• Journal of the Korean Society of Safety
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• v.31 no.3
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• pp.82-88
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• 2016

Ballasted gravel will be damaged or worn by the repetitive train load. And these damages of ballast gravel could be increased by increasing vehicle speed. Therefore, various techniques for reducing the ballast pressure have been proposed, such as the attached pad type of sleeper bottom for ballasted track. In this study, spring stiffness test method were proposed to evaluate the performance of under sleeper pad for ballasted track. Standard ballast plate(SBP) was developed to simulate the ballast gravel and compared with the foreign test results. Experimental results showed a trend similar to the previous studies according to various loading plate type. specimen type(Type A, Type B) differences in spring stiffness according to hardness were not significant. Also, the FSP (Flat steel plate) - shaped jig is about 80% of the spring stiffness was greater than SBP. Therefore, to evaluate the actual spring stiffness of under sleeper pad for ballasted track, it was important to adopted the appropriate spring stiffness test method using the SBP to simulate actual field conditions.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.192-199
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• 2001

Chemical mechanical planarization (CMP) has emerged as the planarization technique of choice in both front-end and back-end integrated circuit manufacturing. Conventional CMP process utilize a polyurethane polishing pad and liquid chemical slurry containing abrasive particles. There hale been serious problems in CMP in terms of repeatability and deflects in patterned wafers. Especial1y, dishing and erosion defects increase the resistance because they decrease the interconnection section area, and ultimately reduce the lifetime of the semiconductor. Methods to reduce dishing & erosion have recently been interface hardness of the pad, optimization of the pattern structure as dummy patterns. Dishing & erosion are initially generated an uneven pressure distribution in the materials. These defects are accelerated by free abrasives and chemical etching. Therefore, it is known that dishing & erosion can be reduced by minimizing the abrasive concentration. Minimizing the abrasive concentration by using CeO$_2$is the best solution for reducing dishing & erosion and for removal rate. This paper introduce dishing & erosion generating mechanism and a method fur developing a semi-rigid abrasive pad to minimize dishing & erosion during CMP.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.20 no.5
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• pp.79-88
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• 2020

This paper propose the method to drive a solar panel cleaning robot efficiently on an inclined panel using vacuum pad pressure. In this method, the rubber pads using the vacuum pressure are used to attach robot body to the panel surface. By applying the linkage mechanism to the vacuum pads, it was possible to reduce robot weight and power consumption and to prevent slipping of the robot. In addition, the use of solenoid valves, proximity sensors, and encoders to detect movement of the robot body and the control of the pad pressure dedicate to the driving of the robot on an inclined panel. In order to move the robot forward, the operation sequence of multiple solenoid valves was completed, and the six vacuum pads mounted to both legs were accurately controlled to form vacuum and atmospheric pressure in right order so that the robot could move forward without slipping. At last, it was confirmed through experiments that straight-forward moving and rotational movement could be performed up to 36 degrees of inclination angle of solar panel.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2004.11a
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• pp.175-185
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• 2004

Rotating disks are used in various machines such as data storage device, gyroscope, circular saw, etc. Transverse vibration of a rotating disk is very important for the performance of these machines. This work proposes a method to suppress transverse vibration of a very flexible rotating disk in non-contacting manner. A system considered in this study is a very flexible rotating disk with a thrust bearing pad which is located underneath the rotating disk. The pressure force generated in the gap between the rotating disk and the thrust pad pushes the rotating disk in the direction of axis of rotation while the centrifugal force and the elastic recovery force push the rotating disk in reverse direction. The balance between these forces suppresses the transverse vibration of the rotating disk. A coupled disk-fluid system is analyzed numerically. The finite element method is used to compute the pressure distribution between the thrust pad and the rotating disk while the finite difference method is used to compute the transverse vibration of a rotating disk. Results show that the transverse vibration of the rotating disk can be suppressed effectively for certain combination of air bearing and operating parameters.

• Tribology and Lubricants
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• v.33 no.6
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• pp.309-314
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• 2017

This paper presents a theoretical investigation of the dynamic characteristics of externally pressurized air pad bearings with closed loop grooves. These grooves are made on the surface of bearings to reduce the number of supply holes so that manufacturing costs can be reduced. The semi-implicit method is applied to calculate the time varying pressure profile on the air bearing surface owing to the advantages of numerical stability and fast time tracing characteristics. The static pressure of the groove bearings is much higher than that without grooves, so the groove bearings can provide high load carrying capacity. The equation of motion considering vertical motion and tilting motion are also solved using the Runge-Kutta 4th order method. By combining the semi-implicit method and the Runge-Kutta method, fast calculations of the dynamic behavior of the air bearing can be achieved. The variations of bearing reaction force, air film reaction moment, height, and tilting angle are investigated for the step force input, which is 20% higher than the bearing reaction, when the nominal clearance is 6 mm. The effect of the groove width and the groove depth are investigated by calculating the dynamic behavior. The possibility of the air hammering with the depth of the groove is found and discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.355-358
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• 2003

This paper presents characteristics of vacuum preloaded porous air bearing. Pressure distribution of a porous pad and vacuum pocket are calculated. And load capacity and stiffness of the bearing are analyzed with various vacuum parameters, that is. clearance height. tube diameter, tube length. pumping speed of vacuum pump, vacuum pocket to porous pad area ratio. From the simulation results, optimum clearance for best performance can be selected adjusting these parameters, especially tube diameter which is the most dominant source.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.123-124
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• 2010

• Journal of the Korean Society for Heat Treatment
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• v.19 no.1
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• pp.30-36
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• 2006

Fretting fatigue behavior of SCM420 steel commonly used in the automotive industry for structural applications was investigated in this study. In addition, the effect of bridge pad on the fretting fatigue test was evaluated from different pad materials and following conclusions were drawn. Simple fatigue limit of SCM 420 steel was determined to be 350 MPa while this value was 225 MPa and 285.5 MPa with SCM420H and with SM45C pad, respectively. Reduction in fatigue limit was, thus found to be 35.7% and 17.9% with SCM 420H pad and SM45C pad, respectively. Results of fracture surface observation revealed that typical striation pattern of fatigue failure existed as well as dimpled and cleavage frature appearance was found in final fractured region. From the EDS compositional analysis, test sample and pad part all had high signals for oxygen and iron, suggesting that worn particles might be iron oxide, although exact chemical composition has to be confirmed. Considerable reduction in fatigue life was apparent in SCM 420 steel under fretting fatigue against simple fatigue. Such reduced fatigue life by fretting damage should be considered as an important factor not only in the viewpoint of repairing but also inevitably in the design stage of structural components.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.138-144
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• 2006

Non-contact transportation of a large-sized glass plate using air cushion for the sputtering system of liquid crystal display panel was considered. The gas is injected through multiple small holes to maintain the force for levitating glass plate. Complex flow field and resulting pressure distribution on the glass surface was numerically studied to design the air injection pad. The exhaust hole size was varied to obtain evenly distributed pressure distribution at fixed diameter of the injection hole. Considering the force for levitating glass plate, the diameter of the exhaust hole of 30 to 40 times of the gas injection hole was recommended.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 1998.10a
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• pp.272-277
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• 1998

Chemical-Mechanical Polishing (CMP) refers to a material removal process done by rubbing a work piece against a polishing pad under load in the presence of chemically active, abrasive containing slurry. CMP process is a combination of chemical dissolution and mechanical action. The mechanical action of CMP involves tribology. The liquid slurry is trapped between the wafer(work piece) and pad(tooling) forming a lubricating film. For the first step to understand material removal rate of the CMP process, the lubricational analyses were done with commercial 100mm diameter silicon wafers to get nominal clearance of the slurry film, roll and pitch angle at the steady state. For this purpose, we calculate slurry pressure, resultant forces and moments at the steady state in the range of typical industrial polishing conditions.