The Electrical properties of piezoelectric device for Multilayer Piezoelectric Ultrasonic Motor

적층 압전초음파모터용 소자의 전기적 특성

  • Published : 2006.06.22

Abstract

In this study, in order to develop piezoelectric device for multilayer piezoelectric ultrasonic motor, low temperature sintering $Pb(Mn_{1/3}Nb_{2/3})_{0.02}(Ni_{1/3}Nb_{2/3})_{0.12}(Zr_{0.48}Ti_{0.52})_{0.86}O_3$ system ceramics were fabricated according to the variations of forming pressure of casting sheet. At the 300[$kgf/cm^2$] forming pressure, the maximum density of 7.8[$g/cm^3$] was obtained. At the 350[$kgf/cm^2$] forming pressure, the maximum values of effective electromechanical coupling factor $k_{cff}\;=\;0.24$ and mechanical quality factor Qm=628 were obtained.

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