• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2007.05a
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• pp.379-382
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• 2007

The MEMS (Micro Electro Mechanical Systems) process is used in a micro/nano pattern manufacturing method. This method is based on the lithography technology. But the MEMS process has some problems such as complicated process, long processing time and high production costs. Many researchers are doing research in substitute manufacturing method to work out a solution to these problems. In this paper, we apply a dieless incremental forming technology to a substitute method of MEMS process. This dieless forming technology is using in the commercial scale sheet forming such as a prototype of automobile sheet parts. 5-axes CNC (Computerized Numeric Control) method are applied in this system to get a micro-scale dieless forming results. These 5-axes system are composed of precision AC servo motor stages (4-axes) and PZT actuator (1-axis). A PZT actuator is used in a precision actuating axis because it can be operated in the nano scale stroke resolution. This micro dieless incremental forming system has the advantage of minimization in manipulating distance and working space. As equipment and tools become smaller in size, minute inertia force and high natural frequency can be obtained. Therefore, high precision forming performance can be obtained. This allows the factory to quickly provide the customer with goods because the manufacturing system and process are reduced. To construct this micro manufacturing system, many technologies are necessary such as high stiffness frame, high precision actuating part, structural analysis, high precision tools and system control. To achieve the optimal forming quality, the micro dieless forming system is designed and made with high stiffness characteristic.

• Journal of Biomedical Engineering Research
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• v.27 no.4
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• pp.143-153
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• 2006

The purpose of this work was to assess and quantify the beneficial effects of gas exchange, while testingto the various frequencies of the sinusoidal wave that was excited by the PZT actuator, for patients suffering from acute respiratory distress syndrome (ARDS) or chronic respiratory problems. Also, this paper considered a simulator to design a hollow type artificial lung, and a mathematical model was used to predict a behavior of blood. This simulation was carried out according to the Montecarno's simulation method, anda fourth order Runge-Kutta method was used to solve the equation. The experimental design and procedure are then applied to the construction of a new device to assess the effectiveness of the membrane vibrations. As a result, the vibration method is very effective in the increase of gas transport. The gas exchange efficiency for the vibrating intravascular lung assist device can be increased by emphasizing the following design features: consistent and reproducible fiber geometry, and most importantly, an active means of enhancing convective mixing of water around the hollow fiber membranes. The experimental results showed the effective performance of the vibrating intravascular lung assist device. Also, we concluded that important design parameters were blood flow rates, fiber outer diameter and oxygen pressure drop. Based on the present results, it was believed that the optimal level of blood flow rates was 200$cm^3$/min.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.17-17
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• 2009

Piezoelectric single crystals in the ternary MPB PMN-PZ-PT system with high $T_cs$ ($T_c$ > $200\sim300^{\circ}C$) and $E_cs$($E_c$>5~10 kV/cm) were fabricated by the cost-effective solid-state crystal growth (SSCG) technique. Chemically uniform PMN-PZT single crystals were successfully grown up to 60 mm by the SSCG method and their dielectric and piezoelectric properties characterized. Compared to Bridgman PMN-PT single crystals, the high $T_c/E_c$ PMN-PZT single crystals were found to exhibit a much wider usage range with respect to electric field as well as temperature, and thus become best candidates for medical transducers, actuators, and naval applications.

• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1544-1553
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• 2005

In this article, a micro cantilever array actuated by PZT films is designed and fabricated for micro fluidic systems. The design features for maximizing tip deflections and minimizing fluid leakage are described. The governing equation of the composite PZT cantilever is derived and the actuating behavior predicted. The calculated value of the tip deflection was 15 ${\mu}m$ at 5 V. The fabrication process from SIMOX (Separation by oxygen ion implantation) wafer is presented in detail with the PZT film deposition process. The PZT films are characterized by investigating the ferroelectric properties, dielectric constant, and dielectric loss. Tip deflections of 12 ${\mu}m$ at 5 V are measured, which agreed well with the predicted value. The 18 ${\mu}l/s$ leakage rate of air was observed at a pressure difference of 1000 Pa. Micro cooler is introduced, and its possible application to micro compressor is discussed.

• Journal of Sensor Science and Technology
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• v.28 no.1
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• pp.58-63
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• 2019

This research aims at designing a diaphragm made of SUS316L stainless steel for ultra high pressure sensors and evaluating its performance with a PZT driven deformation tester instead of high pressure chamber testing up to 100 MPa. Finite element method analysis indicates that the optimum thickness of a flat diaphragm is 1.5 mm not only to secure safety of sensors up to 100 MPa but also to enhance displacement measuring sensitivity. For this thickness, the maximum displacement at the center of the diaphragm is $5.3{\mu}m$. The PZT actuator must offer a force of 1,669 N to create a pressure of 100 MPa at the diaphragm surface in order to obtain a displacement of $5.3{\mu}m$. The performance evaluation by the PZT driven tester demonstrates nearly the same results as the same results as the sensors tested in the ultra high pressure chamber.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.49 no.5
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• pp.289-293
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• 2000

This paper presents a study on the linear compensation of nonlinear hysteric actuators using the highly magnetostrictive film pattern as a strain sensor. Elements had a hybrid structure, in which thin soft glass substrate with the highly magnetostrictive amorphous FeCoSiB film was bonded on the PZT piezoelectric substrate. The magnetostrictive film as a strain sensor detects the deflection of an actuator, and a voltage signal from the strain sensor related to the deflection of an actuator is used for the linear control of an actuator.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.31A no.3
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• pp.10-18
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• 1994

In this paper, the single round type and the multilayered type actuator using PZT powders were manufactured and their piezoelectric, displacement and time response characteristics were investigated. In the single round type actuator, the piezoelectric coefficient and the displacement increased with sintering temperature. In the multilayered actuator, the piezoelectric coefficient and the displacement increased with the layered number. In ten layered case, the piezoelectric coefficient and the displacement were higher over three times and six times than those of the single round type, respectively. At the voltage applied, the response velocity of the multilayered type was higher over two times than that of the single round type.

• Transactions of The Korea Fluid Power Systems Society
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• v.2 no.3
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• pp.6-11
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• 2005

A household gas valve is used for flow control of LPG(Liquefied Petroleum Gas) or LNG(Liquefied Natural Gas) of which pressure is about $200mmH_2O(\fallingdotseq\;0.0196[bar])$. Currently, two kinds of valves such as rotary type and button type are widely used in many applications. But, these valves have some problems that they are not controllable and reliable. Piezo actuation combined with modem microelectronics provides a reliable, quiet, low energy, infinitely adjustable gas valve. In this paper, gas valve using piezo actuator which are bimorph and a circle type was studied. Also, Prototype for gas valve was manufactured and characteristics of the prototype gas valve were analyzed.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.10
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• pp.869-872
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• 2007

In this study, in order to develop low temperature sintering ultrasonic nozzle, single-layer and multilayer ring-type piezoelectric actuators were manufactured using PMN-PNN-PZT ceramics, And then the electrical properties were investigated. A ring-type piezoelectric actuator was modeled by ATILA program using finite element method(FEM). The piezoelectric actuator dimension was $\Phi26.5$ (outer diameter), $\Phi12$ (inner diameter), 3.5 mm (thickness). By FEM analysis, resonant and anti-resonant frequencies were appeared as 56.7 kHz and 61.5 kHz. The displacement increased with the increases of the number of layer. Based on the result, ring-type multilayer piezoelectric actuators were manufactured at low co-firing temperature of $940^{\circ}C$. The resonant resistance decreased with the increases of the number of layer. And also, the capacitance increased with the increases of the number of layer. The mechanical quality factor (Qm) decreased with the increases of the number of layer.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.10a
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• pp.167-170
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• 2003

In this paper, the electromechanical displacements of curved actuators using laminated composites are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the carbon-epoxy and glass- epoxy as well as PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of composite is chosen as design factor.