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http://dx.doi.org/10.3795/KSME-A.2005.29.3.432

The Effects of Groove Dimensions of Pad on CMP Characteristics  

Park Ki-Hyun (부산대학교 정밀기계공학과)
Kim Hyoung-Jae (부산대학교 정밀기계공학과)
Choi Jae-young (부산대학교 정밀기계공학과)
Seo Heon-deok (부산대학교 정밀기계공학과)
Jeong Hae-do (부산대학교 정밀기계공학부)
Publication Information
Transactions of the Korean Society of Mechanical Engineers A / v.29, no.3, 2005 , pp. 432-438 More about this Journal
Abstract
CMP characteristics such as material removal rate and edge effect were measured and investigated in accordance with pad grooving effect, groove width, depth and pitch. GSQ (Groove Stiffness Quotient) and GFQ (Groove Flow Quotient) were proposed to estimate pad grooving characteristics. GSQ is defined as groove depth(D) divided by pad thickness(T) and GFQ is defined as groove width(W) divided by groove pitch(P). As GFQ value increased, material removal rate increased some point but gradually saturated. It seems that material removal rate is not affected by each parameter respectively but by interaction of these parameters such as groove dimensions. In addition, an increase in GFQ and GSQ causes edge effect to be improved. Because, pad stiffness decreases as GSQ and GFQ increase. In conclusion, groove influences relative pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. The change of groove dimensions has influence on pad stiffness and slurry flow, so that polishing results such as removal rate and edge effect become changed.
Keywords
Edge Effect; GSQ; GFQ; Stiffness; Groove Dimensions; WIWNU;
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