• 조명전기설비학회논문지
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• 제30권2호
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• pp.71-77
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• 2016

The dielectric barrier discharge (DBD) has low efficiency due to about 70% input power is consumed as thermal energy in the discharge space. However, because of the usage of DBD ozone generator is easier than other methods. The DBD ozone generator has been widely applied for high concentration ozone generation in the industrial application. But, the low-capacity compact DBD ozone generator is not applied so far. Therefore, the DBD ozone generator is necessary to improve ozone production efficiency and reduce the capacity. In this paper, the stainless steel pipe inner electrode was designed with hall type and screw type to improve the ozone production yield. The manufactured two inner electrodes were experimented with normal type for comparison of the discharge characteristics and the ozone generating characteristics. As the experimental results, the discharge current effective value of designed inner electrodes with hall type and screw type are higher than the normal type, due to unequal electric field is formed at the boundary. However, the difference of designed and original electrodes is less than 0.1mA that has no effect on the discharge characteristic. On the other hand, the screw type inner electrode increased higher than original model about 7 times when the flow rate of the oxygen source gas was increased from $0.6{\ell}/min$ to $1.0{\ell}/min$ The reason was assumed by the flow rate of the raw gas through the inner electrode was became fast that has a cooling effect. The designed hall type and screw type inner electrodes have shown good performances in ozone generation and ozone production that better than normal type in the same electrode surface area.

• 한국조명전기설비학회:학술대회논문집
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• 한국조명전기설비학회 2001년도 학술대회논문집
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• pp.135-138
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• 2001

Recently, ozone is utilized In various fields and its needs are expanding. therefore, so many ozone generation methods have been reported in the latest years, its main purpose Is to get the high ozone concentration and to improve the ozone yield. One of them is a plate-type ozone generator. In this paper, the plate-type ozone generator is piled up many folds(3 and 5 electrodes). Ozone concentration and yield were investigated in accordance with power, quantity of supplied gas and gap spacing of plate electrodes.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 추계학술대회 논문집 Vol.19
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• pp.22-23
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• 2006

A process for removal of photoresist(PR) m semiconductor manufacturing using water vapor with ozone is presented. For the realization of the ozone/vapor mixture process, high concentration ozone generator and process facilities have developed. As a result of the silicon wafer PR strip test, we confirmed the high efficiency PR strip rates of 400nm/mm or more at the ozone concentration of 16wt%/$O_2$. The ozone/vapor mixture process is more effective than the ozonized water Immersion process.

• 환경위생공학
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• 제15권2호
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• pp.27-32
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• 2000

The hydrolysis of pesticides by ozone was studied using the ozone generator manufactured for home appliance. Ozone was treated to remove the residual pesticides in the vegetables such as lettuce, cabbage, spinach and Japanses parsely. The experimental results were optimistic with removal efficiency of more than 50%, but its achievement depends on the operational hours of zone generator and chemical structures of pesticides. This report was determined as an optimal conditions for the removal rate of pesticides as follows: ozone input concentration in the contactor was $2mg/{\ell}$, ozone contact time was at least 30 min without washing vegetables, but it was OK at 10 min in case that number of washing increases.

• 반도체디스플레이기술학회지
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• 제4권4호
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• pp.13-17
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• 2005

The behavior of ozone in $NH_4OH$ was investigated to evaluate the solution as a cleaning chemical of the silicon wafer. The solubility of ozone in DI(Deionized) water increased as the oxygen flow-rate decreased and ozone generator power increased. Ozone in DI water showed solubility of 100 ppm or higher at room temperature. Ozone concentration was stabilized at the range of ${\pm}2ppm$ by controlling oxygen flow rate and ozone generator power. On the contrary, the solubility of ozone in $NH_4OH$ was very low and strongly depended on the concentration of $NH_4OH$ and pH. The redox potential of ozone was saturated within 10 minutes in DI water and decreased rapidly with the addition of $NH_4OH$. The behavior of ozone in $NH_4OH$ is well explained by redox potential calculation.

• 대한전기학회논문지
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• 제40권6호
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• pp.626-629
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• 1991

The negative wire of an electrolytic ozone generator, proposed by authors, has been contaminated by attaching the impurity particulate in tap water, which is called BUILD-UP phenomenon. The higher applied voltage and the larger wire diameter have shown the higher build-up rate, which makes the current reducing largely and concurrently the ozone production smaller. It is found that the positive electrode of the ozone generator has a strong SELF-CLEANING effect by detaching the impurity particulate from its surface, which, however, is used us a novel means of solving the build-up problem. As a result, the build-up problem can be solved effectively by applying an alternate square wave pulse voltage to the electrodes so as to get the self-cleaning ability on the both electrodes during each of the half pulse duration time.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권4호
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• pp.169-175
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• 2001

Ozone has been widely applied to many industrial fields because of its strong oxidation power, Therefore, the studies have been carried out for the methods on an effective and high concentration ozone generation. The silent or surface discharge type ozone generators have been mainly used for high concentration ozone generation in many fields of applications. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above ozone generators was proposed and fabricated for the high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrode was proposed and studied as a function of the widths output maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], for 0.3[mm] width and 0.8[mm] vacancy of the mesh electrode and gap spacing of 0.65[mm] respectively.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 학술대회 논문집 전문대학교육위원
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• pp.29-32
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• 2000

Ozone has been widely applied to many industrial fields because of its strong oxidation effects. Therefore, the studies have been progressed for the effective and high concentration of one generation. The silent or surface discharge have been mainly used for high concentration ozone generation until now. But these two types of ozone generators have shortcomings to be improved. In this study, the ozone generator which improved the shortcomings of above two type of ozone generators was proposed and manufactured for high concentration ozone generation. And the proposed ozone generator could generate the surface and barrier discharge simultaneously. For this purpose, a mesh type discharge electrodes were proposed and the experiments were fulfilled as a function of the widths and spacings of mesh electrodes and gap spacings between the dielectric barrier and mesh electrode. When the width of mesh electrode[WM] and spacing of mesh electrode[SM] are 0.3[mm] and 0.8[mm] respectively, the maximum ozone concentration of 2.96[vol%] was obtained at 5.6[kV], 830[mA], gap spacing (S)=0.65[mm].

• 연구논문집
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• 통권33호
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• pp.99-109
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DIW-$O_3$) in semiconductor wet cleaning process and photoresist stripping process to replace the conventional sulfuric acid and hydro peroxide mixture(SPM) method has been studied. In this paper, we propose the water-electrode type ozone generator which has the characteristics of the high concentration and purity to produce the high concentration DIW-$O_3$ for the photoresist strip process in the semiconductor fabrication. The proposed ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. Through this study, we obtained the results of the 10.3 wt% of ozone gas concentration at the oxygen gas of 0.5 [liter/min.] and the DIW-$O_3$ concentration of 79.5 ppm.. Through the photoresist stripping test using the produced DIW-$O_3$, we confirmed that the photoresist coated on the silicon wafer was removed effectively in the 12 minutes.

• 한국대기환경학회지
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• 제19권1호
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• pp.77-84
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• 2003

HS, Ammonia, CH$_4$, VOCs, Microorganism, Bacteria etc produced from swineries or henhouses are known to prevent the growth of livestock. Moreover, they give an unpleasant feeling to the workers. In this study, a methodology to remove odors and toxic gases by oxidation of ozone was thus accomplished. However, most ozone generators which use the atmospheric surrounding air have problems of contamination of electrode for discharge. Therefore in this work, a wire-cylinder type plasma reactor with DC voltage has been used both in a laboratory scale test and in the real swinery to solve the existing problems. About 6 cm of electrode gap could decrease the attachment of dusts, humid aerosols and other polymers, which are contained in the air. This compact designed device could produce ozone to oxidize and remove the air pollutants. But the amount of ozone was not large enough to be harmful to human Health. Also, the concentration of ozone was able to be varied by the input voltage. which makes it available for the proposed system to be installed in various kinds of pig houses. With this device, at maximum 43 mg/㎥ (20 ppm) of ozone could be produced at 40 ㎸ input voltage (consumed energy was 0.1 Wh/㎥). A program was also made in this work to calculate the optimum parameters for design of a plasma reactor in wide range of conditions.