• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.321-326
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• 2005

Chemical mechanical polishing(CMP) process is essential technology to be applied to manufacturing the dielectric layer and metal line in semiconductor devices. It has been known that overpolishing in CMP depends on pattern selectivity as a function of density and pitch, and use of fixed abrasive pad(FAP) is one method which can improve the pattern selectivity. Thus, dishing & erosion defects can be reduced. This paper introduces the manufacturing technique of FAP using hydrophilic polymers with swelling characteristic in water and explains the self-conditioning phenomenon. When applied to tungsten blanket wafers, the FAP resulted in appropriate performance in point of uniformity, material selectivity and roughness. Especially, reduced dishing and erosion was observed in CMP of tungsten pattern wafer with the proposed FAP.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.715-718
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• 2004

In this paper, we studied the characteristics of new polishing pad, which can apply W-CMP process for global planarization of multi-level interconnection structure. The hardness and density were measured as a function of groove pattern. Also, we compared the pore size through the SEM photograph. Finally, we investigated the CMP characteristics with five different kind of groove pattern sample. Through the above results, we can select optimum groove pattern, so we can expect to begin home product of polishing pad.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.53 no.1
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• pp.22-27
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• 2004

BiCMOS circuit consist of CMOS part which constructs logic function, and bipolar part which drives output load. In BiCMOS circuits, transistor stuck-open faults exhibit delay faults in addition to sequential behavior. In this paper, proposes a method for efficiently generating test pattern which detect stuck-open in BiCMOS circuits. In proposed method, BiCMOS circuit is divided into pull-up part and pull-down part, using structural property of BiCMOS circuit, and we generate test pattern using set theory for efficiently detecting faults which occured each divided blocks.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.304-309
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• 2003

In this study, natural flaws in welding parts are classified using the signal pattern classification method. The storage digital oscilloscope including FFT function and enveloped waveform generator is used and the signal pattern recognition procedure is made up the digital signal processing, feature extraction, feature selection and classifier design. It is composed with and discussed using the distance classifier that is based on euclidean distance the empirical Bayesian classifier. Feature extraction is performed using the class-mean scatter criteria. The signal pattern classification method is applied to the signal pattern recognition of natural flaws.

• Proceedings of the KOSOMBE Conference
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• v.1992 no.11
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• pp.47-50
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• 1992

This paper describes pattern classification algorithm of ECG using back-propagation neural network. We presents new feature extractor using second order approximating function as the input signals of neural network. We use 9 significant parameters which were extracted by feature extractor. 5 most characterized ECG signal pattern is classified accurately by neural network. We use AHA database to evaluate the performance ol the proposed pattern classification algorithm.

• Journal of Biomedical Engineering Research
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• v.10 no.2
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• pp.125-130
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• 1989

In the present study, we described a test to explore the function of optokinetic system which subjected to a full visual field stimulation using two different stimulus images patterns. Our results were interesting in a point of view that the stimulation image pattern had non- neglisible influence on the optokinetic response and that in a bidimensionnel image such as the randomly distributed spots images pattern the linearity of system was assured upto the stimulus velocity of about 50 deg/sec for normal subject. As for measuring human optokinetic after nystagmus, the regular stripes pattern was rather desirable than the randomly distributed spots pattern in this study.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.55 no.4
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• pp.202-206
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• 2006

In this paper, an auto detection method of stator winding fault of small induction motor is suggested. The Park's vector pattern which is obtained from 3-phase current signal by d-q transforming, is very good to detect winding fault. Comparing the Park's vector pattern of testing motor with its of healthy motor, the Park's vector pattern of fault motor is became an ellipse and the asymmetry is increased by the winding fault series. So for detecting the dis-symmetry, id-filtered function, Min-value, and Max-value are suggested for auto detecting. Using LabVIEW programing, 3-phase healthy motor and several kind of winding fault motors are tested and the test results are shown that the suggested method can gives us a possibility of an auto detecting winding fault.

• Korean Journal of Optics and Photonics
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• v.2 no.1
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• pp.1-6
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• 1991

This paper describes the theoretical analysis of a diffraction pattern analyzer for the characterization of microscale object fields and a method for obtaining size and size distribution from the measured diffraction pattern of the object fields. For the experimental verification, a typical optical Fourier transform system was set up and calibrated with 2 5$\mu \textrm m$ and 50$\mu \textrm m$ pinholes. The system responses to distilled water droplets, alcohol, glycerin and silicon oil were imaged with vidicon, and the image was processed to determine the size distribution of each liquid particle field. The energy distribution function which is defined as the total intensity of a circular ring in the diffraction pattern was used to determine the dominant particle size of each liquid particle field.

• Journal of Electrical Engineering and information Science
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• v.2 no.6
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• pp.20-27
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• 1997

We present a method of electromyographic(EMG) pattern recognition to identify motion commands for the control of a prosthetic arm by evidence accumulation with multiple parameters. Integral absolute value, variance, autoregressive(AR) model coefficients, linear cepstrum coefficients, and adaptive cepstrum vector are extracted as feature parameters from several time segments of the EMG signals. Pattern recognition is carried out through the evidence accumulation procedure using the distances measured with reference parameters. A fuzzy mapping function is designed to transform the distances for the application of the evidence accumulation method. Results are presented to support the feasibility of the suggested approach for EMG pattern recognition.

• KIEE International Transaction on Systems and Control
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• v.2D no.2
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• pp.125-134
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• 2002

This paper proposes a method for identifying temporal pattern clusters to predict events in time series. Instead of predicting future values of the time series, the proposed method forecasts specific events that may be arbitrarily defined by the user. The prediction is defined by an event characterization function, which is the target of prediction. The events are predicted when the time series belong to temporal pattern clusters. To identify the optimal temporal pattern clusters, fuzzy goal programming is formulated to combine multiple objectives and solved by an adaptive differential evolution technique that can overcome the sensitivity problem of control parameters in conventional differential evolution. To evaluate the prediction method, five test examples are considered. The adaptive differential evolution is also tested for twelve optimization problems.