• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.34-34
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• 2003

Piezoelectric or magnetostrictive materials, known as smart materials, have been researched widely for sensors or actuators in micro system technology. In our research, thick sol-gel lead zirconate titanate(Pb(Zr$\sub$1-x/Ti$\sub$x/)O$_3$) films were fabricated and their characteristics were investigated f3r angular rate sensor applications. The thickness of the PZT films is 1.5${\mu}$m, which is required by a vibration angular rate sensor for a good actuation and sensing. The remnant polarization of the PZT flms is 12.0 ${\mu}$C/$\textrm{cm}^2$. The electromechanical constants of PZT thin film showed the value of susceptance(B) of 4800${\mu}$ s at capacitance of 790pF. The PZT films were applied to the vibration angular rate sensor structure and the vibration of 1.78 ${\mu}$m in amplitude at the resonant frequency of 35.8㎑ was obtained by driving voltage of 5V$\sub$p-p/ of bulk piezoelectric materials with out of phase signal through voltage and inverting amplifier.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.3
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• pp.186-189
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• 2003

The role of excess Pb about the crystallization behavior and electrical properties in b(Zr$\sub$0.52/Ti$\sub$0.48/)O3(PZT) thin films has not been precisely defined. In this work, the effect of excess Pb content on the ferroelectric properties of these films was investigated. To analyze the effect, PZT films containing various amounts of excess Pb were Prepared. PZT thin films were deposited on the Pt/Ti bottom electrode by rf magnetron sputtering method and then they were crystallized by rapid thermal annealing (RTA). The experiment showed that all PZT films indicated perovskite polycrystalline structure with preferred orientation (111) and no pyrochlore phase was observed. As higher excess Pb was included, the films showed that value of leakage current shift from 2.03${\times}$10$\^$-6/ to 6.63 ${\times}$ 10$\^$-8/A/cm$^2$ at 100kV/cm, and value of remanent polarization shift from 8.587 ${\mu}$C /cm$^2$ to 4.256 ${\mu}$C/ cm$^2$. Electrical properties of PZT thin film affected by Pb excess content of target were explained to be caused of defect among space charges and defect grain boundaries.

• Journal of the Korean Ceramic Society
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• v.41 no.1
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• pp.30-35
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• 2004

PMW-PZT thick films of about $30{\mu}m$ thickness were fabricated on Pt/$TiO_2$/$SiN_x$Si substrate by the hybrid method of screen printing and PZT sol application. With the increase of the number of the sol application times, the sintered density and electrical properties of PMW-PZT thick films were evidently increased. For the PMW-PZT thick film with PZT sol application of 10-times, the dielectric constant ($\varepsilon_r$) was 745 at the frequency of 100 KHz and thepiezoelectric coefficient ($d_33$) was 155 pC/N at the applied pressure of 1 atm.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.05a
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• pp.88-88
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• 1998

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.33-33
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• 2003

• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.93-98
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• 1996

• Proceedings of the Materials Research Society of Korea Conference
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• 1992.05a
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• pp.43-43
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• 1992

• Proceedings of the Materials Research Society of Korea Conference
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• 2001.11a
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• pp.160-160
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• 2001

• Proceedings of the Materials Research Society of Korea Conference
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• 1994.05a
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• pp.104-104
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• 1994

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.06a
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• pp.40-41
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• 2006

In this work, we developed the 0-3 type piezoelectric composite to incorporate the advantages of both ceramic and polymer. The PVDF-PZT composites were fabricated with various mixing ratio by 3-roll mi11 mixer. The composite solutions were coated on ITO bottom-electrode deposited on PET (polyethylene terephthalate) polymer film by the conventional screen-printing method. After depositing the top-electrode of silver-paste, 4kV/mm of DC field was applied at $120^{\circ}C$ for 30min to poling the 0-3 composite film. The value of $d_{33}$ was increased as the PZT weight percent was increases. But the $g_{33}$ value showed the maximum at 65 wt% of PZT powder.