The Effects of Groove Dimensions of Pad on CMP Characteristics |
Park Ki-Hyun
(부산대학교 정밀기계공학과)
Kim Hyoung-Jae (부산대학교 정밀기계공학과) Choi Jae-young (부산대학교 정밀기계공학과) Seo Heon-deok (부산대학교 정밀기계공학과) Jeong Hae-do (부산대학교 정밀기계공학부) |
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