Electrical Properties of Fabrication PZT Capacitors by Chemical Mechanical Polishing Process (화학적 기계적 연마 공정으로 제조한 PZT 캐패시터의 전기적 특성)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2006.11a
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- pp.370-371
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- 2006