• 한국소성가공학회:학술대회논문집
• /
• 한국소성가공학회 2008년도 춘계학술대회 논문집
• /
• pp.247-251
• /
• 2008

This paper presents a micro air pump actuated by PZT actuator (synthetic jet actuator) for air supply for micro fuel cells. The synthetic jet actuators are usually created by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, in/outlet channel and PZT diaphragms. To design the micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. A prototype of the micro air pump, with a size of $mm{\times}mm{\times}mm$, was fabricated by PDMS replication process and was conducted performance test. To control the PZT actuator, we used the SP4423 micro chips that can be amplified input voltage to reduce the controller size and the power consumption. With a voltage of 3V at 100Hz, the air pump's pumping pressure is 600pa and its power consumption is only 0.1mW.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1824-1827
• /
• 2005

For application to micro fluid control systems such as ${\mu}TAS$ (Micro Total Analysis Systems) and DDS (Drug Delivery Systems), it is very significant to handle precise and minute flow rates with low pressure pulsation. In this study, a novel valveless piezoelectric pump using peristaltic motion with three disk type PZT actuators is presented. The newly devised pump with an effective size of $70mm{\times}60mm{\times}55mm$ has three actuator layers connected in series from inlet to outlet. The PZT actuator has a maximum displacement of 240 ${\mu}m$ and a maximum force of 1.6 N. When the driving voltage for PZT actuators is sequentially applied with a certain phase shift, the pumping is performed by peristaltic motion of liquid volume. The working fluid is shut off without the driving voltage. Three methods for sequential driving are proposed and experimentally investigated. First and second methods utilize an intermittent sinusoidal waveform with phase shift of $90{\circ}\;and\;120^{\circ}$, respectively. Third method uses a rectangular waveform with phase shift of $90^{\circ}$. A controller with multi-phase shifter is designed and fabricated. Then, frequency and voltage-flow rate characteristics and load pressure-flow rate characteristics are experimentally investigated to verify the validity of the developed pump.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2007년도 춘계학술대회 논문집
• /
• pp.601-602
• /
• 2007

• 한국생산제조학회지
• /
• 제21권3호
• /
• pp.355-361
• /
• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, it has some intrinsic disadvantages such as backward flow, pulsation of flow, low repeatability and producibility, and high cost. To overcome these limitation, a PZT disc actuated micro pump including a novel ring-shaped multi-flap check valve is introduced. To enhance the performance of the micro pump, the static behaviour of flap valve module and the micro fluidic behavior of fluids are numerically modelled and analyzed. As results of the numerical analysis, the optimal dimension and configuration of the ring-shaped multi flap valve are $1{\times}0.05$ mm and 2 (inlet side)${\times}1$ (outlet side) type. The obtained maximum flow rates and flow resolution are about 90 ml/min and 30 ${\mu}l$/stroke respectively.

• 한국생산제조학회지
• /
• 제21권3호
• /
• pp.362-367
• /
• 2012

Though a micro pump is a crucial element in miniaturized bio-fluidic systems or drug delivery systems, most of the conventional micro pumps still have some limitations to miniaturize their controller system and to obtain the sufficient back pressure which can rise over the inner pressure of human body or experimental animals. In this paper, to overcome these limitation, a new PZT disc and its controller were designed and fabricated to get the sufficient flowrate and the back pressure with guaranteeing embeddability of the controller into pumping body. The amplitudes of the disc deflections were as large as 40 ${\mu}m$ at 200 V - 100 Hz condition. As results of experiments, the flow rate and the back pressure increase when the frequency increases. The obtainable maximum flow rate and back pressure are 5.2 ml/min at 95 Hz and 13.14 kPa at 90 Hz respectively.

• 소성∙가공
• /
• 제17권8호
• /
• pp.594-599
• /
• 2008

This paper presents a micro air pump based on the synthetic jet to supply reactant at the cathode side for micro fuel cells. The synthetic jet is a zero mass flux device that converts electrical energy into the momentum. The synthetic jet actuation is usually generated by a traditional PZT-driven actuator, which consists of a small cylindrical cavity, orifices and PZT diaphragms. Therefore, it is very important that the design parameters are optimized because of the simple configuration. To design the synthetic jet micro air pump, a numerical analysis has been conducted for flow characteristics with respect to various geometries. From results of numerical analysis, the micro air pump has been fabricated by the PDMS replication process. The most important design factors of the micro air pump in micro fuel cells are the small size and low power consumption. To satisfy the design targets, we used SP4423 micro chip that is high voltage output DC-AC converter to control the PZT. The SP4423 micro chips can operate from $2.2{\sim}6V$ power supply(or battery) and is capable of supplying up to 200V signals. So it is possible to make small size controller and low power consumption under 0.1W. The size of micro air pump was $16{\times}13{\times}3mm^3$ and the performance test was conducted. With a voltage of 3V at 800Hz, the air pump's flow rate was 2.4cc/min and its power consumption was only 0.15W.

• 센서학회지
• /
• 제10권4호
• /
• pp.232-238
• /
• 2001

본 논문에서는 Stereolithography 기술을 이용하여 마이크로 펌프를 제작했다. 펌프는 구동에 PZT를 사용하고, diffuser/nozzle 개념의 non-movable 밸브를 사용하여 제작했다. 펌프의 크기는 챔버$14mm{\psi}$, diffuser/nozzle의 크기는 좁은 쪽의 구멍은 $0.5mm{\psi}$, 넓은 쪽의 구멍은 $1mm{\psi}$로 제작하고, 챔버의 깊이는 1.2mm이다. 펌프는 주파수 100Hz, 인가 전압 $90{\sim}250Vp-p$ 사이에서 구동시켜, 그 동작을 확인했다. 측정 결과, 펌핑 용액이 에탄올 일 때, 인가 전압 200V, 100Hz로 구동했을 때, 53mm의 수두차를 나타냈다.

• Transactions on Electrical and Electronic Materials
• /
• 제9권5호
• /
• pp.181-185
• /
• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring. The pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving parts. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump is about 580 ${\mu}l/min$ in flow rate with the highest pressure level of 0.85 kPa, when the driving voltage is 150 $V_p$, 57 kHz.

• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 2005년도 춘계학술대회 논문집
• /
• pp.1087-1090
• /
• 2005

In precision machinery systems for medical and chemical applications, micropumps with a low pulsation have been demanded and investigated for accurate delivery of a small amount of liquid. This study proposes sheet type check valves instead of ball type check valves for PZT pumps and performs some tests on dynamics characteristics of check valves having different design parameter with variable frequency. The selected materials of check valves is NBR, PP film, Polyimide and Stainless steel(SUS304). In the experiment, dynamic characteristics of stainless steel thin plate have better performance than others.

• 한국광학회지
• /
• 제14권4호
• /
• pp.449-453
• /
• 2003

자이로스코프용 광대역폭 erbium 첨가 광섬유 광원에서 중심파장의 편광의존성을 억제하기 위하여 펌프광의 편광을 변조함으로써 스크램블링하는 방식을 사용하였다. 원통형 PZT에 광섬유를 감은 형태의 편광변조기에 적정진폭의 변조를 가함으로써 펌프광의 편광도(시간평균치)를 1.4%까지 낮출 수 있었다. 펌프 편광 스크램블러와 출력단 depolarizer를 함께 사용한 경우에 임의의 편광변화에 대한 광원의 중심파장 변화가 측정기의 측정한계(∼5 ppm) 이하로 관찰되었다.