• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.213-213
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• 2016

현재 반도체 산업에서는 디바이스의 고 집적화, 고 수율을 목적으로 패턴의 미세화 및 웨이퍼의 대면적화와 같은 이슈가 크게 부각되고 있다. 다중 패터닝(multiple patterning) 기술을 통하여 고 집적 패턴을 구현이 가능해졌으며, 이와 같은 상황에서 각 패턴의 임계치수(critical dimension) 변화는 패턴의 위치 및 품질에 큰 영향을 끼치기 때문에 포토마스크의 임계치수 균일도(critical dimension uniformity, CDU)가 제작 공정에서 주요 파라미터로 인식되고 있다. 반도체 광 리소그래피 공정에서 크롬(Cr) 박막은 사용되는 포토 마스크의 재료로 널리 사용되고 있으며, 이러한 포토마스크는 fused silica, chrome, PR의 박막 층으로 이루어져 있다. 포토마스크의 패턴은 플라즈마 식각 장비를 이용하여 형성하게 되므로, 식각 공정의 플라즈마 균일도를 계측하고 관리 하는 것은 공정 결과물 관리에 필수적이며 전체 반도체 공정 수율에도 큰 영향을 미친다. 흔히, 포토마스크 임계치수는 플라즈마 공정에서의 라디칼 농도 및 식각 선택비에 의해 크게 영향을 받는 것으로 알려져 왔다. 본 연구에서는 Cr 포토마스크 에칭 공정에서의 Cl2/O2 공정 플라즈마에 대해 O2 가스 주입량에 따른 식각 선택비(etch selectivity) 변화를 계측하여 선택비 제어를 통한 Cr 포토마스크 임계치수 균일도 향상을 실험적으로 입증하였다. 연구에서 사용한 플라즈마 계측 방법인 발광분광법(OES)과 optical actinometry의 적합성을 확인하기 위해서 Cl2 가스 주입량에 따른 actinometer 기체(Ar)에 대한 atomic Cl 농도비를 계측하였고, actinometry 이론에 근거하여 linear regression error 1.9%을 보였다. 다음으로, O2 가스 주입비에 따른 Cr 및 PR의 식각률(etch rate)을 계측함으로써 식각 선택비(etch selectivity)의 변화율이 적은 O2 가스 농도 범위(8-14%)를 확인하였고, 이 구간에서 임계치수 균일도가 가장 좋을 것으로 예상할 수 있었다. (그림 1) 또한, spatially resolvable optical emission spectrometer(SROES)를 사용하여 플라즈마 챔버 내부의 O atom 및 Cl radical의 공간 농도 분포를 확인하였다. 포토마스크의 임계치수 균일도(CDU)는 챔버 내부의 식각 선택비의 변화율에 강하게 영향을 받을 것으로 예상하였고, 이를 입증하기 위해 각각 다른 O2 농도 환경에서 포토마스크 임계치수 값을 확인하였다. (표1) O2 11%에서 측정된 임계치수 균일도는 1.3nm, 그 외의 O2 가스 주입량에 대해서는 임계치수 균일도 ~1.7nm의 범위를 보이며, 이는 25% 임계치수 균일도 향상을 의미함을 보인다.

• Journal of the Korean earth science society
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• v.24 no.7
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• pp.604-613
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• 2003

The purpose of this study was to investigate the effect of a metastrategic activity on the development of student variable controlling abilities. Three groups of seventh graders at a middle-school in the City of Daegu participated in this study: a metastrategy activity group (ME), a problem-solving activity group (PR), and a control group (CO). The ME group was given metastrategy activity worksheets, which required students to monitor, control, and evaluate variable control strategies in a specified situation. The PR group was given problem-solving activity worksheets, which were needed to solve problems in various situations. The results were seen as follows. First, the metastrategy activity group showed better achievement (p<.05) and a longer standing effect (p<.01) than the other groups in the development of variable control ability. The problem-solving activity group was more effective than the control group (p<.05) in the development of variable controlled ability, but there was no lasting effect of the acquired ability. Second, the metastrategic activity group was more effective than the problem-solving activity group in finding fixed variables (p<.01), but not as effective in uncovering independent variables. What is not transferred to the development of the ability to find dependent variables.

• The Journal of the Korea Contents Association
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• v.20 no.6
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• pp.326-341
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• 2020

Based on theoretical background of Situational Theory of Problem Solving(STOPS), we have examined the role of STOPS variables on a group of online public in their issue recognition and communicative behavior on Korea's nationwide civil boycott movement of Japanese goods. Results from 524 survey cases from a Korea's major online community show that two independent variables(Problem Recognition, Referent Criterion) revealed positive in their effect on mediating variable(Situational Motivation in Problem Solving). Situational Motivation also revealed positive in its effect on six dependent variables(Information Forefending, Information Permitting, Information Forwarding, Information Sharing, Information Seeking, Information Attending) of Communicative Behavior. Involvement Recognition and Constraint Recognition revealed positive without proper statistical significance. As a result, study on the case of online public in Korea supports STOPS theory as high-level of Problem Recognition and Referent Criterion effects on Communicative Behavior in positive way via Situational Motivation. Implications from the findings have discussed and proposed suggestions for government public relations and further studies.

• The Journal of the Korea Contents Association
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• v.15 no.7
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• pp.460-476
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• 2015

The purpose of this study is to provide practical implications on government crisis management strategies and on the use of SNS in crisis management. Specifically, this study analyzed Ministry of Drug and Food Safety's responses to paraben toothpaste issue, media coverage of paraben toothpaste issue, and public responses to paraben toothpaste issue. Through textual analysis and the network analysis of 45 news articles and 645 tweets, this study found that Ministry used one-way communication strategy and mostly negative issues regarding Ministry's crisis response strategies were diffused via the media and Twitter. This study was meaningful in that it highlighted the importance of media relations and use of SNS in crisis management. The findings of this study provide useful implications for government officials and PR practitioners in their crisis management and communication strategy.

• Journal of Digital Convergence
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• v.12 no.12
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• pp.491-506
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• 2014

The purpose of this study is to examine the effect of expected perspective on the role of genre and attitude toward utilizing genre in broadcast ad on the liking of broadcast ad genre as appeal types of creativity. The results show that there is a significant correlation between macro-environmental expected perspective(MEEP) on the role of genre and a negative attitude toward utilizing genre in broadcast ad. A significant correlation between micro-practical expected perspective(MPEP) and a positive attitude was also found. Consumers with an integrated-situational expected perspective(ISEP) show a more significant relationship with the dual attitude. Consumes with a MPEP have a stronger liking on comparative ad and sex appeal ad, and consumers with an ISEP show a median liking. Consumers with positive attitude have a stronger liking on comparative ad and sex appeal ad, and consumers with a dual attitude show a median liking that is between the positive attitude-based consumers' and negative attitude-based consumers'.

• Proceedings of the Korea Contents Association Conference
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• 2009.05a
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• pp.884-888
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• 2009

Vehicular Adhoc Networks (VANET), a Vehicle-to-Infrastucture or Vehicle-to-Vehicle communication technology, is an area that makes more specific use of Mobile Adhoc Networks(MANET). VANET's Quality of Service(QoS) focuses on preventing possible emergencies like car crash from happening by immediately transmitting information to the cars around, while MANET's QoS is being studied for the quality of multimedia data such as Video on Demand(VoD), Video streaming, Voice over IP(VoIP), etc. In this paper, I structure the actual network configuration using Link State Routing(LSR), implement QoS Provisioning Model using Common Open Policy Service(COPS), and suggest more effective k-hop Cluster and inter-domain policy negotiation which fit better to the characteristics of VANET.

• Asian Journal of Turfgrass Science
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• v.17 no.1
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• pp.1-12
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• 2003

Research was Initiated to investigate germination characteristics of cool-season grasses (CSG). Several turfgrasses were tested in different experiments. Experiments I and III were conducted under a room temperature condition of 16$^{\circ}C$ to 23 $^{\circ}C$ and under a constant light condition at 25 $^{\circ}C$, respectively. An alternative environment condition that is a requirement for a CSG germination test by International Seed Testing Association (ISTA) was applied in the Experiment II, consisting of 8-hr light at 25 $^{\circ}C$ and 16-hr dark at 15 $^{\circ}C$. In each experiment, data such as early germinating vigor, germination speed and germination rate were evaluated. Six turfgrass entries were comprised of two varieties each from Kentucky bluegrass (KB, Poa pratensis L.), perennial ryegrass (PR, Lolium perenne L.), and tall fescue (TF, Festuca arundinacea Schreb.), respectively. Significant differences were observed in early germinating vigor, germination speed and germination rate. Early germinating vigor as measured by days to 70% seed germination was variable according to environment conditions, turfgrasses and varieties. It was less than 6 days in PR and 6 to 9 days in TF. However, KB resulted in 11 to 13 days under an alternative condition and 11 to 28 days under a room temperature condition. The germination speed was fastest in PR of 7 to 10 days and slowest in KB of 14 to 21 days. However, intermediate speed of 10 to 14 days was associated with TF. There were considerable variations in germination rate among turfgrasses according to different conditions. Generally, PR and TF germinated well, regardless of environment conditions. However, a great difference was observed among KB varieties, when compared with others. Under a room temperature condition, total germination rate was 71.0% in Midnight and 77.7% in Award. And it increased under an alternative condition, which was 81.7% and 91.7% in Award and Midnight, respectively. However, the poorest rate was found under a constant temperature condition, resulting in 18.0% in Award and 15.3% in Midnight. These results suggest that an intensive germination test required by ISTA be needed prior to the decision of seeding rate, including early germinating vigor and germination speed as well as total germination rate. KB is very sensitive to environment conditions and thus its variety selection should be based on a careful expertise.

• The Journal of the Korea Contents Association
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• v.16 no.7
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• pp.50-62
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• 2016

The aim of this study was to develop scale of test taker to affect on process of selection of college. The study procedures were performed as follow : establish of study model, item generation, verification of content validity, 1st and 2nd pilot test and verification of construct validity and reliability. In order to verification of validity and reliability, 230 freshman were surveyed and the data were analyzed by mean, standard deviation, skewness. kurtosis, Pearson correlation, Verimax factor analysis and Cronbach's ${\alpha}$. As result of factor analysis, the 15 factors(61 items) that explain 68.37% of the total variance were extracted and each factors were classified by attribution as follow : Information collection-mass media(4items), college activity (3items), support and environment(4items), education(5items), Influential person on decision making(3items), education quality(4items), education service(5items), reputation(3items), accessibility(2items), personal circumstances(2items), college's mass media(5items), promotion (4items), on-line(4items), person's PR (3items), College image(10items). Cronbach's ${\alpha}$ of total items was 0.916 and Cronbach's ${\alpha}$ of each factors were showed range between 0.694~0.878. Measurement scale of this study may be utilized to collect basic data be required to establish policy strategy of local college be faced with difficulty of admission recruitment.

• Koreanishche Zeitschrift fur Deutsche Sprachwissenschaft
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• v.2
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• pp.75-100
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• 2000

Das Ziel dieses Aufsatzes ist es, dass wir aile seit Lakoff(1965) als inchoative Verben angenommenen Konstruktionen aus Adjektiv + werden bzw. die dazu synonymen Verben nicht mehr unter eine Kategorie 'Inchoativ' subsumieren, und diese Konstruktionen mutatives(werden + dick), ingressives(werden + krank) und duratives Verb(werden + dicker) untergliedern, und $schlie{\ss}lich$ auf Grund dieser Analyse Vendlers 4 Situationstypen Zustand, Prozess, Accomplishmen und Achievement noch deutlicher spezifizieren. Mutative Verben sind rechtsbegrenzte Prozessverben, ingressive Verben linksbegrenzte Zustandsverben, und durative Verben nichtbegrenzte Prozessverben. In mutativen und durativen Verben wird der Vorgang als Kontinuum aufgefasst, und in ingressiven Verben wird der Vorgang als diskontinuierliche Aufeinanderfolge zweler $Zust\"{a}nde.\;\"{U}brigens$ haben mutative Verben obligatolisch Prozesscharakter und der Prozess bewirkt $Zustandsver\"{a}nderung$. Ingressive Verben haben nicht $prim\"{a}r$ Prozesscharakter, und $m\"{o}glicher$ Prozess $verl\"{a}uft$ innerhalb emes Zustandes. Es gibt also $gen\"{u}gend$ Motivation $daf\"{u}r$, werden bei allen drei Klassen in einheitlicher Weise zu beschreiben. Nach $g\"{a}ngiger$ Auffassung ist die Semantische Form(SF) von werden vom semantisch unmarkierten sein durch das telische $Pt\"{a}dikat\;_{BECOME}$ unterschieden. In diesem Aufsatz $ersetzt_{CHANGE}\;das\;Pradikat\;_{BECOME;}$ die Bedeutung von $von\;_{BECOME}$ ist eine der $m\"{o}glichen kontextabh\"{a}ngigen$ semantischen Anreicherungen $von\;_{CHANGE.\;CHANGE}$ ist unterbestimmt $bez\"{u}glich\;Telizit\"{a}t$ und Prozesshaftigkeit. $_{CHANGE}[P(X)]$ ist die Basis­bedeutungskomponente von werden in allen adjektivischen werden­Konstruktionen. Mit Hilfe von $Pr\"{a}dikaten\;_{CHANGE,\;TARG},\;und\;_{ATOM}$ bekommen wir die Beschreibung von $Markiertheitsverh\"{a}Itnissen$ zwischen den Situations­typen, die mit nur zwei semantischen Klassifizierungskomponenten(${\pm}Prozess,\;{\pm}Become$) nicht darzustellen sind. Veranderungssituationen sind $Nicht-Zust\"{a}nde$, markiert durch das $Pt\"{a}dikat\;_{CHANGE}.\;Ver\"{a}nderungs­situationen$ mit einem Ziel(TARG) sind Ereignisse. Eine Veranderung ohne Begrenzung ist ein Prozess. Achievements sind $atomare(_{ATOM})\;Ereignisse(_{TARG})$. Accomplishments sind durch TARG hinreichend charakterisiert, d.h. eine $zielbezogene(_{TARG})$ Veranderung, die nicht als $atomar(_{-ATOM})$ gekennzeichnet ist, ist ein Accomplishment.

• KOMUNHWA
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• no.65
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• pp.5-29
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• 2005

The purpose of this study is to understand a basic concepts and a series of individual processes for the planning of cultural heritage sites management in order to establish effective cultural heritage sites management plans in South Korea. In order to pr