• Title/Summary/Keyword: Oxygen plasma treatment

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Oxidative Line Width Reduction of Imprinted Nanopatterns

  • Park, Dae Keun;Kang, Aeyeon;Jeong, Mira;Lee, Jaejong;Yun, Wan Soo
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.02a
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    • pp.650-650
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    • 2013
  • Although imprinted nanopatterns of organic polymer can be modified by the heat treatment [1], it generally requires high process temperatures and is material-dependent since the heat-induced mass loss of the organic polymer is greatly affected by its chemical characteristics. When oxygen is added during the annealing process, one can reduce the process temperature as well as the dependence of the materials. With the oxygen, line width reduction of a polymer (SU-8) patterns could be accomplished at temperature of as low as $250^{\circ}C$ which was not possible in the heat only process. This oxidative line width reduction can be dramatically promoted with the introduction of oxygen plasma. The oxygen plasma, with its highly-reactive oxygen species, vigorously etches away the organic materials, proven to be extremely effective line with reduction method. It is, however, very hard to control the extent and homogeneity of the etching, particularly of very fine patterns. Here, we report an effective and reliable line width reduction method of imprinted nanopatterns by combined plasma and heat treatment. The merits of this process include the reduction of process temperature, time and material-dependence.

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Adhesion and Electrical Performance by Plasma Treatment on Semiconductive-Insulation Interface Layer of Silicone Rubber (실리콘 고무의 플라즈마 표면처리된 반도전-절연계면 처리에 따른 접착특성과 절연성능)

  • Hwang, Sun-Mook;Lee, Ki-Taek;Hong, Joo-Il;Huh, Chang-Su
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.05b
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    • pp.11-14
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    • 2004
  • In this paper, the effect of adhesion properties of semiconductive-insulating interface layer of silicone rubber on electrical properties was investigated. The modifications produced on the silicone surface by oxygen plasma were accessed using ATR-FTIR, contact angle and AFM. Adhesion was obtained from T-peel tests of semiconductive layer having different treatment durations. In addition, ac breakdown test was carried out for elucidating the change of electrical property with duration of plasma treatment. From the results, the treatment in the oxygen plasma produced a noticeable increase in surface energy, which can be mainly ascribed to the the creation of O-H and C=O. It is observed that adhesion performance was determined by not surface energy but roughness level of silicone surface. It is found that ac dielectric strength was increased with improving the adhesion between the semiconductive and insulating interface.

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The effect of oxygen doping on organic light emitting diodes by oxygen plasma treatment

  • Hong, Ki-Hyon;Kim, Ki-Soo;Kim, Sung-Jun;Lee, Jong-Lam;Choi, Ho-Won;Tak, Yoon-Heung
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.485-487
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    • 2008
  • By the oxygen plasma exposure to the organic light-emitting diodes, the turn-on voltage decreased from 10.5 to 7 V and luminance increased from 470 to $852\;cd/m^2$. Synchrotron radiation photoelectron spectroscopy results showed that during oxygen plasma exposure, oxygen ions were diffused into organic layer and induced p-type doping effect.

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A Study of Atmospheric Plasma Treatment on Surface Energetics of Carbon Fibers

  • Park, Soo-Jin;Chang, Yong-Hwan;Moon, Cheol-Whan;Suh, Dong-Hack;Im, Seung-Soon;Kim, Yeong-Cheol
    • Bulletin of the Korean Chemical Society
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    • v.31 no.2
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    • pp.335-338
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    • 2010
  • In this study, the atmospheric plasma treatment with $He/O_2$ was conducted to modify the surface chemistry of carbon fibers. The effects of plasma treatment parameters on the surface energetics of carbon fibers were experimentally investigated with respect to gas flow ratio, power intensity, and treatment time. Surface characteristics of the carbon fibers were determined by X-ray photoelectron spectroscopy (XPS), scanning electron microscope (SEM), Fourier transform infrared (FT-IR), Zeta-potential, and contact angle measurements. The results indicated that oxygen plasma treatment led to a large amount of reactive functional groups onto the fiber surface, and these groups can form together as physical intermolecular bonding to improve the surface wettability with a hydrophilic polymer matrix.

Sterilization of Bacteria, Yeast, and Bacterial Endospores by Atmospheric-Pressure Cold Plasma using Helium and Oxygen

  • Lee Kye-Nam;Paek Kwang-Hyun;Ju Won-Tae;Lee Yeon-Hee
    • Journal of Microbiology
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    • v.44 no.3
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    • pp.269-275
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    • 2006
  • Atmospheric-pressure cold plasma (APCP) using helium/oxygen was developed and tested as a suitable sterilization method in a clinical environment. The sterilizing effect of this method is not due to UV light, which is known to be the major sterilization factor of APCP, but instead results from the action of reactive oxygen radicals. Escherichia coli, Staphylococcus aureus, and Saccharomyces cerevisiae deposited on a nitrocellulose filter membrane or Bacillus subtilis spores deposited on polypropylene plates were exposed to helium/oxygen plasma generated with AC input power at 10 kHz, 6 kV. After Plasma treatment, nitrocellulose filter membranes were overlaid on fresh solid media and CFUs were counted after incubation overnight. D-values were 18 sec for E. coli, 19 sec for S. aureus, 1 min 55 sec for S. cerevisiae, and 14 min for B. subtilis spores. D-values of bacteria and yeast were dependent on the initial inoculation concentration, while the D-value of B. subtilis spores showed no correlation. When treated cells were observed with a scanning electron microscope, E. coli was more heavily damaged than S. aureus, S. cevevisiae exhibited peeling, and B. subtilis spores exhibited shrunken morphology. Results showed that APCP using helium/oxygen has many advantages as a sterilization method, especially in a clinical environment with conditions such as stable temperature, unlimited sample size, and no harmful gas production.

Effect of different surface treatments on the shear bond strength of luting cements used with implant-supported prosthesis: An in vitro study

  • Degirmenci, Kubra;Saridag, Serkan
    • The Journal of Advanced Prosthodontics
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    • v.12 no.2
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    • pp.75-82
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    • 2020
  • PURPOSE. The aim of this study was to investigate the shear bond strength of luting cements used with implant retained restorations on to titanium specimens after different surface treatments. MATERIALS AND METHODS. One hundred twenty disc shaped specimens were used. They were divided into three groups considering the surface treatments (no treatment, sandblasting, and oxygen plasma treatment). Water contact angle of specimens were determined. The specimens were further divided into four subgroups (n=10) according to applied cement types: polycarboxylate cement (Adhesor Carbofine-AC), temporary zinc oxide free cement (Temporary CementZOC), non eugenol provisional cement for implant retained prosthesis (Premier Implant Cement-PI), and non eugenol acrylic-urethane polymer based provisional cement for implant luting (Cem Implant Cement-CI). Shear bond strength values were evaluated. Two-way ANOVA test and Regression analysis were used to statistical analyze the results. RESULTS. Overall shear bond strength values of luting cements defined in sandblasting groups were considerably higher than other surfaces (P<.05). The cements can be ranked as AC > CI > PI > ZOC according to shear bond strength values for all surface treatment groups (P<.05). Water contact angles of surface treatments (control, sandblasting, and plasma treatment group) were 76.17° ± 3.99, 110.45° ± 1.41, and 73.80° ± 4.79, respectively. Regression analysis revealed that correlation between the contact angle of different surfaces and shear bond strength was not strong (P>.05). CONCLUSION. The retentive strength findings of all luting cements were higher in sandblasting and oxygen plasma groups than in control groups. Oxygen plasma treatment can improve the adhesion ability of titanium surfaces without any mechanical damage to titanium structure.

Changes in Work Function after O-Plasma Treatment on Indium-Tin-Oxide (산소 플라즈마로 처리한 ITO(Indium-Tin-Oxide)에 대한 일함수 변화)

  • 김근영;오준석;최은하;조광섭;강승언;조재원
    • Journal of the Korean Vacuum Society
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    • v.11 no.3
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    • pp.171-175
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    • 2002
  • The change in work function was studied on Indium-Tin-Oxide(ITO) surface after O-plasma treatment using $\gamma$-Focused ion Beam($\gamma$-FIB). As the surface of ITO experienced more O-plasma treatment, both the surface resistivity and the work function got higher. Auger Electron Spectroscopy identified the increase of oxygen as well as the decrease of Sn. The rise of work function and surface resistivity is considered to be due to the change in oxygen and Sn on the surface of ITO.

Wettability and Water Repellency of Polyester Fabrics Treated by Low Temperture Plasma (저온플라즈마처리에 의한 폴리에스테르직물의 흡수성 및 발수성 변화)

  • 권영아
    • Journal of the Korean Society of Clothing and Textiles
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    • v.19 no.2
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    • pp.317-328
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    • 1995
  • The objective of this study was to determine the effects of low temperature plasma on the surface properties of polyester fabric with respect to wettability and water repellency. Highly wettable polyester fabric surfaces were obtained by oxygen treatment. The improved wettabililty of oxygen plasma treated fabrics decreased with aging time up to 30 days, and then the wettability remained relatively constant and still exhibited significant improvement compared to that of untreated polyester. Water repellency was significantly improved by tetratfluorocarbon plasma treatment. Such an improvement appears due to introduced fluo\ulcornerrine atoms or a thin fluorocarbon film on the fiber surface. Water repellency remained constant in fact, even after 150 days.

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Low Temperature Plasma and/or Protease Treatment of Wool Fiber (양모섬유의 저온플라즈마 및 효소처리)

  • Yoon, Nam-Sik;Lim, Yong-Jin
    • Textile Coloration and Finishing
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    • v.6 no.4
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    • pp.27-33
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    • 1994
  • Wool fabrics were treated with low temperature oxygen plasma and/or protease, and examined for their mechanical and dyeing properties. By plasma-treatment the strength of wool fabric increased and higher rate of weight loss for protease treatment was obtained. When dyed by levelling type acid dye equilibrium dye uptake appeared same, but rate of dyeing increased by the plasma treatment, while, with milling type acid dye, both of them increased greatly in the order of untreatedplasma/protease-treated. It was assumed from the above results that plasma affects the surface of fiber, and enzyme attacks mainly the inner part of fiber. This was confirmed again by scanning electron microscope.

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Graphene Doping by Ammonia Plasma Surface Treatment (암모니아 플라즈마 표면처리를 통한 그래핀의 질소도핑)

  • Lee, Byeong-Joo;Jeong, Goo-Hwan
    • Journal of the Korean institute of surface engineering
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    • v.48 no.4
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    • pp.163-168
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    • 2015
  • Graphene has attracted much attention due to its remarkable physical properties and potential applications in many fields. In special, the electronic properties of graphene are influenced by the number of layer, stacking sequence, edge state, and doping of foreign elements. Recently, many efforts have been dedicated to alter the electronic properties by doping of various species, such as hydrogen, oxygen, nitrogen, ammonia and etc. Here, we report our recent results of plasma doping on graphene. We prepared mechanically exfoliated graphene, and performed the plasma treatment using ammonia gas for nitrogen doping. The direct-current plasma system was used for plasma ignition. The doping level was estimated from the number of peak shift of G-band in Raman spectra. The upshift of G-band was observed after ammonia plasma treatment, which implies electron doping to graphene.