• 한국표면공학회지
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• 제39권6호
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• pp.255-262
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• 2006

Pd-Cu alloy membrane for hydrogen separation was fabricated by sputtering and Cu reflow process. At first, the Pd and Cu was continuously deposited by sputtering method on oxidized Si support, the Cu reflow process was followed. Microstructure of the surface and permeability of the membrane was investigated depending on various reflow temperature, time, Pd/cu composition and supports. With respect to our result, Pd-Cu thin film (90 wt.% Pd/10 wt.% Cu) deposited by sputtering process with thickness of $2{\mu}m$ was heat-treated for Cu reflow The voids of the membrane surface were completely filled and the dense crystal surface was formed by Cu reflow behavior at $700^{\circ}C$ for 1 hour. Cu reflow process, which is adopted for our work, could be applied to fabrication of dense Pd-alloy membrane for hydrogen separation regardless of supports. Ceramic or metal support could be easily used for the membrane fabricated by reflow process. The Cu reflow process must result in void-free surface and dense crystalline of Pd-alloy membrane, which is responsible for improved selectivity oi the membrane.

• 멤브레인
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• 제34권2호
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• pp.140-145
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• 2024

에너지 패러다임의 변화가 요구되는 현대에 수소는 매력적인 에너지원이다. 이러한 수소를 정제하는 기술 중에서 분리막을 이용한 기술은 저비용으로 고순도의 수소를 정제할 수 있는 기술로 주목받고 있다. 그러나 수소 분리 성능이 뛰어난 팔라듐(Pd)은 가격이 매우 비싸 이를 대체한 소재가 필요하다. 본 연구에서는 수소 투과 성능은 좋으나 수소 취성에 약한 니오븀(Nb)과 수소 투과 성능은 떨어지나 내구성이 뛰어난 니켈(Ni)과 지르코늄(Zr)을 혼합한 합금으로 분리막을 제조하여 1~4 bar, 350~450 ℃ 조건에서 수소 투과 특성을 확인하였다. Pd를 코팅하지 않은 Ni₄₈Nb₃₂Zr₂₀ 분리막의 경우 최대 0.69 ml/cm²/min의 투과량을 보였으며, Pd가 코팅된 경우에는 최대 13.05 ml/cm²/min의 투과량을 보였다.

• 한국표면공학회지
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• 제37권5호
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• pp.289-295
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• 2004

A dense palladium-nikel (Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support mixed with submicron/micron nickel powder instead of mesoporous stainless steel support. Plasma treatment process is introduced as pre-treatment process instead of HCI activation. Pd-Ni alloy composite membrane prepared by electro plating was fairly a uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature 773 K and pressure 2.2 psi. The results showed that hydrogen ($H_2$) permeance was 27 ml/$\textrm{cm}^2$ㆍatmㆍmin and hydrogen/ nitrogen ($_H2$$N_2$) selectivity was 8 at 773 K.

• 한국표면공학회지
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• 제37권5호
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• pp.243-248
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• 2004

A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$\textrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

• 한국표면공학회지
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• 제42권5호
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• pp.232-239
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• 2009

This study presented the effect of membrane thickness on hydrogen permeability. Microvoids on the surface of the membrane should not exist for the exact values of hydrogen permeability. Pd-Cu-Ni hydrogen alloy membranes were fabricated by Ni powder sintering, substrate plasma pretreatment, sputtering and Cu reflow process. And this leaded to void-free surface and dense film of Pd-Cu-Ni hydrogen alloy membrane. Hydrogen permeation test showed that hydrogen permeability increased from 2.7 to $15.2ml/cm^2{\cdot}min{\cdot}atm^{0.5}$ as membrane thickness decreased from 12 to $4{\mu}m$. This represented the similar trend as a hydrogen permeability of pure palladium membrane based on solution-diffusion mechanism.

• 한국표면공학회지
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• 제51권5호
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• pp.277-290
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• 2018

In this study, Pd-Ni-Ag alloy hydrogen separation membranes were fabricated by Pd/Ag/Pd/Ni/Pd multi-layer sputter deposition on the modified MIM(Metal Injection Molding)-PSS(Porous Stainless Steel) support and followed heat treatment. Nickel, used as an alloying element in Pd alloy membranes, is inexpensive and stable material in a hydrogen isotope environment at high temperature up to 1123 K. Hydrogen perm-selectivity of Pd-Ni-Ag alloy membranes is affected not only by composition of membrane films but also by other factors such as surface properties of PSS support, microstructure of membrane films and inter-diffused impurities from PSS support. In order to clarify the effect of surface Ni composition on hydrogen perm-selectivity of Pd-Ni-Ag alloy membranes, the other effects were significantly minimized by the formation of dense and homogeneous Pd-Ni-Ag alloy membranes. Hydrogen permeation test showed that hydrogen permeability decreased from $7.6{\times}10^{-09}$ to $1.02{\times}10^{-09}mol/m{\cdot}s{\cdot}Pa^{0.5}$ as Ni composition increased from 0 to 16 wt% and the selectivity for $H_2/N_2$ was infinite.

• 한국표면공학회지
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• 제45권6호
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• pp.248-256
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• 2012

A Pd-based hydrogen membranes for hydrogen purification and separation need high hydrogen perm-selectivity. The surface roughness of the support is important to coat the pinholes free and thin-film membrane over it. Also, The pinholes drastically decreased the hydrogen perm-selectivity of the Pd-based composite membrane. In order to remove the pinholes, we introduced various surface pre-treatment such as alumina powder packing, nickel electro-plating and micro-polishing pre-treatment. Especially, the micro-polishing pretreatment was very effective in roughness leveling off the surface of the porous nickel support, and it almost completely plugged the pores. Fine Ni particles filled surface pinholes with could form open structure at the interface of Pd alloy coating and Ni support by their diffusion to the membrane and resintering. In this study, a $4{\mu}m$ surface pore-free Pd-Cu-Ni ternary alloy membrane on a porous nickel substrate was successfully prepared by micro-polishing, high temperature sputtering and Cu-reflow process. And $H_2$ permeation and $N_2$ leak tests showed that the Pd-Cu-Ni ternary alloy hydrogen membrane achieved both high permeability of $13.2ml{\cdot}cm^{-2}{\cdot}min^{-1}{\cdot}atm^{-1}$ permation flux and infinite selectivity.

• 멤브레인
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• 제21권3호
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• pp.290-298
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• 2011

팔라듐이 코팅된 $V_{53}Ti_{26}Ni_{21}$ 합금 분리막을 통해 수소 투과시 혼합가스의 영향에 대해 알아보았다. 순수 수소, 수소, 이산화탄소 및 일산화탄소의 혼합가스를 공급가스로 주입할 때, $450^{\circ}C$, 1-3 bar의 압력에서 팔라듐이 코팅된 $V_{53}Ti_{26}Ni_{21}$ 합금 분리막의 수소 투과 실험을 수행하였다. 수소만을 공급한 투과 실험에서 팔라듐 코팅된 $V_{53}Ti_{26}Ni_{21}$ 합금 분리막(두께: 0.5 mm)의 수소 투과량은 3 bar, $450^{\circ}C$ 조건에서 $5.36mL/min/cm^2$였다. 또한 수소/이산화탄소, 수소/일산화탄소 및 수소/이산화탄소/일산화탄소를 공급한 투과실험에서 $V_{53}Ti_{26}Ni_{21}$ 합금 분리막의 수소 투과량은 각각 4.46, 5.20, $3.91mL/min/cm^2$였다. 따라서, 수소/이산화탄소, 수소/일산화탄소 및 수소/이산화탄소/일산화탄소 혼합가스를 각각 공급할 때 투과량은 온도와 압력에 상관없이 수소 분압 감소만큼 감소하였고 모든 경우 Sievert 법칙을 잘 만족시켰다. 투과 후 분리막의 XRD 결과로부터 $V_{53}Ti_{26}Ni_{21}$ 합금 분리막은 여러 혼합가스에 대해 안정성과 내구성이 우수하다는 것을 알 수 있었다.

• 한국수소및신에너지학회논문집
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• 제19권4호
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• pp.359-366
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• 2008

Hydrogen as a high-quality and clean energy carrier has attracted renewed and ever-increasing attention around the world in recent years, mainly due to developments in fuel cells and environmental pressures including climate change issues. In this processes for hydrogen production from fossil fuels, separation and purification is a critical technology. $(Ni_{60}-Nb_{40})_{95}-Pd_5$ alloy ingots were prepared by arc-melting the mixture of pure metals in an Ar atmosphere. Melt-spun ribbons were produced by the single-roller melt-spinning technique in an Ar atmosphere. Amorphous structure and thermal behavior were characterized by XRD and DSC. The permeability of the $(Ni_{60}-Nb_{40})_{95}-Pd_5$ amorphous alloy membrane was characterized by hydrogen permeation experiments in the temperature range 623 to 773 K and pressure of 2 bars. The maximum hydrogen permeability was $3.54{\times}10^{-9}[mol{\cdot}m^{-1}s^{-1}{\cdot}pa^{-1/2}]$ at 773 K for the $(Ni_{60}-Nb_{40})_{95}-Pd_5$ amorphous alloy.

• 멤브레인
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• 제32권6호
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• pp.456-464
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• 2022

본 실험에서는 무전해 도금을 통하여 Pd 및 Pd-Cu 분리막을 제조하여 수소 투과 성능을 분석하였다. 분리막의 지지체는 α-Al₂O₃ 세라믹 중공사를 사용하였다. Pd-Cu 분리막은 무전해 도금을 실시하였고 Pd-Cu 합금을 만들기 위하여 수소 분위기에서 500°C, 18 h 동안의 열처리 과정을 거쳤다. 그 후, Pd-Cu 분리막은 EDS (Energy Dispersive X-ray Spectroscopy), XRD (X-ray Diffraction) 분석을 통해 합금이 형성된 것을 확인하였다. Pd 및 Pd-Cu 도금층의 두께는 SEM (Scanning Electron Microscope) 분석을 통해 각각 약 3.21, 3.72 µm으로 측정되었다. 수소 투과 성능은 수소 단일 가스, 혼합가스(H₂, N₂)에서 350~450°C, 1~4 bar의 범위에서 수소 투과 실험을 진행하였다. 수소 단일 가스에서 Pd 및 Pd-Cu 분리막은 450°C, 4 bar에서 최대 54.42, 67.17 ml/cm²⋅min의 flux를 가지며, 혼합가스에서는 450°C, 4 bar의 조건일 때, 각각 1308, 453의 separation factor가 나오는 것을 확인하였다.