Design, Fabrication and Characteristics of a MCA Valve |
Chung, Gwiy-Sang
(School of Information and System Engineering, Dongseo University)
Kim, Jae-Min (School of Information and System Engineering, Dongseo University) Yoon, Suk-Jin (KIST) Jeong, Soon-Jong (KERI) Song, Jae-Sung (KERI) |
1 | D. L. Polla, 'BioMEMS application in medicine', International Symposium on Micromechatronics and Human Science, pp. 13-15, 2001 |
2 | Nexes Task Force, 'Market analysis for micro-sys-tems 1996-2002', Http://www. nexus-emsto.com, pp. 4-5, 1998 |
3 | E. Thielicke and E. Obermeier, 'Microactuators and their technologies', Mechatronics, vol. 10, pp. 431-455, 2000 DOI ScienceOn |
4 | P. Muralt, 'PZT Thin films for micro-sensors and actuators: where do we stand?', IEEE Transection on Ultrasonics, Ferroetectronics, and Frequency control, vol. 47, no. 4, pp. 903-915, 2000 DOI ScienceOn |
5 | X. Wang, Z. Zhou, X. Ye, Y. Li, and W. Zhang, 'A PZT-driven micropump', International Symposium on Micromechatronics and Human Science, pp.269-271, 1998 |
6 | G. Caliano, N. Lamberti, A. lula, and M. Pappa-lardo, 'A piezoelectric bimorph static pressure sensor', Sensors and Actuators, vol. A 46-47, pp. 176-178, 1995 |
7 | T. Idogaki, T. Tominaga, K. Sanda, N. Ohya, and T.Hattoh, 'Bending and expending motion actuators', Sensors and Actuators, vol. A 54, pp. 760-764, 1996 |
8 | M. Sitti, D. Campolo, J. Yan, and R. S. Fearing, 'Development of PZT and PZN-PT based unimorph actuators for micromechanical flapping mecha-nisms', IEEE Int. Conf. Robotics and Automation, pp. 3839-3846, 2003 |
9 | I. Chakraborty, W. Tang, D. Bame, and T. Tang, 'MEMS micro-valve for space applications', Sensors and Actuators, vol. A 83, pp. 188-192, 2000 |
10 | N. T. Nguyen, S. Schubert, S. Richter, and W. Dotzel, 'Hybrid-assembled micro dosing system using sili-con-based micropump valve and mass flow sensor', Sensors and Actuators, vol. A 69, pp. 85-91, 1988 |
11 | L. Lo, M. Tsai, T. Tsia, C. Fan, C. Wu, and R.Huang, 'A silicon mass flow control micro system', Mecanique and Industries, vol. 2, pp. 363-369, 2001 DOI ScienceOn |