• Journal of the Korean Society of Industry Convergence
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• v.23 no.6_2
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• pp.1051-1058
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• 2020

The chemical mechanical planarization (CMP) is a process of physically and chemically polishing the semiconductor substrate. The planarization quality of a substrate can be evaluated by the within wafer non-uniformity (WIWNU). In order to improve WIWNU, it is important to manage the pad profile. In this study, a device capable of non-contact measurement of the pad thickness profile was developed. From the measured pad profile, the profile of the pad surface and the groove was extracted using the envelope function, and the pad thickness profile was derived using the difference between each profile. Thickness profiles of various CMP pads were measured using the developed PMS and envelope function. In the case of IC series pads, regardless of the pad wear amount, the envelopes closely follow the pad surface and grooves, making it easy to calculate the pad thickness profile. In the case of the H80 series pad, the pad thickness profile was easy to derive because the pad with a small wear amount did not reveal deep pores on the pad surface. However, the pad with a large wear amount make errors in the lower envelope profile, because there are pores deeper than the grooves. By removing these deep pores through filtering, the pad flatness could be clearly confirmed. Through the developed PMS and the pad thickness profile calculation method using the envelope function, the pad life, the amount of wear and the pad flatness can be easily derived and used for various pad analysis.

• Journal of Korean Foot and Ankle Society
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• v.19 no.4
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• pp.188-192
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• 2015

Purpose: The purpose of this study is to provide Korean data on heel pad thickness according to age, gender, underlying disease, occupation, and body mass index (BMI). Materials and Methods: A retrospective study was conducted on 670 patients who underwent foot lateral plain radiography and magnetic resonance imaging (MRI) between January 2010 and July 2014. Through measurements of heel pad thickness, the usefulness and accuracy of foot lateral plain radiography was evaluated, and the mean Korean heel pad thickness in the weight-bearing and non-weight-bearing conditions was also evaluated according to age, gender, underlying disease, occupation, and BMI. Results: The 670 subjects with a mean age of 44 years (range, 12 to 84 years) consisted of 420 males and 250 females. The difference in heel pad thickness between non-weight-bearing foot lateral plain radiography and MRI was 0.69 mm. The heel pad thickness did not show a significant difference with age (p=0.08) and the presence of diabetes (p=0.09). With the increase in the Tegner score, the thickness of the heel pad increased (p=0.035), and subjects with a higher BMI had a thicker heel pad (p=0.03). The compressibility of the heel pad thickness showed no correlation with gender, diabetes, and Tegner score. Compressibility also increased with the increase in age and body weight. Conclusion: The mean Korean heel pad thickness measured through non-weight-bearing foot lateral plain radiography was 18.79 mm. The heel pad thickness increased with increasing BMI; however, age and diabetes did not show significant correlation. The compressibility of heel pad increased with the increase in age.

• Journal of Korean Foot and Ankle Society
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• v.8 no.1
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• pp.22-25
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• 2004

Purpose: The heel fat pad has a unique structure that is important for its shock absorbing function. Loss of elasticity and change in the thickness of the heel pad have been suggested as cause of heel pain. The present study shows the relationship between the thickness of heel fat pad and age, sex, obesity and plantar heel pain. Materials and Methods: A study of heel pad thickness using plain lateral radiographs, unloaded by body weight, was carried out on 66 patients with plantar heel pain and 326 normal subjects. The population was divided into two or three groups according to their age, sex, body mass index, and the presence of symptom. We evaluated the differences in heel pad thickness between groups, and the relationship between BMI and Sex and Age was also determined, using statistically analytic method by SPSS version 10.1 program. Results: Heel pad thickness was greater in the subject over 40 years old (p<0.001), and in the overweight (p<0.001), and male heel pad was thicker than female (p<0.001). But there was no statistically significant difference for heel pad thickness between normal subject and plantar heel pain group. Conclusion: In this study, we found that there is a relationship between heel pad thickness and age, sex, and obesity. But we could not show that the difference of heel pad thickness is contributing factor to plantar heel pain. Although it could not be proved statistically, we believe that a change of heel pad thickness play a role in the development of heel pain. So we are planning to assess a relationship of heel pad elasticity and thickness and plantar heel pain again with prospective study method on the basis of the results of this study.

• The Research Journal of the Costume Culture
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• v.6 no.2
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• pp.66-76
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• 1998

In order to investigate the effect of shoulder pad affecting the arm movement, eleven women volunteers of standard body whose age is from eighteen to twenty-four(x±1σ) were chosen and this experiment had done according to front-vertical motion, side-vertical motion and horizontal motion of upper limps for tow different materials of shoulder pad(sponge, non-woven) and four different thickness of shoulder pad(0.6cm, 0.8cm, 1.2cm). On the base of this, this study, when putting on shoulder pad, try to find the reform method of shoulder part pattern. The results are as follows. 1. When puting on shoulder pad to blouse pattern to rise shoulder pad for rate of two-third per thickness is seemingly the best for sensory evaluation. So, when putting on shoulder pad, we understand that in order to improve sensory evaluation. So, when putting on shoulder pad, we understand that in order to improve sensory evaluation of clothes, when that, rising shoulder pad for ate of two-third per thickness is the best. 2. From the results of measure of functional volume and physiological value for functionality evaluation according to thickness and material, motion of shoulder pad, 1.2 cm thickness and non-woven material is evaluated the worst for functionality. 3. From the results of sensory evaluation and functionality evaluation of material of shoulder pad, sponge material is superior for functionality but not for sensory evaluation, non-woven material is superior for sensory evaluation non-woven material is superior for sensory evaluation but not for functionality. So, think that it had better use sponge material for functional clothes, non-woven material for aesthetical clothes. 4. From the results of functionality of clothes, when putting on shoulder pad, the worst discomfortable parts are the armpit part and the shawl part, functionality of these part shoulder be reformed.

• Journal of Mechanical Science and Technology
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• v.17 no.2
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• pp.246-253
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• 2003

The tribological mechanism between the valve plate and the cylinder block in oil hydraulic axial piston pumps plays an important role on high power density. In this study, the fluid film thickness between the valve plate and the cylinder block was measured with discharge pressure and rotational speed by use of a gap sensor, and a slip ring system in the operating period. To investigate the effect of the valve plate shapes, we designed two valve plates with different shapes . the first valve plate was without a bearing pad, while the second valve plate had a bearing pad. It was found that both valve plates behaved differently with respect to the fluid film thickness characteristics. The leakage flow rates and the shaft torque were also experimented in order to clarify the performance difference between the valve plate without a bearing pad and the valve plate with a bearing pad. From the results of this study, we found out that in the oil hydraulic axial piston pumps, the valve plate with a bearing pad showed better film thickness contours than the valve plate without a bearing pad.

• Tribology and Lubricants
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• v.14 no.1
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• pp.7-13
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• 1998

The static characteristics of a five-pad tilting pad journal bearing of load on pad (LOP) type have been investigated experimentally under the different values of bearing load and shaft speed. The diameter and length of the bearing are 300.91 mrn and 149.8 mm, reslx;ctively. Circumferential distribution of the film pressure, film thickness, journal surface temperature and beating surface temperature are measured. A noticeable inlet pressure rise is observed at the entrance of each pad, especially the bottom pad. The inlet pressure is increased by the increase of shaft speed as well as bearing load. In the five-pad tilting pad joumal bearing of LOP type, almost all of beating load is being carried only by the bottom pad. The maximum bearing surface temperature is observed at near the minimum film thickness. It is observed that the metal temperature of the mid-plane is higher than that of the edge at the inlet region, while the metal temperature of the edge is higher than that of the mid-plane at the outlet region.

• Nuclear Engineering and Technology
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• v.55 no.6
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• pp.2325-2334
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• 2023

To study the lubrication performance of tilting-pad thrust bearing (TPTBs) during start-up in nuclear pump, a hydrodynamic lubrication model of TPTBs was established based on the computational fluid dynamics (CFD) method and the fluid-structure interaction (FSI) technique. Further, a mesh motion algorithm for the transient calculation of thrust bearings was developed based on the user defined function (UDF). The result demonstrated that minimum film thickness increases first and then decreases with the rotational speed under start-up condition. The influence of pad tilt on minimum film thickness is greater than that of collar movement at low speed, and the establishment of dynamic pressure mainly depends on pad tilt and minimum film thickness increases. As the increase of rotational speed, the influence of pad tilt was abated, where the influence of the moving of the collar dominated gradually, and minimum film thickness decreases. For TPTBs, the circumferential angle of the pad is always greater than the radial angle. When the rotational speed is constant, the change rate of radial angle is greater than that of circumferential angle with the increase of loading forces. This study can provide reference for improving bearing wear resistance.

• Tribology and Lubricants
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• v.10 no.4
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• pp.33-42
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• 1994

An influence of inlet pressure on the performance of sector-shaped pad thrust bearings is investigated theoretically. The optimum conditions of film thickness or the optimum positions of pivot are found through the evaluation of load capacity for all available conditions of film thickness, under the operating conditions which the thermal and pad deformation effects can be neglected. The bearing performance including the inlet pressure effects is obtained for a wide operating ranges that inertia parameter(Re$^{*}$) is up to unity, and for the various cases of pad extent angle (number of pad) and the three cases of the angle between pads. The results show that the inlet pressure has a large influence on the performance of sector-shaped pad thrust bearings. In the design of sector-shaped pad bearings, due to the inlet pressure, the optimum number of pad is varied with the operating speed and the angle between pads, and the optimum position of pivot is located toward the leading edge along with the operating speed increases.

• Journal of the Korean Society of Clothing and Textiles
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• v.15 no.2 s.38
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• pp.139-150
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• 1991

The purpose of this study is to do the Somatotype classification according to the type of shoulder-neck and to give the thinkness of shoulder pad according to them. Therefore this study was measurement body size of 201 and the somatotypes were classified as their plumb line. The standard somatotype of this measurement was classified as 9 type according to its angle of shoulder inclination and neck length. Pads which have different thickness (1 cm, 1.5 cm, 2 cm) were attached to the 9 body type and the set-in sleeve blouse and raglan sleeve blouse were made and tring test and sensory test were accomplished. The results of this study were as follows: 1 . Classification of shoulder-neck relationship. Angles of shoulder inclination ($15^{\circ},\;21^{\circ},\;27^{\circ}$), lock lenaths (10 cm, 12.5 cm, 15 cm) were classi- fied as 3 type each and these types were combined as 9 types. II . The result of angle difference of shoulder inclination according to pad thickness. 1) In case of set-in pad. angle is increased $5.75^{\circ}$ per 1 cm of pad thickness. 2) In case of raglan pad. angle is increased $6.45^{\circ}$ per 1 cm of pad thickness. III. The most fit pad thickness to the 9 types. In case of set-in sleeve blouse. 1) High shoulder-long neck, Standard shoulder-long neck Low shoulder-long neck, Stan-dard shoulder·standard neck. Low shoulder-standard neck: 1.5 cm. 2) High shoulder-standard neck, Standard shoulder-short neck, Low shoulder-short neck: 1 cm. 3) High shoulder-short neck: 0 cm(without pad) In case of raglan sleeve blouse. 4) High shoulder-long neck, Standard shoulder-long neck, Low shoulder·long neck, Stan-dard shoulder-standard neck, Low shoulder-standard neck: 1.5 cm. 5) High shoulder-standard neck, Standard shoulder-short neck, Low-shoulder-short neck: 1 cm. 6) High shoulder-short neck: 0 cm(without pad)

• Tribology and Lubricants
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• v.18 no.5
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• pp.357-363
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• 2002

The vibration characteristics of the pad fluttering in a fluid film tilting pad journal bearing (4-pad LBP) have been investigated experimentally under the different values of oil supply flow rate, bearing load and shaft speed. The vibration characteristics of the pad fluttering are estimated by measuring the time signal of circumferential distribution of the film thickness and the cascade plot of the response of the relative displacement between the bearing and the shaft. It is shown that the vibration frequency of the pad fluttering has a sub-synchronous frequency and almost does not change by the increase of shaft speed. However the vibration amplitude is increased by the increase of shaft speed. From those experimental results, pad fluttering can be thought of as a self-excited vibration. The incipient pad fluttering velocity is increased by the increase of oil supply flow rate and by the decrease of bearing load. It is observed that the vibration amplitude of the pad fluttering can be decrease by the control of supply oil flow rate effectively. And also It is known that the outbreak of pad fluttering does not concern with the shaft vibration.