• 제목/요약/키워드: Ozone($O_3$)

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Property Variations of ZnO-based MOS Capacitor with Preparation Conditions (ZnO를 사용한 MOS 커패시터의 제작 조건에 따른 특성 변화)

  • Nam, H.G.;Tang, W.M.
    • Journal of the Semiconductor & Display Technology
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    • v.9 no.3
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    • pp.75-78
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    • 2010
  • In this study we investigated the electrical properties of ZnO-based MOS capacitor with $HfO_2$ as the gate dielectric. MIM capacitor, which uses either $HfO_2$ or $Al_2O_3$ as the dielectric layer, is also studied to understand the dependency of the dielectrics on the preparation conditions. It was found that thinner $HfO_2$ films yield better electrical properties, namely lower leakage current and higher breakdown electric field. These properties were observed to deteriorate when subsequently annealed. Capacitance in the depletion region of MOS capacitor was found to increase with UV ozone treatment time up to 60min. However, when the treatment time was extended to 120min, the trend is reversed. The 'threshold voltage' was also observed to positively shift with UV ozone treatment time up to 60min. The shift apparently saturated for longer treatment.

The $Al_2O_3$ Passivation Mechanism for c-Si Surface Deposited by ALD Using $O_3$ Oxidant

  • Jo, Yeong-Jun;Jang, Hyo-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.320.1-320.1
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    • 2013
  • We have investigated the effect of surface passivation for crystalline silicon solar cell using ozone-based atomic layer deposited (ALD) $Al_2O_3$. We examined passivation properties such as uniformity, carrier lifetime, thickness, negative fixed charge density at AlOx/Si interface, and reflectance. The influences of process temperature and heat treatment were investigated using microwave photoconductance decay (PCD). Ozone-based ALD $Al_2O_3$ film shows the best carrier lifetime at lower deposition temperature than $H_2O$-based ALD.

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Photochemical Analysis of Ozone Episodes in the Metropolitan Area of Seoul During the Summer 2004 (2004년 여름 서울에서 발생한 고농도 오존 사례의 광화학적 분석)

  • Shon, Zang-Ho
    • Journal of Korean Society for Atmospheric Environment
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    • v.22 no.3
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    • pp.361-371
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    • 2006
  • This study examines ozone episodes occurred during the intensive sampling periods (Jun. 1-30, 2004) in the air of Seoul metropolitan area. During that period, there were 8 events (or days) in which 1 hr averaged ozone concentrations were greater than 100 ppbv. The photochemical analysis of ozone chemistry (i.e., budget and formation and destruction strengths of ozone) was carried out using a photochemical box model. Peaks in diurnal ozone variations during ozone episode periods occurred were concurrent with the sudden change of the slope of $NO_{2}/NO$ ratio, suggesting significant correlation with photochemical reactivity. In addition, the ozone peaks were concurrent with high concentrations of ozone precursors, peroxy radicals of $HO_{2},\;CH_{3}O_{2},\;and\;RO_{2}$. High ozone levels during the ozone episodes are likely to be affected by ozone destruction rate.

Studies on the Effects of Ozone Gas in Paddy Rice;II. Effect of Ozone Gas on Varieties of Rice (수도생육(水稻生育)에 대(對)한 Ozone가스의 영향(影響)에 관(關)한 연구(硏究);제2보(第2報) Ozone가스에 대(對)한 수도품종별(水稻品種別) 영향(影響))

  • Kim, Bok-Young;Kim, Sun-Kwan;Kim, Bok-Jin
    • Korean Journal of Environmental Agriculture
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    • v.1 no.2
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    • pp.129-133
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    • 1982
  • This study was conducted to find out the resistance of rice varieties to ozone gas. Thirty eight rice varieties were exposed to 0.3 ppm $O_3$ gas for 3 hours. Damage symptom, percentage of destroyed leaf and chlorophyll contents were observed after $O_3$ fumigation. The results obtained are as follows. 1) Typical symptom of $O_3$ damage appeared to greyish subtle spots in Japonica type and redish brown subtle spots in Indica-Japonica hybrid type within rice leaf vein. 2) Resistant varieties to $O_3$ gas were Palgwangbyeo, Seokwangbyeo and Milyang 30, while sensitive ones were Gwanakbyeo, Jinjubyeo and Hankangchalbyeo. 3) Chlorophyll damage of rice leaves were higher in Nongbaeck, Dobongbyeo, Palgeum, Jinjubyeo than in Milyang 21, Podgwangbyeo, Josaeongtongil, Honamjosaeng, Hwanggeumbyeo. 4) The amount of chlorophyll damage showed highly significant positive correlation with that of leaf destruction.

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UV/ozone Cleaning Processes for Organic Films on Si Studied by in-line XPS and AFM (in-line XPS와 AFM을 이용한 유기물의 UV/ozone 건식세정과정 연구)

  • 이경우;황병철;손동수;천희곤;김경중;문대원;안강호
    • Journal of the Korean Vacuum Society
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    • v.4 no.3
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    • pp.261-269
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    • 1995
  • 본 실험에서는 실리콘 웨이퍼 위에 photoresist(PR)와 octadecyltrichlorosilane(OST, CH3((CH2)17SiCI3)를 입혀서 UV/zone 처리를 어떻게 유기물질들이 UV/zone과 반응하여, 어떻게 표면에서 제거되는지를 in-line으로 연결된 XPS로 분석하고 반응시킨 표면들의 거칠기(roughness)를 AFM을 이용하여 관찰하였다. 실험결과 상온에서 UV/zone 처리를 했을 경우, PR과 OTS같은 유기물질이 표면에서 산화되는 것을 알 수 있었으나 이들이 제거되지 않고 표면에 그대로 남아있음을 알 수 있었다. 그러나 가열하면서(PR:$250^{\circ}C$, ORS:$100^{\circ}C$)UV/ozone 처리를 하였을 경우 표면에서 산화됨과 동시에 이들 산화물들이 표면에서 제거됨을 알 수 있었다. XPS 분석으로부터 이들의 산화반응물은 PR과 OTS 모두 -CH2-, -CH2O-, =C=O, -COO-를 가지는 것으로 나타났으며, 열에너지에 의해서 이들이 표면에서 제거되는 것으로 나타났다. AFM 분석결과는 상온에서 UV/ozone 처리를 하였을 경우에 표면의 거칠기가 적은 반면, 가열하면서 UV/o-zone처리를 하였을 경우에는 표면의 거칠기가 다소 증가하였다.

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A Study of Ozone Photochemistry in Different Physico-chemical Properties of Air Masses around the Mexico City Metropolitan Area (MCMA) Using Aircraft Observations in 2006 (항공관측자료를 이용한 2006년 멕시코시티 주변 기류의 물리-화학적 성질에 따른 오존의 광화학적 특성 연구)

  • Song, Sang-Keun;Shon, Zang-Ho;Kim, Yoo-Keun
    • Journal of Korean Society for Atmospheric Environment
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    • v.26 no.2
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    • pp.118-136
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    • 2010
  • Photochemical characteristics of ozone ($O_3$) and its precursors such as $O_3$ budget and $O_3-NO_x$-VOC sensitivity were analyzed in different physico-chemical properties of air masses around the Mexico City Metropolitan Area (MCMA) using aircraft observations during March 2006. The physico-chemical properties of air masses were categorized into 5 groups: boundary layer (BL), biomass burning (BB), free tropospheric continent (FTCO) and marine (FTMA), and Tula industrial complex (TIC). Results from the $O_3$ budget analysis indicated that $O_3$ production for BL, FTCO, and FTMA (for BB and TIC) was mainly controlled by a photochemical production pathway, a reaction of NO with $HO_2$ (with $RO_2$), while the main pathway of photochemical $O_3$ destruction for BL, FTCO, and FTMA (for BB and TIC) was a reaction of $HO_2$ with $O_3$ (of $H_2$ with $O^1$(D)). In addition, most of air mass categories (especially FTCO) were estimated to be $NO_x$-sensitive for $O_3$ production with lower $NO_y$, higher ratios of the other indicator species (e.g., $O_3/(NO_y-NO_x$), $H_2O_2/HNO_3$, etc.), and the lower removal rate of radicals ($\leq$0.5) by the reaction of OH with $NO_2$ than those of the VOC-sensitive condition.

Decomposition Characteristics of Dissolved Organic Compounds in the Landfill Leachate by Ozone Oxidation (오존산화에 의한 매립지 침출수내 용존성 유기화합물의 분해 특성)

  • 정승현;이헌모;정병곤
    • Journal of environmental and Sanitary engineering
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    • v.18 no.1
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    • pp.23-29
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    • 2003
  • The effect of ozone oxidation on bio-degradability of leachate was studied. Ozone oxidation process was used as pre-treatment process to enhance performance of biological process in treating landfill leachate. Optimum ozone injection rate and contact time in this experiment was $160{\;}mg{\;}O_/{\ell}{\cdot}hr$ and 45 minutes, respectively. Bio-degradability was enhanced 5.08% by ozone oxidation. The ratio of ozone demand/DOC concentration was $0.049~0.091{\;}mg{\;}O_3/mg{\;}DOC$. The increase of bio-degradability depending on ozone injection rate(D) and contact time(T) can be expressed as follows ; The rate of bio-degradation of DOC was increased proportionally with the increase of ozone injection rate and contact time irrespective of landfill site age. The increase of bio-degradability by ozone addition was not satisfactory. It is hard to expect significant increase in bio-degradability by ozone treatment only. Thus, it is evaluated that ozone oxidation can not increase biodegradability significantly in concentrated wastewater composed of complex organic compound such as leachate.

Ozone: Changing Anthracnose (caused by Colletotrichum acutatum) Severity and Accelerating Hypersensitive Response in Pepper

  • Yun Sung-Chul;Kim Bo-Sun;Cha Ah-Reum;Pack Jong-Pil
    • The Plant Pathology Journal
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    • v.22 no.3
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    • pp.271-277
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    • 2006
  • The interaction effects of ozone $(O_3)$ and anthracnose (Colletotrichum acutatum) disease were examined in green fruits and seedlings of pepper (Capsicum annuum). Pre-treatment with $(O_3)$ as a factor causing predisposition to the disease prior to infection was investigated in green fruits and stems using an $(O_3)$ concentration of 150 nL/L, which is easily reached in summer in Korea. $(O_3)$ treatment increased antioxidative responses in pepper foliar tissues, and defense against anthracnose was examined in fruits and stems. Anthracnose severity on stems of the $O_3-treated$, ozone-sensitive 'Dabotop' cultivar was always lower than that on untreated plants, but the difference was not always significant (p=0.147). Significantly lower anthracnose severity was found on $O_3-treated$ green 'Dabotop' fruits as compared to untreated green fruits in three of eight replicate experiments. In contrast, hypersensitive responses in 03treated seedlings were significantly accelerated compared to those in untreated seedlings by about 7.8 h (p<0.001). This confirmed previous evidence of increased transcription of plant defense genes with $(O_3)$ treatment. $(O_3)$ treatment significantly decreased chlorophyll concentrations in the leaves in four replicate experiments (p<0.01). $(O_3)$ increased hypersensitive responses in the leaves of pepper seedlings, but this increase did not contribute to the control of anthracnose severity on fruits. Antioxidant reactions to $(O_3)$ were limited to chlorosis and changes in hypersensitive responses in leaves.

The Influences of 5ea Breeze on Surface Ozone Concentration in Pusan Coastal Area, Korea (부산 연안역의 오존 농도에 미치는 해풍의 영향)

  • 김유근;이화운
    • Journal of Environmental Science International
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    • v.5 no.3
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    • pp.265-275
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    • 1996
  • Air pollution characteristics and the influence of sea breeze on surface ozone concentration were studied using the data measured at 7 air quality continuous monitoring stations from June to September using 3 years (1990, 1993, 1994) in Pusan coastal area. Among the 246 sea breeze days for research Period, there were approximately 89 sea breeze days (36%) from lune to September, And there were 120 the episode days (68%) of ozone greater than or equal to 60 ppb in summer season. In 89 sea breeze days, the episode day was highly marked as 56 days (63%). So, we knew that the sea breeze greatly affects the occurence of ozone episode day. the ozone concentration under the condition of the sea breeze increase about 40% in the daytime. Frequencies distribution of $O_3$ concentration for sea breeze moved toward high concentration class. The characteristics of ozone concentration in relation to meteorological conditions of sea breeze is significant because we can discover major weather factors for eastablishing an air pollution- weather forecast system. For further. study about meterological approach method for photochemical air pollution, it is necessary to explain the characteristics of atmosphere below 1, 000 m, especially concerning the formation mechanism of inversion layers. And finally, we will study the relationships to synoptic weather conditions and vertical structure and diurnal variation of local wind systems including sea breeze, and the vertical movements of atmosphere in the city.

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