anisotropy energy of the Co/Pd multilayer are measured in terms of Ar sputtering pressure and heat treatment temperature. Form the results of the research, we find out that the magnetic exchange energy between Co and Pd sublayers strongly affects the changes in the magnetic properties of the Co/Pd multilayers during the interdiffusion in ferromagnetic state. This discovery will provide the understanding of the magnetic exchange energy in the Co/Pd multilayer structure and suggest the operating temperature range for MO recording in the Co/Pd multilayer for the basic research and applications, respectively.

• Journal of Magnetics
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• 제3권1호
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• pp.21-30
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• 1998

An artificially modulated magnetic Co/Pd multilayer is one of the promising candidates for high density magneto-optic (MO) recording media, due to large Kerr rotation angle in the wavelength of a blue laser beam. however, since multilayer structure, as well as amorphous structure, is a non-equilibrium state in terms of free energy and MO recording is a kind of thermal recording which is conducted aound Curie temperature (Tc) of the recording media, when the multilayer is used for the MO recording media, changes in the multilayer structure are occurred as the amorphous structure do. Therefore, the assessment of the structural stability in the Co/Pd multilayer is crucially important both for basic research and applications. As the parameter of the structural stability in this research, modulation amplitude and particle size of the Co/Pd multilayer are measured in terms of Ar sputtering pressure and heat treatment temperature. From the results of the research, we find out that the magnetic exchange energy in the structural changes of a magnetic multilayer structure and suggest the operating temperature range for MO recording in the Co/Pd multilayer for the basic research and applications, respectively.