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http://dx.doi.org/10.5369/JSST.2004.13.3.230

Design, Fabrication and Characteristics of a MCA Valve  

Chung, Gwiy-Sang (School of Information and System Engineering, Dongseo University)
Kim, Jae-Min (School of Information and System Engineering, Dongseo University)
Yoon, Suk-Jin (KIST)
Jeong, Soon-Jong (KERI)
Song, Jae-Sung (KERI)
Publication Information
Journal of Sensor Science and Technology / v.13, no.3, 2004 , pp. 230-235 More about this Journal
Abstract
This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 seem at a supplied voltage of 100 V with a 50% duty cycle, maximum non-linearity was 2.24% FS and leak rate was $3.03{\times}10^{-8}pa{\codt}m^{3}/cm^{2}$. Therefore, the fabricated MCA valve is suitable for a variety of flow control equipment, a medical bio-system, automobile and air transportation industry.
Keywords
piezoelectric; valve; MCA; seat die; actuator die;
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