• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.10a
• /
• pp.23-23
• /
• 2011

Chemical-Mechanical Planarization (CMP) 공정이란 화학적 반응 및 기계적인 힘이 복합적으로 작용하여 표면을 평탄화하는 공정이다. 이러한 CMP 공정은 반도체 산업에서 회로의 고집적화와 다층구조를 형성하기 위하여 도입되었으며 반도체 제조를 위한 필수공정으로 그 중요성이 강조되고 있다. 특히 최근에는 Inter-Level Dielectric (ILD)의 형성과 Shallow Trench Isolation (STI) 공정에서실리콘 산화막을 평탄화하기 위한 CMP 공정에 대해 연구가 활발히 이루어지고 있다. 그러나 CMP 공정 후 scratch, pitting corrosion, contamination 등의 Defect가 발생하는 문제점이 존재한다. 이 중에서도 scratch는 기계적, 열적 스트레스에 의해 생성된 패드의 잔해, 슬러리의 잔유물, 응집된 입자 등에 의해 표면에 형성된다. 반도체 공정에서는 다양한 종류의 실리콘 산화막이 사용되고 gks이러한 실리콘 산화막들은 종류에 따라 경도가 다르다. 따라서 실리콘 산화막의 경도에 따른 CMP 공정 및 이로 인한 Scratch 발생에 관한 연구가 필요하다고 할 수 있다. 본 연구에서는 scratch 형성의 거동을 알아보기 위하여 boronphoshposilicate glass (BPSG), plasma enhanced chemical vapor deposition (PECVD) tetraethylorthosilicate (TEOS), high density plasma (HDP) oxide의 3가지 실리콘 산화막의 기계적 성질 및 이에 따른 CMP 공정에 대한 평가를 실시하였다. CMP 공정 후 효율적인 scratch 평가를 위해 브러시를 이용하여 1차 세정을 실시하였으며 습식세정방법(SC-1, DHF)으로 마무리 하였다. Scratch 개수는 Particle counter (Surfscan6200, KLA Tencor, USA)로 측정하였고, 광학현미경을 이용하여 형태를 관찰하였다. Scratch 평가를 위한 CMP 공정은 실험에 사용된 3가지 종류의 실리콘 산화막들의 경도가 서로 다르기 때문에 동등한 실험조건 설정을 위해 동일한 연마량이 관찰되는 조건에서 실시하였다. 실험결과 scratch 종류는 그 형태에 따라 chatter/line/rolling type의 3가지로 분류되었다 BPSG가 다른 종류의 실리콘 산화막에 비해 많은 수에 scratch가 관찰되었으며 line type이 많은 비율을 차지한다는 것을 확인하였다. 또한 CMP 공정에서 압력이 증가함에 따라 chatter type scratch의 길이는 짧아지고 폭이 넓어지는 것을 확인하였다. 본 연구를 통해 실리콘 산화막의 경도에 따른 scratch 형성 원리를 파악하였다.

• Korean Journal of Materials Research
• /
• v.28 no.6
• /
• pp.349-354
• /
• 2018

Particle size reduction is an important step in many technological operations. The process itself is defined as the mechanical breakdown of solids into smaller particles to increase the surface area and induce defects in solids, which are needed for subsequent operations such as chemical reactions. To fabricate nano-sized particles, several tens to hundreds of micron size ceramic beads, formed through high energy milling process, are required. To minimize the contamination effects during high-energy milling, the mechanical properties of zirconia beads are very important. Generally, the mechanical properties of $Y_2O_3$ stabilized tetragonal zirconia beads are closely related to the mechanism of phase change from tetragonal to monoclinic phase via external mechanical forces. Therefore, $Y_2O_3$ distribution in the sintered zirconia beads must also be closely related with the mechanical properties of the beads. In this work, commercially available $100{\mu}m-size$ beads are analyzed from the point of view of microstructure, composition homogeneity (especially for $Y_2O_3$), mechanical properties, and attrition rate.

• Journal of Soil and Groundwater Environment
• /
• v.7 no.2
• /
• pp.35-44
• /
• 2002

In order to determine the contamination of the aromatic hydrocarbons in soil, a fiber-optic sensing technique with fluorescence detector has been proposed. Previous researches have shown that the optimal condition for detecting benzene, toluene, ethylbenzene, xylene (BTEX) was 260 nm /290 nm (excitation/emission wavelength). However, broader fluorescence spectra of BTEX-polluted soil sample ranging from 300 nm to 600 nm were observed. Additionally, the intensity of fluorescence increased with increasing BTEX concentration, which was conspicuous in the fine-particle soil, The overall results indicated that the suggested technique could be useful for in-situ monitoring system for subsurface oil-storage tank.

• Nuclear Engineering and Technology
• /
• v.52 no.6
• /
• pp.1259-1265
• /
• 2020

A beta ray scanner was proposed for in-situ discrimination of beta and gamma ray radioactivity. This scanner is based on the principle that gamma and beta rays experience different changes in detection efficiency in scintillators with different geometries, especially with regard to the scintillator thickness. The ratios of the counting rates of gamma rays (R_gamma), beta rays (R_beta), and sample measurements (R_total) in a thick scintillator to those in a thin one are reported. The parameter X_thick, which represents the counting rate contributed by beta rays to the total counting rate in the thick scintillator, was derived as a function of those ratios. The values of R_gamma and R_beta for ⁶⁰Co and ⁹⁰Sr sources were estimated as 3.2 ± 0.057 and 0.99 ± 0.0049, respectively. The estimated beta ray contributions had relative standard deviations of 2.05-4.96%. The estimated range of the beta rays emitted from ⁹⁰Sr was 19 mm as per the Monte Carlo N-Particle simulation, and this value was experimentally verified. Homogeneous and surface contaminations of ⁶⁰Co and ⁹⁰Sr-⁹⁰Y were simulated for application of the proposed method. The counting rate contributed by the beta rays was derived and found to be proportional to the concentration of ⁹⁰Sr-⁹⁰Y contamination.

• The Journal of Korean Society of Virology
• /
• v.30 no.1
• /
• pp.61-70
• /
• 2000

Standard plaque assay using agarose-overlay has long been used for titration of many infectious virus particle. Plaque assay for the titration of varicella-zoster virus and its live vaccine requires three intermittent agarose overlay to visualize plaques. Overall procedure of the assay takes at least nine days from virus inoculation and microbe contamination including fungi is frequently accompanied during incubation period. We studied whether an immunofocus assay in conjunction with peroxidase-mediated immunohistochemical reaction may replace the standard plaque assay for the virus titration by comparing the two methods. A linear relationship was observed between number of foci and virus dilution. The number of foci in a given dilution of virus appeared a little higher than counted plaques formed in standard plaque assay. Independent titration results obtained from two assay methods for a given dilution of virus demonstrated a strong correlation ($r^2=0.99$). Foci of virus infected cells as revealed by the enzyme reaction could be counted either 4 days post-infection (p.i.) under low magnification (40X) microscopy, or 6 days p.i. by naked eye observation. Larger size of cell cuture plate, virus adsorption at $35^{\circ}C$, and 10% FBS in diluent appeared to be better conditions for the assay. Immunofocus assay will be an effective and dependable titration method for varicella-zoster virus and its live vaccine in place of the standard plaque assay in respect to accuracy, costs, and experimental convenience.

• Korean Journal of Veterinary Service
• /
• v.43 no.2
• /
• pp.107-112
• /
• 2020

Foot-and-mouth disease (FMD) and avian influenza (AI) are highly pathogenic viral disease which affects the livestock industry worldwide. Outbreak of these viruses causes great impact in the livestock industry; thus, disease infected animals were immediately disposed. Burial is the commonly used disposal method for deceased animals. However, there is potential for secondary environmental contamination, as well as the risk that infectious agents persisting in the environment due to the limited environmental controls in livestock burial sites during the decomposition of the carcasses. Therefore, this study aimed to investigate the detection of FMD and AI viruses from animal carcass disposal sites using real-time reverse transcription PCR. Soil samples of more than three years post-burial from livestock carcass disposal sites were collected and processed RNA isolation using a commercial extraction kit. The isolated RNA of the samples was used for the detection of FMDV and AIV using qRT-PCR. Based on the qPCR assay result, no viral particle was detected in the soil samples collected from the animal disposal sites. This indicates that 3 years of burial and their carcass disposal method is efficient for the control or at least reduction of spread infections in the surrounding environment.

• Journal of Radiation Industry
• /
• v.11 no.1
• /
• pp.39-45
• /
• 2017

A cyclotron is a kind of particle accelerator that produces a beam of charged particles for the production of medical, industrial, and research radioisotopes. More than 30 cyclotrons are operated in Korea to produce $^{18}F$, an FDG synthesis at hospitals. A 30-MeV cyclotron was installed at ARTI (Advanced Radiation Technology Institute, KAERI) mainly for research regarding isotope production. In this study, we analyze and estimate the items of risk such as the problems in the main components of the cyclotron, the loss of radioactive materials, the leakage of coolant, and the malfunction of utilities, fires and earthquakes. To estimate the occurrence frequency in an accident risk assessment, five levels, i.e., Almost certain, Likely, Possible, Unlikely, and Rare, are applied. The accident consequence level is classified under four grades based on the annual permissible dose for radiation workers and the public in the nuclear safety law. The analysis of the accident effect is focused on the radioactive contamination caused by radioisotope leakage and radioactive material leakage of a ventilation filter due to a fire. To analyze the risks, Occupation Safety and Health Acts is applied. In addition, action plans against an accident were prepared after a deep discussion among relevant researchers. In this acts, we will search for hazard and introduce the risk assessment for the research 30-MeV cyclotron facilities of ARTI.

• Progress in Superconductivity and Cryogenics
• /
• v.20 no.4
• /
• pp.46-49
• /
• 2018

To improve in-field critical current densities ($J_c$) of $GdBa_2Cu_3O_{7-{\delta}}$ (GdBCO) coated conductors(CCs) fabricated by the reactive co-evaporation by deposition and reaction (RCE-DR) process, employing the nominal composition of Gd:Ba:Cu=1:1:2.5, we tried to refine the $Gd_2O_3$ particles trapped in the GdBCO superconducting matrix. For this purpose, we carefully selected the processing conditions on the stability phase diagram of GdBCO for this composition. By lowering the growth temperature of $Gd_2O_3$ in the liquid, we could refine the average particle size of $Gd_2O_3$ particles trapped in the GdBCO matrix and also achieve the zero-resistive transition temperatures ($T_{c,zero}$) of 92.3~94.2 K. Unfortunately, however, it was unsuccessful to achieve enhanced in-field $J_c$ values from these samples because of an air-contamination of the amorphous precursor film before its conversion into crystalline GdBCO film, suggesting that any exposure of the amorphous precursor film to air is fatal in obtaining high performance GdBCO CCs via the RCE-DR process.

• Journal of Soil and Groundwater Environment
• /
• v.27 no.1
• /
• pp.39-49
• /
• 2022

Bottom ash generated from thermal power plants is mainly disposed in landfills, from which metals may be leached by infiltrating water. To evaluate the effect of metals in leachate on soil and groundwater, we characterized bottom ash generated from burning cokes, bituminous coal, the mixture of bituminous coal and wood pellets, and charcoal powder. The bottom ash of charcoal powder had a relatively large particle size, and its wood texture was well-preserved from SEM observation. The bottom ash of charcoal powder and wood pellets had relatively high K concentration from total element analysis. The eluates of the bottom ash samples had appreciable concentrations of Ca, Al, Fe, SO₄, and NO₃, but they were not a significant throughout the batch test. Therefore, it is considered that there is low possibility of soil and groundwater contamination due to leaching of metal ions and anions from these bottom ash in landfills. To estimate the trend of various trace elements, long-term monitoring and additional analysis need to be performed while considering the site conditions, because they readily adsorb on soil and aquifer substances.

• KSCE Journal of Civil and Environmental Engineering Research
• /
• v.30 no.1C
• /
• pp.7-15
• /
• 2010

In case that the seepage of contaminants into the subsurface has been generated from the waste impoundment by demage of geomembrane liner, it is necessary to repair the leaks of geomembrane liner for minimizing the environmental contamination by electrophoresis method. However, when electrophoresis method is applied to leachate electrolyte system, the phenomenon of clay particles flocculation would be accelerated by the interaction between clay particles and specific chemicals in leachate. In addition, the gravitational settling behaviour would be induced superior to the electrophoretic migration behaviour. Eventually, the limitations of field applicability for using the electrophoresis method are appeared. Therefore, 1-D enhanced electrophoresis method is conducted to prevent the clay flocculation and accelerate the migration of clay particles separately. After the 1-D enhanced electrophoresis experiment, we can get the results that the deflocculation effect of clay particles is increased by electrical repulsion of polymer, which adsorbed in clay particle edge, in case of using PAA dispersing agent.