• Proceedings of the KSME Conference
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• 2002.08a
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• pp.479-482
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• 2002

Riblets with longitudinal grooves along the streamwise direction have been used as an effective flow control technique for drag reduction. A flexible micro-riblet with v-grooves of peak-to-peak spacing of $300{\mu}m$ was made using a MEMS fabrication process of PDMS replica. The flexible micro-riblet was attached on the whole surface of a NACA0012 airfoil with which grooves are aligned with the streamwise direction. The riblet surface reduces drag coefficient about $7.9{\%}\;at\;U_o=3.3m/s$, however, it increases drag about $8{\%}\;at\;U_o=7.0m/s$, compared with the smooth airfoil without riblets. The near wake has been investigated experimentally far the cases of drag reduction ($U_o\;=\;3.3 m/s$) and drag increase ($U_o\;=\;7 m/s$). Five hundred instantaneous velocity fields were measured for each experimental condition using the cross-correlation PIV velocity field measurement technique. The instantaneous velocity fields were ensemble averaged to get spatial distribution of turbulent statistics such as turbulent kinetic energy. The experimental results were compared with those of a smooth airfoil under the same flow condition. The micro-riblet surface influences the near wake flow structure largely, especially in the region near the body surface

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.04b
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• pp.129-132
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}\;pa{\cdot}m^3/cm^2$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.5
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• pp.515-520
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• 2004

We report on the development of a Piezoelectric valvc that is designed to have a high reliability for fluid control systems, such as mass flow control, transportation and chemical analysis. The valve was fabricated using a MCA(multilayer ceramic actuator), which has a low consumption power, high resolution and accurate control. The fabricated valve is composed of MCA, a valve actuator die and an seat die. The design of the actuator dic was done by FEM(finite element method) modeling, respectively. And, the valve seat die with 6 trenches was made. and the actuator die, which possible to optimize control to MCA, was fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the scat/actuator die structure. PDMS(poly dimethylsiloxane) sealing pad was fabricated to minimize a leak-rate. It was also bonded to scat die and stainless steel package. The flow rate was 9.13 sccm at a supplied voltage of 100 V with a 50 % duty ratio and non-linearity was 2.24 % FS. From these results, the fabricated MCA valve is suitable for a variety of flow control equipments, a medical bio-system, semiconductor fabrication process, automobile and air transportation industry with low cost, batch recess and mass production.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.287-287
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• 2010

We report a new direct patterning method, called liquid bridge-mediated nanotransfer molding (LB-nTM), for the formation of two- or three-dimensional structures with feature sizes between tens of nanometers and tens of micron over large areas. LB-nTM is based on the direct transfer of various materials from a mold to a substrate via a liquid bridge between them. This procedure can be adopted for automated direct printing machines that generate patterns of functional materials with a wide range of feature sizes on diverse substrates. Arrays of TIPS-PEN TFTs were fabricated on 4" polyethersulfone (PES) substrates by LB-nTM using PDMS molds. An inverted staggered structure was employed in the TFT device fabrication. A 150 nm-thick indium-tin oxide (ITO) gate electrode and a 200 nm-thick SiO2dielectric layer were formed on a PES substrate by sputter deposition. An array of TIPS-PEN patterns (thickness: 60 nm) as active channel layers was fabricated on the substrate by LB-nTM. The nominal channel length of the TIPS-PEN TFT was 10 mm, while the channel width was 135 mm. Finally, the source and drain electrodes of 200 nm-thick Ag were defined on the substrate by LB-nTM. The TIPS-PEN TFTs can endure strenuous bending and are also transparent in the visible range, and therefore potentially useful for flexible and invisible electronics.

• Journal of Sensor Science and Technology
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• v.13 no.3
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• pp.230-235
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• 2004

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.

• Journal of the Korean Society of Clothing and Textiles
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• v.28 no.8
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• pp.1048-1056
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• 2004

Hydrophilicities of finished cotton fabrics were evaluated in respect of moisture regain and wickability. Changes in internal structure were determined using X-ray diffraction and surface changes in degraded samples were observed through a microscopy. Activated sludge test, soil burial test and enzyme hydrolysis were employed to evaluate the biodegradabilities. In addition, correlation analysis was done between biodegradability and the factors affecting biodegradability in each evalution methods. It was shown that hydrophilicities of silicone finished specimens were lower than that of untreated cotton and decreased in a row of PDMS(polydimethyl siloxane : -CH$_3$)＞AFS(amino functional siloxane ; -C$_3$H$_{6}$ NHC$_2$H$_4$NH$_2$)＞MHPS(methylhydrogen polysiloxane : -H, Cat : (C$_{17}$ H$_{35}$ COO)$_2$Zn) Although, moisture regain of mercerized cotton was higher than those of the others, wickability was shown to be lower. It was represented that crystalinities of cotton fabrics decreased by the silicone treatment. In activated sludge test and soil burial test, biodegradabilities of silicone treated specimens were lower than that of untreated cotton, where specimens of higher biodegradability exhibited higher biodegradability except mercerized ones. The results from enzyme hydrolysis, however, showed somewhat different tendency in that biodegradability was more closely related with the crystallinities of fabrics. It can be thought that enzyme hydrolysis is carried out for short time, physical accessibility becomes important.

• Transactions of Materials Processing
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• v.12 no.7
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• pp.640-646
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• 2003

The nanoprobe based on lithography, mainly represented by SPM based technologies, has been recognized as potential application to fabricate the surface nanostructures because of its operational versatility and simplicity. The objective of the work is to suggest new mastless pattern fabrication technique using the combination of machining by nanoindenter and KOH wet etching. The scratch option of the nanoindenter is a very promising method for obtaining nanometer scale features on a large size specimen because it has a very wide working area and load range. Sample line patterns were machined on a silicon surface, which has a native oxide on it, by constant load scratch (CLS) of the Nanoindenter with a Berkovich diamond tip, and they were etched in KOH solutions to investigate chemical characteristics of the machined silicon surface. After the etching process, the convex structure was made because of masking effect of the affected layer generated by nano-scratch. On the basis of this fact, some line patterns with convex structures were fabricated. Achieved patterns can be used as a mold that will be used for mass production processes such as nanoimprint or PDMS molding process. All morphological data of scratch traces were scanned using atomic force microscope (AFM).

• Smart Structures and Systems
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• v.9 no.6
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• pp.535-547
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• 2012

Controlling the balance of motion in a context involving a biped robot navigating a rugged surface or a step is a difficult task. In the present study, a $3{\times}5$ flexible piezoelectric tactile sensor array is developed to provide a foot pressure map and zero moment point for a biped robot. We introduce an innovative concept involving structural electrodes on a piezoelectric film in order to improve the sensitivity. The tactile sensor consists of a polymer piezoelectric film, PVDF, between two patterned flexible print circuit substrates (FPC). Additionally, a silicon rubber bump-like structure is attached to the FPC and covered by a polydimethylsiloxane (PDMS) layer. Experimental results show that the output signal of the sensor exhibits a linear behavior within 0.2 N ~ 9 N, while its sensitivity is approximately 42 mV/N. According to the characteristic of the tactile sensor, the readout module is designed for an in-situ display of the pressure magnitudes and distribution within $3{\times}5$ taxels. Furthermore, the trajectory of the zero moment point (ZMP) can also be calculated by this program. Consequently, our tactile sensor module can provide the pressure map and ZMP information to the in-situ feedback to control the balance of moment for a biped robot.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.1-5
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• 2022

We presented a micro hemi-sphere structure flexible film to improve the external quantum efficiency (EQE) in OLEDs. The micro hemi-sphere flexible film was fabricated with breath figure (BF) method and replica process. At 45 mg/mL of concentration, the size of the hemi-spheres was approximately 6.2 ㎛ were obtained which are the most circular shape. So, it was possible to yield the best performance with an improvement of 33 % in the EQE and the widest viewing angle ranging from 0° to 70°. As a result, the hemi-sphere film's size and distribution seem to play important roles in enhancing the EQE in OLEDs. Furthermore, the flexible hemi-sphere film based on polymeric materials could offer an effective, large-scale, mass-produced product and a simple process and approach to achieve high efficiency in flexible OLEDs.

• Membrane Journal
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• v.15 no.2
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• pp.157-164
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• 2005

In this study, composite hollow fiber membranes were developed for the recovery of olefin monomers in polyolefin industry off-gases. Polyetherimide (PEI) hollow fiber support membranes were fabricated from spinning solutions containing PEI, NMP and polyethylene glycol (PEG). The influence of dope solution and inner coagulant composition on the permeation properties and structure of hollow fiber supports was examined. PDMS was used as a selective layer and coated on PEI hollow fiber support. The thickness of active layer was controlled by changing coating solution concentration. The permeation properties of hollow fiber supports and composite membranes were characterized with a pure gas permeation test. The optimized composite hollow fiber membrane has $10\;{\mu}m$ selective layer and shows excellent separation performance; the ideal selectivity of olefins over nitrogen is in the following order: 1-butylene (6.4) > propylene (17) > ethylene (97), which selectivity data are similar to the intrinsic olefin/nitrogen selectivities of PDMS. This confirms that the new composite hollow fiber membranes suitable for olefin off-gas recovery has developed successfully.