• 대한기계학회논문집A
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• 제33권3호
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• pp.261-264
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• 2009

We present a three-dimensional (3D) particle focusing channel using the positive dielectrophoresis (pDEP) guided by a dielectric structure between two planar electrodes. The dielectric structure between two planar electrodes induces the maximum electric field at the center of the microchannel, and particles are focused to the center of the microchannel by pDEP as they flow from the single sample injection port. Compared to the previous 3D particle focusing methods, the present device achieves the simple and effective particle focusing function without any additional fluidic ports and top electrodes. In the experimental study, approximately 90 % focusing efficiency were achieved within the focusing length of 2mm, on both x-z plane (top-view) and y-z plane (side-view) for $2{\mu}m$-diameter polystyrene (PS) bead at the applied voltage over 15 Vp-p (square wave) and at the flow rate below 0.01 ${\mu}l$/min. The present 3D particle focusing channel results in a simple particle focusing method suitable for use in integrated microbiochemical analysis system.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 춘계학술대회
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• pp.1505-1509
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• 2004

A novel technique for fine particle beam focusing under the atmospheric pressure is introduced using a radiation pressure assisted aerodynamic lens. To introduce the radiation pressure in the aerodynamic focusing system, a 25 mm plano-convex lens having 2.5 mm hole at its center is used as an orifice. The particle beam width is measured for various laser power, particle size, and flow velocity. In addition, the effect of the laser characteristics on the beam focusing is evaluated comparing an Ar-Ion continuous wave laser and a pulsed Nd-YAG laser. For the pure aerodynamic focusing system, the particle beam width was decreased as increasing particle size and Reynolds number. For the particle diameter of 0.5 ${\mu}m$, the particle beam was broken due to the secondary flow at Reynolds number of 694. Using the Ar-Ion CW laser, the particle beam width becomes smaller than that of the pure aerodynamic focusing system about 16 %, 11.4 % and 9.6 % for PSL particle size of 2.5 ${\mu}m$, 1.0 ${\mu}m$, and 0.5 ${\mu}m$ respectively at the Reynolds number of 320. Particle beam width was minimized around the laser power of 0.2 W. However, as increasing the laser power higher than 0.4 W, the particle beam width was increased a little and it approached almost a constant value which is still smaller than that of the pure aerodynamic focusing system. The radiation pressure effect on the particle beam width is intensified as Reynolds number decreases or particle size increases relatively. On the other hand, using 30 Hz pulsed Nd-YAG laser, the effect of the radiation pressure on the particle beam width was not distinct unlike Ar-Ion CW laser.

• 대한기계학회논문집B
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• 제29권1호
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• pp.110-115
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• 2005

A novel technique for fine particle beam focusing under the atmospheric pressure is introduced using a radiation pressure assisted aerodynamic lens. To introduce the radiation pressure in the aerodynamic focusing system, a 25m plano-convex lens having 2.5mm hole at its center is used as an orifice. The particle beam width is measured for various laser power, particle size, and flow velocity. In addition, the effect of the laser characteristics on the beam focusing is evaluated comparing an optical tweezers type and pure gradient force type. For the pure aerodynamic focusing system, the particle beam width was decreased as increasing particle size and Reynolds number. Using the optical tweezers type, the particle beam width becomes smaller than that of the pure aerodynamic focusing system about $16\%,\;11.4\%\;and\;9.6\%$ for PSL particle size of $2.5{\mu}m,\;1.0{\mu}m,\;and\;0.5{\mu}m$, respectively. Particle beam width was minimized around the laser power of 0.2W. However, as increasing the laser power higher than 0.4W, the particle beam width was increased a little and it approached almost a constant value which is still smaller than that of the pure aerodynamic focusing system. For pure gradient force type, the reduction of the particle beam width was smaller than optical tweezers type but proportional to laser power. The radiation pressure effect on the particle beam width is intensified as Reynolds number decreases or particle size increases relatively.

• 한국입자에어로졸학회지
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• 제13권2호
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• pp.53-63
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• 2017

As semiconductor process was highly integrated, particle contamination became a major issue. Because particle contamination is related with process yields directly, particles with a diameter larger than half pitch of gate should be controlled. PBMS (Particle beam mass spectrometry) is one of powerful nano particle measurement device. It can measure 5~500 nm particles at ~ 100 mtorr condition in real time by in-situ method. However its usage is restricted to research filed only, due to its big device volume and high price. Therefore aperture changeable aerodynamic lenses (ACALs) which can control particle focusing characteristics by changing its aperture diameter was proposed in this study. Unlike conventional aerodynamic lenses which changes particle focusing efficiency when operating condition is changed, ACALs can maintain particle focusing efficiency. Therefore, it can be used for a multi-monitoring system that connects one PBMS and several process chambers, which greatly improves the commercialization possibility of the PBMS. ACALs was designed based on Stokes number and evaluated by numerical method. Numerical analysis results showed aperture diameter changeable aerodynamic lenses can focus 5 to 100 nm standard particles at 0.1 to 10 torr upstream pressure.

• 대한기계학회논문집B
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• 제25권3호
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• pp.315-321
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• 2001

Aerodynamic lenses are widely used in generating particle beams of high density and small diameter, but analytical or modeling studies are limited only in the free molecular regime. In this study, it is shown that generating particle beam is also possible in atmospheric pressure range, and the mechanism of generating particle beam using an orifice is analysed into three different parts : fluid dynamic contraction, diffusional defocusing, and inertial focusing. In laminar flow conditions, the diffusional defocusing effect can be neglected, and the effects of inertial focusing can be expressed in terms of the orifice size and Stokes number. Numerical experiments are done for two different orifices, d/D=1/5 and 1/10 and particle diameter d(sub)p=1-10 ㎛. The results for two different orifices can be made into a single curve when a modified Stokes number is used. The inertial focusing effect diminishes when the modified Stokes number becomes smaller than 10(sup)-2.

• 한국전산유체공학회:학술대회논문집
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• 한국전산유체공학회 2008년도 춘계학술대회논문집
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• pp.581-584
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• 2008

A generation of a particle beam is the key technique in a flow cytometry that measures the fluorescence and light scattering of individual cell and other particulate or molecular analytes in biomedical research. Recent methods performing this function require a laborious and time-consuming assembly. In the present work, we propose a novel device for the generation of an axisymmetrical focusing beam of microparticles (3-D focusing) in a single capillary without sheath flows. This work uses the concept that the particles migrate toward the centerline of the channel when they lag behind the parabolic velocity profile. Particle focusing of spherical particles was successfully made with a beam diameter of about 10 ${\mu}$m. Proposed device provides crucial solutions for simple and innovative 3-D particle focusing method for the applications to the MEMS-based micro-flow cytometry. We believe that this device can be utilized in a wide variety of applications, such as biomedical/ biochemical engineering.

• 대한기계학회논문집B
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• 제30권4호
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• pp.287-297
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• 2006

The Holographic Particle Velocimetry system can be a promising optical tool for the measurements of three dimensional particle velocities. One of inherent limitations of particle holography is the very long depth of field of particle images, which causes considerable difficulty in the determination of particle positions in the optical axis. In this study, we introduced three auto-focusing parameters corresponding to the size of particles, namely, Correlation Coefficient, Sharpness Index, and Depth Intensity to determine the focal plane of a particle along the optical axis. To investigate the suitability of the above parameters, the plane image of dot array screens containing different size of dots was recorded by diffused illumination holography and the positions of each dot in the optical axis were evaluated. In addition, the effect of particle position from the holographic film was examined by changing the distance of the screen from the holographic film. All measurement results verified that the evaluated positions using suggested auto-focusing parameters remain within acceptable range of errors. These research results may provide fundamental information for the development of the holographic velocimetry system based on the automatic image processing.

• 한국분무공학회지
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• 제10권3호
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• pp.17-28
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• 2005

The Holographic Particle Velocimetry system can be a promising optical tool for the measurements of three dimensional particle velocities. In this study, diffused illumination holographic system to measure the sizes and 3D velocities of moving particles based on automatic image processing was developed. First of all basic optical systems for pulse laser recording, continuous laser reconstruction, and image acquisition, were constructed. To determine the position of particles in the optical axis, new three auto-focusing parameters(AEP), namely, Correlation Coefficient, Sharpness Index, and Depth Intensity were introduced and verified. The developed system was applied to spray droplets to validate the capability of the system. Three dimensional positions of particles viewed from two sides were decided using AFP and then 3D velocities of Particles were extracted by particle tracking algorithm. Comparison of measurement results of sizes and 3D velocities of particles with those obtained by laser instrument, PDPA, showed good consistency of the developed holographic system.

• 반도체디스플레이기술학회지
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• 제3권2호
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• pp.1-4
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• 2004

An experimental study was conducted on the optimal configuration and size of ADFL(Aerodynamic Focusing Lens) which used in modified ISPM(In-Situ Particle Monitoring). The particle counting efficiency has been known as a function of distance and size of ADFL, thus we varied these parameters to find out the optimum values. From a result of experiment, it was found that two lenses and 6mm space between them showed a maximum particle measuring efficiency. To apply this modified ISPM to semiconductor manufacturing field, we need more experiment about the pressure change, flow rate, and input particle size.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1713-1717
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• 2008

We have developed a nanoparticle focusing mask which can generate particle arrays directly on the large area with high resolution. Using this mask, nanomaterials are precisely deposited onto desired positions on a substrate surface. We obtained various sizes of arrays ranging from 80 nm to 6 ${\mu}m$ with silver and copper nanoparticles that are generated by a spark discharge and an evaporation-condensation method. The feather size is much smaller than that of mask openings due to the focusing effects, like electrostatic lens, caused by charge or electric potential on insulator mask surface, which also prevent a mask clogging. The particle array size depends on the size of mask open patterns and focusing effects near the mask relate to ion flow rate and electric potential. We have demonstrated that diverse size of arrays with high resolution could be obtained repeatedly using the same sized mask in atmosphere.