• The Journal of the Acoustical Society of Korea
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• v.24 no.3
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• pp.127-132
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• 2005

Transducers for implantable hearing aids need to be small and to have good performance in frequency responses and vibration properties. From this viewpoint, we Proposed a multi-layer actuator with the piezoelectric single crystal, PMN-PT. for the implantable hearing aid. and verified its adequacy through finite element analyses and experiments. PMN-PT multi-layer actuator samples were fabricated by stacking fourteen layers of the PMN-PT crystal. Each layer were $0.2{\cal}mm$ thick and the actuator sample was $2.8{\cal}mm$ thick in total. We evaluated the performance of the PMN-PT actuator through impedance analyses and vibration displacement measurements, and compared the result with that of a PZT actuator. Results of all the process confirmed the feasibility of the PMN-PT actuator as a good transducer for an implantable hearing aid.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.317-321
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• 2002

Piezoelectric properties of $(Pb_{1-x}Y_x)[(Ni_{1/3}Nb_{2/3})_{0.15}(Zr_{1/2}Ti_{1/2)})_{0.85}]O_{3}$ (x=0~0.05) ceramics were investigated, The stoichiometric PNN-PZT ceramics required the sintering temperature above $1100^{\circ}C$, but the addition of $Y_{2}O_{3}$ in the PNN-PZT ceramic lowered the sintering temperature down to $1000^{\circ}C$. In case of x=0.005, the electro-mechanical coupling $factor(K_p)$, the piezoelectric $constant(d_{33})$, and the maximum strain ratio of PNN-PZT ceramics sintered at $1000^{\circ}C$ were 53.1%, 395pC/N, and $2200{\times}10^{-6}$ respectively, A 30-layer piezoelectric actuator$(10{\times}10{\times}1.7mm)$ fabricated with the above material showed the maximum strain of $2.09{\mu}m$ under 100V DC bias.

• Journal of the Korean Ceramic Society
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• v.42 no.11 s.282
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• pp.758-762
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• 2005

Gas valve for domestic use is used for flow control of LPG (Liquefied Petroleum Gas) or LNG (Liquefied Natural Gas) of which pressure is about $200\;mmH_{2}O(\fallingdotseq0.0196\;[bar])$. Currently, two kinds of valves such as rotary type and button type are widely used in many applications. But, these valves have some problems that they are not controllable and reliable. Piezo actuation combined with modem microelectronics provides a reliable, quiet, low energy, infinitely adjustable gas valve. In this paper, gas valve using piezo actuator which are bimorph and a circle type was studied. Also, Prototype for gas valve was manufactured and characteristics of the prototype gas valve were analyzed.

• Journal of the Korean Ceramic Society
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• v.50 no.6
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• pp.545-550
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• 2013

Piezoelectric PMN-29PT single crystal multilayer actuators [100 $mm^2$ in cross section and 22 mm in length] are designed and fabricated by stacking square plates [$10{\times}10{\times}0.5(t)\;mm^3$] of PMN-29PT single crystals having a $d_{33}$ of about 1,500 pC/N. The characteristics of PMN-29PT multilayer actuators are compared with those of P-025.40P multilayer PZT ceramic actuators [490 $mm^2$ in cross section and 60 mm in length] produced by PI in Germany. Even though the total volume of the PMN-29PT single crystal multilayer actuator is only about 7.5% of that of the P-025.40P ceramic multilayer actuator, PMN-29PT single crystal multilayer actuators are expected to show very similar properties to P-025.40P ceramic actuators in terms of static stroke and blocking force. Therefore, on the basis of their smaller mass and volume compared to the conventional PZT ceramic multilayer actuators, piezoelectric PMN-29PT single crystal multilayer actuators have significant potential regarding the development of various high performance actuators for aerospace subsystems.

• International Journal of Control, Automation, and Systems
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• v.3 no.3
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• pp.477-485
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• 2005

This paper is concerned with the development of a micro tensile testing machine for optically functional materials such as single or poly crystalline silicon and nickel film. This micro tensile tester has been developed for testing various types of materials and dimensions. PZT type actuation is utilized for precise displacement control. The specifications of the PZT actuated micro tensile testers developed are as follows: the volumetric size of the tester is desktop type of 710mm' 200mm' 270mm; the maximum load capacity and the load resolution in this system are IKgf and 0.0152mgf respectively and; the full stroke and the stoke resolution of the PZT actuator are $1000{\mu}m$ and 10nm respectively. Special automatic specimen installing and setting equipment is applied in order to prevent unexpected deformation and misalignment of specimens during handling of specimens for testing. Nonlinearity of the PZT actuator is compensated to linear control input by an inverse compensation method that is proposed in this paper. The strain data is obtained by ISDG method that uses the laser interference phenomenon. To test the reliance of this micro tensile testing machine, a $200{\mu}m$ thickness nickel thin film and SCS (Single Crystalline Silicon) material that is made with the MEMS fabrication process are used.

• Journal of Sensor Science and Technology
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• v.16 no.2
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• pp.120-125
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• 2007

The effect of $MnO_{2}$ as a sintering additive on the microstructures and the piezoelectric properties, especially mechanical quality factor, of 0.05 Pb$(Sb_{0.5}Nb_{0.5})O_{3}$-0.95 Pb$(Zr_{0.52}Ti_{0.48})O_{3}$ (PSN-PZT) piezoelectric ceramics was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the sample were examined using XRD and FE-SEM, respectively. A study on the influence of $MnO_{2}$ additives on the dielectric and piezoelectric properties showed that the $MnO_{2}$-added PSN-PZT system exhibited a high mechanical quality factor and well-situated piezoelectric properties. The optimized results of $d_{33}$ (319 pC/N), $k_{p}$ (55 %), and $Q_{m}$ (751.24) were obtained at 0.2 wt% $MnO_{2}$ added PSN-PZT piezoelectrics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1824-1827
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• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.3
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• pp.149-155
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• 2006

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested prototypes of TMDs for single-axis and dual-axis rotation, respectively. The single-axis TMD generates the static rotational angle of $6.1^{\circ}$ at 16 VDC, which is 6 times larger than that of single-axis TMA, $0.9^{\circ}$. However, the rotational response curve of TMD shows hysteresis due to the static friction between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is due to the static friction caused by the initial contact force of the PZT actuaor. Without the initial contact force, the rotational response curve of TMD shows linear voltage-angle characteristics. The dual-axis TMD generates the static rotational angles of $5.5^{\circ}$ and $4.7^{\circ}$ in x-axis and y-axis, respectively at 16 VDC. The measured resonant frequencies of dual-axis TMD are $2.1\pm0.1$ kHz in x-axis and $1.7\pm0.1$ kHz in y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by 16 Vp-p sinusoidal wave signal at room temperature.

• Journal of the Korean Society for Nondestructive Testing
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• v.26 no.4
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• pp.220-230
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• 2006

Fracture behavior of a monolithic PZT and a plate-type piezoelectric composite actuator (PCA) has been investigated under a bending load at three points by an acoustic emission (AE) monitoring. AE signal from a monolithic PZT at the maximum bending load shows the characteristics of high amplitude and long duration with a low frequency band of $100{\sim}230kHz$ which is confirmed by fast Fourier transform (FFT). For a PCA, it is concluded that AE signals with high amplitude over 80dB and low dominant frequency band of $170{\sim}223kHz$ emitted in the stage I are due to the brittle fracture in the PZT layer and the delamination between the PZT layer and the adjacent fiber composite layer. Based on the above analysis of AE behavior and damage observations with an optical microscopy and a scanning electron microscopy, AE characteristics related to fracture behavior of asymmetrically laminated PCA have been elucidated.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1326-1331
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• 2003

Thick PZT films are required for the cases of micro actuators and sensors with high driving force, high breakdown voltage and high sensitivity, and so on. In this work, thick PZT films were fabricated by Sol-Gel multi-coating method. Total 8 types of samples using thick PZT films with thicknesses, about $1{\mu}m$ and $2{\mu}m$, and Pt top electrodes shapes for measuring transverse piezoelectric coefficient ($e_{31,f}$) were fabricated using MEMS processes. They were characterized by fabricated e31,f measurement system before and after poling. $e_{31,f}$ values of samples after poling were higher than before poling. Those of $2{\mu}m$ thick PZT films were also higher than $1{\mu}m$ thick PZT films. And those with long electrodes as top electrodes were also higher than shorter.