• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.828-831
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• 2003

The benefits of the pneumatic valve with piezoelectric element are faster response times, low energy consumption, and the ability to be used in hazardous environments and field bus systems. In this paper, PZT actuator, 2 and 3 stages pneumatic valve were designed and manufactured. Also. characteristics of the pneumatic valve with piezoelectric element were tested with a testing system. It is confirmed that the PZT actuator is useful one for controlling the direction of pilot valve.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.450-453
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• 2004

A tactile stimulator array using stacked PZT is fabricated and evaluated in this paper. The purpose of this research is the development of a tactile stimulator to represent the obstacle information for the visually disabled. As a first step of this research, we investigate the physiological characteristics of tactile stimuli and design a tactile stimulator based on the investigated results. Also we evaluated a fabricated tactile stimulator. The prototype of tactile stimulator which has 2$\times$2 tactor elements with 3mm spacing is fabricated using stacked PZT actuator. In order to evaluate the characteristics of this tactile stimulator, physiological experiments are carried out. In the experiment, the threshold of tactile stimulus intensity within a frequency range of 5-500Hz at various stimulus amplitudes are investigated. According to the obtained experimental result, the input signal of tactile stimulator for the effective transfer of obstacle information is determined. Also physiological experiments of multi-stimuli recognition such as shift and rotation are carried out

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.332-333
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• 2005

In this study, in order to develop low temperature sintering piezoelectric actuator, $Pb(Mg_{1/2}W_{1/2})_{0.03}(Ni_{1/3}Nb_{2/3})_x(Zr_{0.50},Ti_{0.50})_{1-x-0.03}$ (PMW-PNN-PZT) ceramic systems were fabricated using $CaCO_3-Li_2CO_3$ sintering aid and their dielectric and piezoelectric properties were investigated with the variation of PNN substitution. The piezoelectric actuator requires high piezoelectric constant $d_{33}$ and high electromechanical coupling factor kp. At the PMW-PNN-PZT ceramics with 9mol% PNN substitution sintered at $900^{\circ}C$, the density, electromechanical coupling factor kp, dielectric constant, piezoelectric constant $d_{33}$ and mechanical quality factor Qm showed the excellent values of 7.86 [$g/cm^3$], 0.584, 1881, 485 [pC/N] and 76, respectively for piezoelectric actuator application.

• 한국소음진동공학회논문집
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• 제17권7호
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• pp.617-623
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• 2007

This paper presents an active vibration control of a dynamic system using hybrid mount which consists of elastic rubber-piezostack actuator and elastic rubber-electromagnetic actuator, respectively. After identifying stiffness, damping properties of the elastic rubber, PZT actuator and electromagnetic element, a mathematical model of the hybrid mount is established. The mount model is then incorporated into the dynamic system and the governing equation of motion is obtained in a state space. A sliding mode controller is designed in order to actively attenuate the vibration of the system. Control responses such as acceleration and transmitted force of the dynamic system are experimentally evaluated and presented in time and frequency domains.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2004년도 추계학술대회논문집
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• pp.109-114
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• 2004

This paper presents a theoretical and experimental study of a non-collocated pair of piezopolymer PVDF sensor and piezoceramic PZT actuator, which are bonded on a cantilever beam, in order to suppress unwanted vibration at the tip of the beam. The PZT actuator patch was bonded near the clamped part and the PVDF sensor, which was triangularly shaped, was bonded on the other part of the beam. This is because the triangular PVDF sensor is known that it can detect the tip velocity of a cantilever beam. Because the arrangement of the sensor and actuator pair is not collocated and overlapped each other, the pair can avoid so called 'the in-plane coupling'. The test beam is made of aluminum with the dimension of $200\times20\times2mm$, and the two PZT5H actuators are both $20\times20\times1mm$ and bonded on the beam out-of-phase, and the PVDF sensor is $178mm\times6mm\times52{\mu}m$. Before control, the sensor-actuator frequency response function is confirmed to have a nice phase response without accumulation in a reasonable frequency range of up to 5000 Hz. Both the DVFB and displacement feedback strategies made the error signal from the tip velocity (or displacement) sensor is transmitted to a power amplifier to operate the PZT actuator (secondary source). Both the control methods attenuate the magnitude of the first two resonances in the error spectrum of about 6-7 dB.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.340-341
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• 2005

Three different composition 130um thickness PZT were fabricated by extrusion method and burned out at $550^{\circ}C$ and sintered at $1260^{\circ}C$/2.5hrs. Actuator was fabricated using glass and Si(100) wafer by MEMS process. From XRD data, in case of DECH, perovskite phase peak strength is higher than others. We were able to obtain the information of grain growth and porosity by SEM images. Also DECH PZT on glass membrane(100um thickness) have larger displacement than others.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.578-582
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• 2007

In this paper, vibration modes and frequencies of a ring-type stacked piezoelectric actuator for a wire bonding transducer system are analyzed using FEM simulations. We implement experiments using a commercial product model of the actuator PZT module which consists of 6 layer ring-type PZT and 7 electrodes, combined bolts, nut and tinut. There are two main results: One is that FEM analysis should consider the effect the harmonic voltage input in order to meet the experimental results. The other is that the current wire bonder using exciting frequency of 136 kHz should be modified in order to improve the actuator and bonding performance because the actuator module has the main longitudinal mode of 145 kHz.

• 한국공작기계학회논문집
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• 제17권1호
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• pp.132-136
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• 2008

Axis of rotation error on rotary system are significant; such as the spindle radial error motion of a aligner, wire bonder and inspector machine which results in the poor state of manufactured goods. In this paper, the simple stage which consists of one PZT actuator and rotary encoder, is analyzed and measured by high resolution capacitance type displacement sensor. As the result of experiment, the paper discusses several issues that must be considered when designing rotary stage driven by PZT.

• JSTS:Journal of Semiconductor Technology and Science
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• 제2권4호
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• pp.246-252
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• 2002

Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, a piezoresistor is used to sense atomic force acting on tip, while in second cantilever, a piezoresistor is integrated to calibrate hysteresis and creep phenomena of the PZT cantilever. The fabricated PZT cantilevers provide high tip displacement of $0.55\mu\textrm{m}/V$ and high resonant frequency of 73 KHz. A new cantilever structure has been designed to prevent electrical coupling between sensor and PZT actuator and the proposed cantilever shows 5 times lower coupling voltage than that of the previous cantilever. The fabricated PZT cantilever shows a crisp scanned image at 1mm/sec, while the conventional piezo-tube scanner shows blurred image even at $180\mu\textrm{m}/sec$. The non-linear properties of the PZT actuator are also well calibrated using the piezoresistive sensor for calibration.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 하계학술대회 논문집
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• pp.161-164
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• 2001

In this paper, we investigated the dielectric and piezoelectric properties of Pb(Sb, Nb)O$_3$-Pb(Zr, Ti)O$_3$ ceramic(PSN) for piezoelectric transformer and actuator etc. Effect of MnO$_2$ addition on the PSN ceramic was investigated. Anisotropic properties of electromechanical coupling factor and piezoelectric properties proved to be varied with amount of MnO$_2$ impurity and sintering temperature. The electromechanical coupling factor k$_{p}$ of 0.38 and the mechanical quality factor Q$_{m}$ of 1944 were obtained from the specimen with 0.4 wt% MnO$_2$ sintered at 115$0^{\circ}C$ addition. Experimental results indicated that the PSN ceramic with MnO$_2$ impurity can be effectively used for piezoelectric transformer and actuator.tor.