• 한국표면공학회지
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• 제25권3호
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• pp.107-116
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• 1992

The optimum thickness of Pd-Ni plated layers used as an electrical contact film was investigated by evaluating mechanical, thermal and environmental characteristics. The variations of morphologies and chemical compositions were studied by using SEM, EDS and ESCA. As a result of wear test, the wear resistance behavior of the gold plated layers was not changed with the sliding velocity changes. The palladium-nickel plated layer showed better wear resistance than the gold plated layer at low sliding velocity, but it showed poor wear resistance at high sliding velocity. Under the thermal condition of $400^{\circ}C$ in air, the gold thickness of $2\mu\textrm{m}$ without underplate on phosphorous bronze formed copper oxide on the surface layer by rapid diffusion of copper whereas the gold thickness of $0.8\mu\textrm{m}$ deposited on nickel and palladium-nickel underplate was stable at $400^{\circ}C$. Under the sulfur dioxide environments, the gold thickness of $0.3\mu\textrm{m}$ deposited on the nickel thickness of$ 3\mu\textrm{m}$ and the palladium-nickel thickness of $2\mu\textrm{m}$ underplate was more corrosion-resistant than the gold thickness of $2\mu\textrm{m}$ without underplate on phosphorous bronze. Under the nitric acid vapor environment, corrosion resistance of the gold film was superior to an equivalent thickness of the palladium-nickel film.

• 한국재료학회지
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• 제24권10호
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• pp.532-537
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• 2014

In this study, highly sensitive hydrogen micro gas sensors of the multi-layer and micro-heater type were designed and fabricated using the micro electro mechanical system (MEMS) process and palladium catalytic metal. The dimensions of the fabricated hydrogen gas sensor were about $5mm{\times}4mm$ and the sensing layer of palladium metal was deposited in the middle of the device. The sensing palladium films were modified to be nano-honeycomb and nano-hemisphere structures using an anodic aluminum oxide (AAO) template and nano-sized polystyrene beads, respectively. The sensitivities (Rs), which are the ratio of the relative resistance were significantly improved and reached levels of 0.783% and 1.045 % with 2,000 ppm H2 at $70^{\circ}C$ for nano-honeycomb and nano-hemisphere structured Pd films, respectively, on the other hand, the sensitivity was 0.638% for the plain Pd thin film. The improvement of sensitivities for the nano-honeycomb and nano-hemisphere structured Pd films with respect to the plain Pd-thin film was thought to be due to the nanoporous surface topographies of AAO and nano-sized polystyrene beads.

• 마이크로전자및패키징학회지
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• 제2권1호
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• pp.3-18
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• 1995

• 한국전기전자재료학회논문지
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• 제35권5호
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• pp.488-493
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• 2022

Generally, diamond-like carbon films (a-C:H, DLC) have been shown to have a low coefficient of friction, a high hardness and a low wear rate. Pd-doped C thin film was fabricated using a dual magnetron sputtering with two targets of graphite and palladium. Graphite target RF power was fixed and palladium target RF power was varied. The structural, physical, and surface properties of the deposited thin film were investigated, and the correlation among these properties was examined. The doping ratio of Pd increased as the RF power increased, and the surface roughness of the thin film decreased somewhat as the RF power increased. In addition, the hardness value of the thin film increased, and the adhesive strength was improved. It was confirmed that the value of the contact angle indicating the surface energy increases as the RF power increases. It was concluded that the increase in RF power contributed to the improvement of the physical properties of Pd-doped C thin film.

• 한국전기전자재료학회논문지
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• 제31권3호
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• pp.160-164
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• 2018

We have proposed a hydrogen detection sensor based on a Pd (palladium)-coated, single-mode, optical fiber. The experimental results demonstrated that the sensor could detect hydrogen in air as well as in insulation oil. The influence of Pd film thickness and environmental temperature on response time and sensitivity was analyzed. The reflected optical power at the optical-fiber/Pd interface decreased as the concentration of hydrogen increased, in both air and the insulation oil. The sensor showed 0.75 dB of optical power variation when the concentration of dissolved hydrogen was saturated in the insulation oil.

• 한국광학회지
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• 제18권6호
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• pp.389-394
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• 2007

단일모드 광섬유를 이용한 수소센서의 특성을 이론 및 실험으로 분석하였다. 검출 소재로 팔라듐(Pd:palladium) 필름을 이용하였고 광섬유와 Pd 사이의 접착력을 강화하기 위해 니켈(Ni) 필름을 사용하였다. 제작된 센서의 반응감도와 반응시간은 팔라듐 박막의 두께에 크게 의존하였다. 단일모드 광섬유 끝단에 접착층으로 5 nm 두께의 Ni 박막과 감응막으로 10 nm 두께의 Pd가 코팅된 센서는 0.6 dB의 반사도의 변화와 $3{\sim}5$초의 반응시간을 보였다.

• 한국표면공학회지
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• 제42권5호
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• pp.232-239
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• 2009

This study presented the effect of membrane thickness on hydrogen permeability. Microvoids on the surface of the membrane should not exist for the exact values of hydrogen permeability. Pd-Cu-Ni hydrogen alloy membranes were fabricated by Ni powder sintering, substrate plasma pretreatment, sputtering and Cu reflow process. And this leaded to void-free surface and dense film of Pd-Cu-Ni hydrogen alloy membrane. Hydrogen permeation test showed that hydrogen permeability increased from 2.7 to $15.2ml/cm^2{\cdot}min{\cdot}atm^{0.5}$ as membrane thickness decreased from 12 to $4{\mu}m$. This represented the similar trend as a hydrogen permeability of pure palladium membrane based on solution-diffusion mechanism.

• The Korean Journal of Ceramics
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• 제2권2호
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• pp.83-88
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• 1996

Long term stability, sensitization in air, and gas sensing behaviors of tin oxide films were investigated with doping of antimony and palladium. The tin oxide films were prepared on a Corning glass by reactive rf sputtering method and tested for detection of hydrogen gas. Sb-doping improved a long-term stability in the base resistance of $SnO_2$ film sensor. A small amount of Pd doping caused the optimum sensor operating temperature to reduce and also enhanced the gas sensitivity, compared with the undoped $SnO_2$ film. Gas sensitivity depended largely on the film thickness. The important sensitization reactions for sensor operating were $(O_{2ads})+e^-\;{\rightarrow}\;2(O_{ads})^-$ on the surface of $SnO_2$ film at elevated temperature in air and a followed reaction of hydrogen atoms with $(O_{ads})^-$ ions.

• 한국재료학회지
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• 제21권6호
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• pp.309-313
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• 2011

The power capacitors used as vehicle inverters must have a small size, high capacitance, high voltage, fast response and wide operating temperature. Our thin film capacitor was fabricated by alumina layers as a dielectric material and a metal electrode instead of a liquid electrolyte in an aluminum electrolytic capacitor. We analyzed the micro structures and the electrical properties of the thin film capacitors fabricated by nano-channel alumina and metal electrodes. The metal electrode was filled into the alumina nano-channel by electroless nickel plating with polyethylene glycol and a palladium catalyst. The spherical metals were formed inside the alumina nano pores. The breakdown voltage and leakage current increased by the chemical reaction of the alumina layer and $PdCl_2$ solution. The thickness of the electroless plated nickel layer was 300 nm. We observed the nano pores in the interface between the alumina layer and the metal electrode. The alumina capacitors with nickel electrodes had a capacitance density of 100 $nF/cm^2$, dielectric loss of 0.01, breakdown voltage of 0.7MV/cm and leakage current of $10^4{\mu}A$.

• 폴리머
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• 제39권3호
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• pp.487-492
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• 2015

Palladium(II) 촉매를 이용한 norobornene carboxylic acid estsers의 중합 시 단량체의 알킬 작용기의 종류, endo/exo 비율이 촉매의 활성도 및 중합 특성에 미치는 영향을 조사하였다. Norbornene esters 단량체는 5-norborene-2-carboxylic acid와 다양한 알코올을 반응시켜 합성하였다. 중합 촉매로는 di-$\mu$-chloro-bis(-methoxybicyclo[2,2,1]-hept-2-ene)palladium(II)(DCBMP)를 합성하여 사용하였고, 짝음이온으로 실버 헥사플루오로안티모네이트($AgSbF_6$)를 이용하였다. 고분자의 분석을 위해 젤 투과 크로마토그래피(gel permeation chromatography, GPC), 열 중량 분석법(thermogravimetric analysis, TGA), 시차주사 열량측정법(differential scanning calorimetry, DSC), 화학구조 분석을 위해 $^1H$ NMR spectroscopy를 이용하였다. 분자량 분석 결과 모든 작용기의 경우 endo-이성체의 비율이 exo-이성체의 비율보다 높을 경우 촉매의 구조적 방해로 인하여 반응성이 감소됨을 보였다. 또한 단량체와 촉매의 비율이 중합 거동에 미치는 영향을 조사하기 위해 단량체와 촉매의 몰비율을 100:1, 200:1, 300:1로 변화시켜 실험을 진행하였으며, 이 때 exo-norbornene carboxylic acid octyl ester의 경우 300:1 촉매비에서 필름형성이 가능한 높은 분자량($M_n=27500g/mol$)의 고분자를 합성할 수 있었다.