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Changes in Work Function after O-Plasma Treatment on Indium-Tin-Oxide  

김근영 (광운대학교 전자물리학과)
오준석 (광운대학교 전자물리학과)
최은하 (광운대학교 전자물리학과)
조광섭 (광운대학교 전자물리학과)
강승언 (광운대학교 전자물리학과)
조재원 (광운대학교 전자물리학과)
Publication Information
Journal of the Korean Vacuum Society / v.11, no.3, 2002 , pp. 171-175 More about this Journal
Abstract
The change in work function was studied on Indium-Tin-Oxide(ITO) surface after O-plasma treatment using $\gamma$-Focused ion Beam($\gamma$-FIB). As the surface of ITO experienced more O-plasma treatment, both the surface resistivity and the work function got higher. Auger Electron Spectroscopy identified the increase of oxygen as well as the decrease of Sn. The rise of work function and surface resistivity is considered to be due to the change in oxygen and Sn on the surface of ITO.
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