• 한국환경과학회지
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• 제22권8호
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• pp.937-944
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• 2013

Ozone concentrations in water and air, and resulting disinfective properties, were measured following generation by either an ozone generator or a low-temperature dielectric barrier discharge plasma generator. In freshwater, ozone concentrations of 0.81 and 0.48 mg/L $O_3$ were observed after the ozone and plasma generators had been operated for five minutes, respectively. Higher levels of dissolved $O_3$ were attained more easily with the ozone generator. In seawater, both systems were capable of creating concentrations greater than 3.00 mg/L $O_3$ after 5minutes of operation. Higher ozone levels were attained more easily in seawater than in freshwater. Rates of bacterial sterilization in seawater after three minutes were 96% and 88%, using the plasma and ozone generators, respectively. In freshwater, higher concentrations of ozone were released into the atmosphere by the ozone generator than by the plasma generator. In creating equivalent levels of dissolved ozone in freshwater, the plasma generator released 4.5 times more ozone into the atmosphere than did the ozone generator. This shows that ozone generators are more effective than plasma generators for creating ozonated water. For the same concentration of dissolved ozone in seawater, more ozone was released into the atmosphere using the ozone generator than using the plasma generator. Therefore, with regard to air pollution, plasma generators seem to be less expensive than ozone generators.

• 대한전기학회논문지
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• 제38권8호
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• pp.650-657
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• 1989

The conversion efficiency of an ozone generator can be significantly improved by modifying the discharge electrode of a helical strip line rod-to-cylinder type ozone generator to a pyramid-project-embossed rod, and by using a pulse corona discharge. Parametric studies have been carried out to obtain optimum values of peak pulse voltage, pulse forming capacitance, feeder cable and ozone generator capacitance, interelectrode spacing and corona tip density of ozone generator, and feed air flow rate and temperature. The generated ozone concentration was very dependent upon the value of pulse forming capacitance, feeder cable and ozone generator capacitance, and corona tip density. Maximum conversion efficiency was obtained with a pulse forming capacitance of about 500pF, 75pF matched feeder cable and ozone generator, and a corona tip density of 16mm. When operated at optimum values, ozone yield of 79, 99, 80 g/KWh for the different interelectrode type ozone generators tested were obtained, which are approximately 30% higher than that of an industrial ozone generator.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1410-1412
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• 1995

A high efficiency ozone generation using both of a electrode-edge discharge and a dielectric-harrier discharge from a modified silent type ozone generator has been proposed and studied for small scale applications. It is found that the output ozone concentration of the proposed generator depended greatly upon the air gap spacing and the applied power frequency and voltage on the ozone generation. The ozone generator showed higher ozone concentration than the same size of the ceramic type surface ozone generator(Masuda type one). And, it is found that the generator had a potential to be used as an ozone generator for small scale applications.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제52권12호
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• pp.579-585
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• 2003

Recently the utilization of the ozone dissolved de-ionized water(DI-O3 water) in semiconductor wet cleaning process to replace the conventional RCA methods has been studied. In this paper, we propose the water-electrode type ozone generator which has the ozone gas characteristics of the high concentration and high purity to produce the high concentration DI-O3 water for the silicon wafer surface cleaning process. The ozone generator has the dual dielectric tube structure of silent discharge type and the water is both used to electrode and cooling water. We investigate the performance of the proposed ozone generator which has the design goal of the concentration of 7[wt%] and ozone generation quantity of 6[g/hr] at flow rate of 1[$\ell$/min). The experiment results show that the water electrode type ozone generator has the characteristics of 8.48[wt%] of concentration, 8.08[g/hr] of generation quantity and 76.2[g/kWh] of yield and it's possible to use the proposed ozone generator for the DI-O3 water cleaning process of silicon wafer surface.

• 전기학회논문지P
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• 제50권3호
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• pp.125-129
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• 2001

ln this paper, a ozone generator using superimposition of silent discharge has been designed and manufactured. This type ozone generator is equipped with three electrodes and two gaps. Ozone is generated by superimposition of silent discharge, which is respectively come from two gaps. The maximum values of ozone concentration, ozone generation flow and ozone energy field were obtained 4,750[ppm], 2.37[g/h], 102.3[g/kWh]. Also, the result of reaction of 1,8921ppm] ozone and the sampling water from the lake, the water quality was improved from IV grade to In grade, and obtained 100[%] sterilization rate of Escherichia coli within 5.0(min).

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권12호
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• 조명전기설비학회논문지
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• 제26권5호
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• pp.85-90
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• 2012

In this paper, it was investigated experimentally that diameter and polarity variation of corona wire electrode affected to ozone generation of the ozone generator using a wire-to-plate type electrode. The change in the diameter(D) of the corona wire electrode has a great effect upon ozone generation, higher influence appears in the positive corona discharge than the negative corona discharge. In the case of D=0.50[mm], maximum ozone generation and power efficiency could be obtained. However, in the case of smaller D than this, the ozone generation and efficiency decreases slowly and in the case of larger D, the ozone generation decreases rapidly. It means performance decline as an ozone generator. Therefore, ozone generation and power efficiency would increase through simple optimization of the corona electrode specification.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1993년도 하계학술대회 논문집 B
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• pp.648-651
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• 1993

A parallel plate type electrolytic ozone generator for ozone asher has been fabricated and studied, and 4 kinds of ozone generation anode electrode having different slits have also been investigated. It is found that there were optimum conditions for the slits of electrode, which, however, controls the field in the interelectrode spacing, and allows sideflow waterpaths through the slits in the electrode. As a result, the generated ozone concentrations of A, B, C and D type electrode showed 2.2, 1.3, 1.5 and 3.0 ppm for 400 ml/min flowrate tap water test, and, ozone yields of 11, 13, 15 and 30 $mg/kWhcm^2$ respectively.

• 한국정밀공학회지
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• 제28권10호
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• pp.1217-1223
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• 2011

In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

• 환경위생공학
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• 제15권3호
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• pp.70-74
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• 2000

The technology of malodorous substances treatment was classified physical separation and chemical destruction. This study was carried out to investigate the characteristics of malodorous substances treatment with the change of operating conditions from the ozone generator. The major results of this study were as follows : Removal efficiency by additive ozone rate was measured $NH_3$:95%(ozone additive rate : 2), $H_2S$ : 97%(ozone additive rate:4), $CH_3SH$ : 96%(ozone additive rate : 3), $(CH_3)_2S_2$ : 97%(ozone additive rate:5), $(CH_3)_3N$ : 95%(ozone additive rate : 1), $CH_3CHO$ : 95%(ozone additive rate : 2), $C_6H_5CHCH_2$ : 95%(ozone additive rate : 2).