Analysis on characteristics of vacuum preloaded air bearing

진공 예압형 공기베어링의 특성 해석

This paper presents characteristics of vacuum preloaded porous air bearing. Pressure distribution of a porous pad and vacuum pocket are calculated. And load capacity and stiffness of the bearing are analyzed with various vacuum parameters, that is. clearance height. tube diameter, tube length. pumping speed of vacuum pump, vacuum pocket to porous pad area ratio. From the simulation results, optimum clearance for best performance can be selected adjusting these parameters, especially tube diameter which is the most dominant source.