• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제18권6호
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• pp.521-526
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• 2005

Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.

• Proceedings of the KSR Conference
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• 한국철도학회 2010년도 춘계학술대회 논문집
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• pp.249-255
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• 2010

Ballasted track is under the circumstance of repetition of deterioration and recovery. Track deterioration is presented as track irregularity or settlement, and dynamic force subjected to track is one of major cause of the deterioration. The dynamic force is determined from the dynamic interaction between track and vehicle. Rail-pad stiffness is one of the factor affects track dynamic property. In this study, the relationship between rail-pad stiffness and track settlement was investigated. Dynamic forces according to various rail-pad stiffness was obtained from the dynamic vehicle-track interaction analysis using DARTS-NL. Track settlement was calculated by substitution the dynamic forces into various formulas for track settlement. From the result of analysis, it was known that the track settlement is increased about 6% when the rail-pad stiffness rise about twice. And this result leads that there is only a little relationship between rail-pad stiffness and track settlement.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 한국윤활학회 1997년도 제25회 춘계학술대회
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• pp.91-100
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• 1997

In this paper the linearzed stiffness and damping coefficients of tilting pad thrust bearing are calculated by the perturbation method. The coefficients are obtained for a wide range of pivot positions. The effects of exciting frequency and pad mass on stiffness and damping coefficients are investigated. Critical frequencies due to the tilting motions of the pad are presented and are shown to be strongly influenced by the pivot position and pad mass.

• Tribology and Lubricants
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• 제13권3호
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• pp.33-41
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• 1997

In this paper the linearized stiffness and damping coefficients of tilting pad thrust bearing are calculated by the perturbation method. The coefficients are obtained for a wide range of pivot positions. The effects of exciting frequency and pad mass on stiffness and damping coefficients are investigated. Critical frequencies due to the tilting motions of the pad are presented and are shown to be strongly influenced by the pivot position and the pad mass.

• Tribology and Lubricants
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• 제31권6호
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• pp.294-301
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• 2015

In this paper, we predict the rotordynamic force coefficients of tilting pad journal bearings (TPJBs) with rocker-back pivots, and we compare the predictions to recently published predictions and test data. The present TPJB model considers the rocker-back pivot stiffness calculated based on the Hertzian contact-stress theory, which is nonlinear with the application of a force . For the five-pad TPJB in load-between-pad and load-on-pad configurations, the predictions show the pressure- and film-thickness distributions, the deflection and stiffness of the individual pivots, and bearing stiffness and damping coefficients. The minimum film thickness and peak pressure occur at the bottom pad on which the applied load is directed. Because of the preload, the pres- sure is positive even at the upper pad in the opposite direction to the applied load. The pivot deflection and stiff- ness are maximum at the bottom pad that receives the heaviest pressure load. The predicted stiffness coefficients increase as the static load and rotor speed increase, while the damping coefficients decrease as the rotor speed increases, but increase as the static load increases. In general, the predicted stiffness coefficients agree well with the test data. The predicted damping coefficients overestimate the test data, particularly for large static loads. In general, the current predictive model considering the pivot stiffness improves the accuracy of the rotordynamic performance compared to previously reported models.

• Proceedings of the KSR Conference
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• 한국철도학회 2006년도 추계학술대회 논문집
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• pp.454-459
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• 2006

A wheel force becomes large as increasing the stiffness of rail-pad, and it accelerates the deterioration of track, and it leads the maintenance cost rising. So, it is required to determine an appropriate replacement period for rail-pad. As a preliminary study to determine it, a numerical analysis was conducted to investigate the influence on a track behavior by the hardening of rail-pad. From the analysis, one knows that the dynamic wheel force is vary depend on the stiffness of rail-pad and the running speed of vehicle, the displacement and acceleration of rail is decreasing as increasing stiffness of rail-pad, and the displacement and acceleration increased in proportion to the rail-pad stiffness increasing.

• Transactions of the Korean Society of Mechanical Engineers A
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• 제29권3호
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• pp.432-438
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• 2005

CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.

• Tribology and Lubricants
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• 제37권3호
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• pp.99-105
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• 2021

In this study, for a high-pressure turbine (HPT) of 800 MW class supercritical thermal-power plant, considering aerodynamic cross-coupling, we performed a rotordynamic logarithmic decrement (LogDec) stability analysis with various tilting pad journal bearing (TPJB) designs, which several steam turbine OEMs (original equipment manufacturers) currently apply in their supercritical and ultra-supercritical HPTs. We considered the following TPJB designs: 6-Pad load on pad (LOP)/load between pad (LBP), 5-Pad LOP/LBP, Hybrid 3-Pad LOP (lower 3-Pad tilting and upper 1-Pad fixed), and 5-Pad LBPs with the design variables of offset and preload. We used the API Level-I method for a LogDec stability analysis. Following results are summarized only in a standpoint of LogDec stability. The Hybrid 3-Pad LOP TPJBs most excellently outperform all the other TPJBs over nearly a full range of cross-coupled stiffness. In a high range of cross-coupled stiffness, both the 6-Pad LOP and 5-Pad LOP TPJBs may be recommended as a practical conservative bearing design approach for enhancing a rotordynamic stability of the HPT. As expected, in a high range of cross-coupled stiffness, the 6-Pad LBP TPJBs exhibit a better performance than the 5-Pad LBP TPJBs. However, contrary to one's expectation, notably, the 5-Pad LOP TPJBs exhibit a slightly better performance than the 6-Pad LOP TPJBs. Furthermore, we do not recommend any TPJB design efforts of either increasing a pad offset from 0.5 or a pad preload from 0 for the HPT in a standpoint of stability.

• The KSFM Journal of Fluid Machinery
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• 제2권2호
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• pp.32-38
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• 1999

An experimental study is performed to investigate the frequency effects of the excitation force on the linear stiffness and damping coefficients of a LOP (load on pad) type five-pad tilting pad journal bearing with the diameter of 300.91 mm and the length of 149.80 mm. The main parameter of interest in the present work is excitation frequency to shake the test bearing. The excitation frequency is controlled independently, using orthogonally mounted hydraulic exciters. The relative movement between the bearing and shaft, and the acceleration of the bearing casing are measured as a function of excitation frequency using the different values of bearing load and shaft speed. Measurements show that the variation of excitation frequency has quite a little effect on both stiffness and damping coefficients. Both direct stiffness and damping coefficients in the direction of bearing load decrease by the increase of shaft speed, but increase with the bearing load.

• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 1998년도 유체기계 연구개발 발표회 논문집
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• pp.173-179
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• 1998

An experimental study is performed to investigate the frequency effects of the excitation force on the linear stiffness and damping coefficients of a LOP (load on pad) type five-pad tilting pad journal bearing with the diameter of 300.91 mm and the length of 149.80 mm. The main parameter of interest in the present work is excitation frequency to shake the test bearing. The excitation frequency is controlled independently, using orthogonally mounted hydraulic exciters. The relative movement between the bearing and shaft, and the acceleration of the bearing casing are measured as a function of excitation frequency using the different values of bearing load and shaft speed. Measurements show that the variation of excitation frequency has quite a little effect on both stiffness and damping coefficients. Both direct stiffness and damping coefficients in the direction of bearing load decrease by the increase of shaft speed, but increase with the bearing load.