• Title/Summary/Keyword: PLASMA SURFACE TREATMENT

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Characteristics and fabrications of high brightness organic light emitting diode(OLED) (고휘도 유기발광소자 제작 및 특성)

  • 장윤기;이준호;남효덕;박진호
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.11a
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    • pp.316-319
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    • 2001
  • Organic light emitting diodes(OLEDs) with a hole injection layer inserted between Indium-Tin-Oxide(ITO) anode and hole transport layer were fabricated. The effect of plasma treatment on the surface properties of Indium-Tin-Oxide(ITO) anode were studied. The electrical and optical characteristics of the fabricated organic light emitting diodes(OLEDs) were also studied. The diode including of plasma treated ITO substrate and the hole injection layer, which showed the luminance of 5280 cd/㎡ at 8 V

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Improvement of dyeability of cotton with natural cationic dye by plasma grafting

  • Haji, Aminoddin;Barani, Hossein
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2010.03a
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    • pp.29-30
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    • 2010
  • Cotton fabric is usually dyed with anionic dyes such as direct and reactive dyes. Naturally, there is no affinity for basic dyes to cotton fiber. In this study, to improve the dyeability of cotton fiber with cationic dyes, the fabric was pretreated with air plasma and grafted with acrylic acid to create acidic groups on the surface of cotton fibers. The grafted samples were dyed with natural cationic dye extracted from roots of berberis vulgaris. The effect of plasma treatment and grafting of acrylic acid on the color strength of cotton fabric was studied.

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O2 plasma를 이용한 Flexible ZnO nanogenerator 특성 향상 연구

  • Gang, Mul-Gyeol;Park, Seong-Hwak;Ju, Byeong-Gwon;Lee, Cheol-Seung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.283.1-283.1
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    • 2013
  • ZnO nanowire를 기반으로 하는 nanogenerator는 미세한 움직임을 전기 에너지로 변환 시키는 압전 에너지 하베스팅 기술로 기존 에너지 하베스터와 비교하여 사용환경의 제약이 적고, 소형화가 가능한 장점으로 주목을 받고 있다. 특히 혈류, 심장박동, 호흡 등 인체 활동 에너지를 이용한 발전 소자 등의 활용이 가능하여 활발한 연구가 진행되고 있다. 하지만, 최근 발표된 film like Vertical 구조의 nanogenerator는 nanowire의 구조 취약성으로 인해 내구성이 좋지 못한 단점이 있다. 또한 ZnO nanowire의 내부 O2 결함 및 표면 OH-기의 흡착에 의한 특성 저하가 나타난다. 본 연구에서는 nanogenerator의 내구성을 향상시키기 위해 capping layer로 실리콘 계 유무기 하이브리드를 적용하여 코팅 물질 및 코팅 방법을 최적화 하였으며 상부 전극을 CNT-Ag nanowire 소재로 대체하여 유연기판에 대응코자 하였다. 또한 APP(Atmosphere Pressure Plasma)와 ICP(Inductively Coupled Plasma)장비를 사용하여 ZnO nanowire를 표면처리하였고, 각각의 플라즈마 표면처리의 영향에 대해 조사하였다. XPS를 통하여 OH-기의 제거 유무를 확인하였으며, 소자의 발전 특성의 향상을 확인 하였다.

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A study on the improvement of TiN diffusion barrier properties using Cu(Mg) alloy (Cu(Mg) alloy 금속배선에 의한 TiN 확산방지막의 특성개선)

  • 박상기;조범석;조흥렬;양희정;이원희;이재갑
    • Journal of the Korean Vacuum Society
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    • v.10 no.2
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    • pp.234-240
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    • 2001
  • The diffusion barrier properties of TiN by using Cu(Mg) alloy film have been investigated. Cu(Mg) alloy film was deposited on air-exposed TiN film. Upon annealing, interfacial MgO of 100 $\AA$ has been formed due to the reaction of Mg with oxygen existed on the surface of TiN. Combined MgO/TiN structure prevented the interdiffusion of Cu and Si up to $800^{\circ}C$. To improve the adhesion of Cu(Mg) alloy film to the TiN, TiN layer was treated by $O_2$ plasma, followed by vacuum annealing at $300^{\circ}C$. It was found that increased oxygen on the surface of TiN film by plasma treatment enhanced segregation of Mg toward the interface, resulting in the formation of dense MgO layer. Improved adhesion characteristics have been formed through this treatment. However, increased power of $O_2$ plasma led to the formation of TiO$_2$ and decreased the Mg content to be segregated to the interface, resulting in the decrease in adhesion property. In addition, the deposition of 50 ${\AA}$ Si on the TiN enhanced the adhesion of Cu(Mg) alloy to TiN without deteriorating the TiN diffusion barrier characteristics.

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Characteristics of Low Dielectric Constant SiOF Thin Films with Post Plasma Treatment Time (플라즈마 후처리 시간에 따른 저유전율 SiOF 박막의 특성)

  • Lee, Seok Hyeong;Park, Jong Wan
    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.267-267
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    • 1998
  • The fluorine doped silicon oxide (SiOF) intermetal dielectric (IMD) films have been of interest due to their lower dielectric constant and compatibility with existing process tools. However instability issues related to bond and increasing dielectric constant to water absorption when the SiOF films was exposured to atmospheric ambient. Therefore, the purpose of this research is to study the effect of post oxygen plasma treatment on the resistance of moisture absorption and reliability of SiOF film. Improvement of moisture absorption resistance of SiOF film is due to the forming of thin SiO₂layer at the SiOF film surface. It is thought that the main effect of the improvement of moisture absorption resistance was densification of the top layer and reduction in the number of Si-F bonds that tend to associate with OH bonds. However, the dielectric constant was increased when plasma treatment time is above 5 min. In this study, therefore, it is thought that the proper plasma treatment time is 3 min when plasma treatment condition is 700 W of microwave power, 3 mTorr of process pressure and 300℃ of substrate temperature.

Water Repellent Finishes of Polyester Fiber Using Glow Discharge (글로우방전을 이용한 폴리에스테르섬유의 발수가공)

  • Mo, Sang Young;Kim, Gi Lyong;Kim, Tae Nyun;Chun, Tae Il
    • Textile Coloration and Finishing
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    • v.5 no.4
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    • pp.29-41
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    • 1993
  • In order to surface Hydrophobilization of Poly(ethylene terephthalate) (PET) fiber samples were treated in the atmosphere of CF$_{4}$ or $C_{2}$F$_{6}$glow discharge. The sample used in this study was PET film which is 75$\mu$m thick made by Teijin, O-Type(Japan). The cleaned samples were placed in plasma reactor made of pyrex glass cylinder, and plasma processing was carried out by glow discharge of CF$_{4}$ or $C_{2}$F$_{6}$ gas, being continuously fed by gas flow and continuously pumped out by a vacuum system. Electric power source for generate plasma state was sustained alternating current(60Hz) and voltage was sustained 600 volt. The duration of plasma treatment varied from 15 to 120 seconds except special case, the monomer gase pressure varied from 0.02 to 0.3 Torr and power range was 10 to 90 watts. The hydrophobic features of changed PET surface were evaluated by contact angle measurement and surface chemical characteristics were analyzed by ESCA. Results can be summerized as follows. 1. The most favorable setting position of substrate was the center area between the two electrodes. 2. $C_{2}$F$_{6}$ discharge current was lower than that of CF$_{4}$ when same voltage was sustained. Treated efficiency between CF$_{4}$ and $C_{2}$F$_{6}$ did not revealed significant differences under same electric power(wattage). 3. When monomer pressure is very low below 0.02 torr, as though substrate is exposed to CF$_{4}$ or $C_{2}$F$_{6}$ plasma, it tend to be hydrophilic through a little of fluorine bond and a great deal of oxidizing reaction. 4. There brought good hydrophobilization when monomer pressure was more 0.1 torr and duration of glow discharge treatment was over 45 seconds. When monomer pressure was too high, discharge current became low. Although prolong the duration, there was no more high hydrophobilization. 5. According to ESCA analysis, there were a little CF bond and a prevailing CF$_{2}$ bond in CF$_{4}$-treated substrate. There were CF$_{3}$, a little CF and a prevailing CF$_{2}$ bond in $C_{2}$F$_{6}$-treated substrate.d substrate.

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Microbial Inactivation of Grains Used in Saengshik by Corona Discharge Plasma Jet (코로나방전플라즈마제트를 이용한 생식용 곡류의 미생물 저감)

  • Youn, Geum-A;Mok, Chulkyoon
    • Korean Journal of Food Science and Technology
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    • v.47 no.1
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    • pp.70-74
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    • 2015
  • Inactivation of microorganisms in grains used for saengshik, a formulated health food, was attempted by corona discharge plasma jet (CDPJ). The initial microbial counts of the grains were in the range of $1.7{\times}10^3-9.9{\times}10^5CFU/g$. The CDPJ-inactivation effect was increased with electric current in the range of 1-1.5 A. Regarding span length between the tips of the electrodes and the treatment surface, the highest inactivation effect was observed at 25 mm. The inactivation pattern fitted well to the Singh-Heldman model. Bacteria were more labile to the CDPJ inactivation than yeasts and molds. Among tested grains, white rice showed the highest sterility followed by pressed barley and brown rice. Despite the inactivation by plasma, the thiobarbituric acid content of the grains remained unchanged over 10 min of treatment. Our results indicated the potential of the CDPJ treatment to improve the hygiene of saengshik products with no remarkable changes in lipid quality.

Removal of Humic Acid Using Titania Film with Oxygen Plasma and Rapid Thermal Annealing (산소플라즈마와 급속열처리에 의해 제조된 티타니아 박막의 휴믹산 제거)

  • Jang, Jun-Won;Park, Jae-Woo
    • Journal of Soil and Groundwater Environment
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    • v.12 no.3
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    • pp.29-35
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    • 2007
  • Titanium was oxidized with oxygen plasma and calcinated with rapid thermal annealing for degradation of humic acid dissolved in water. Titania photocatalytic plate was produced by titanium surface oxidized with oxygen plasma by Plasma Enhanced Chemical Vapor Deposition (PECVD). RF-power and deposition condition is controlled under 100 W, 150 W, 300 W and 500 W. Treatment time was controlled by 5 min and 10 min. The film properties were evaluated by the X-ray Photoelectron Spectroscopy (XPS) and X-Ray Diffraction (XRD). From the experimental results, we found the optimal condition of titania film which exhibited good performance. Moreover photocatalytic capacity was about twice better than thermal spray titania film, and also as good as titania powder.

Surface Characteristics of TiC Layer Formed on Ti Alloys by Plasma Ion Carburizing (플라즈마 이온 확산법에 의해 타이타늄 합금 표면층에 형성된 TiC층에 관한 연구)

  • Lee, Doh-Jae;Choi, Dap-Chon;Yang, Hyeon-Sam;Jung, Hyun-Yeong;Bae, Dae-Sung;Lee, Kyung-Ku
    • Journal of Korea Foundry Society
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    • v.27 no.4
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    • pp.179-183
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    • 2007
  • The TiC layer was formed on Ti and Ti alloys by plasma carburizing method. The main experimental parameters for plasma car boozing were temperature and time. XRD, EDX, hardness test and corrosion test were employed to analyze the evolution and material properties of the layer. The preferred orientation of TiC layers is (220) at treated temperature of $700^{\circ}C\;and\;880^{\circ}C$ However, it is changed to (200) at temperature of $800^{\circ}C$ The thickness of carbide layer increase with increasing carburizing temperature. Highest hardness of hardened layer formed on CP-Ti was obtained at the carburizing condition of processing temperature $880^{\circ}C$ and processing time 1080min. The corrosion potential of carburizing specimen was higher than untreated CP-titanium, and corrosion potential increased as carburizing temperature and time increased. Thus the corrosion resistance of CP-Ti was greatly enhanced after plasma carburizing treatment.

A Study of Shear Properties of Surface Treated Aluminum/CFRP Composites (표면처리된 알루미늄/CFRP 복합재의 전단특성에 관한 연구)

  • 양준호;지창헌;윤창선;이경엽
    • Proceedings of the Korean Society For Composite Materials Conference
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    • 2000.11a
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    • pp.75-78
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    • 2000
  • This study investigates the effect of surface treatment on the shear strength between aluminum panel and composite plate. The aluminum panel was surface-treated by DC Plasma and the composite Plate was surface-treated by ion beam. Lap shear test and T-peel test were performed to determine the shear strength and T-peel strength. Results showed that the shear strength of surface-treated case was 2.5 times higher than that of untreated case. The T-peel strength of treated case was more than 5 times higher than that of untreated case. SEM examination showed that the strength increase of surface-treated case was due to the more spread of epoxy to the panel.

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