• 제목/요약/키워드: Oxygen plasma

검색결과 954건 처리시간 0.026초

전자충격반응을 포함하는 플라즈마 화학반응을 고려한 용량결합형 산소플라즈마의 전산모사 연구 (Simulation Study of Capacitively Coupled Oxygen Plasma with Plasma Chemistry including Detailed Electron Impact Reactions)

  • 김헌창
    • 공업화학
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    • 제22권6호
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    • pp.711-717
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    • 2011
  • 전자충격반응을 고려한 three moment 플라즈마 모델과 전기적 중성성분의 반응을 고려한 유체 유동 모델을 결합하여 용량결합형 산소플라즈마에 대한 2차원적 전산모사 연구를 수행하였다. 전자의 에너지에 의하여 좌우되는 전자충격반응에 대한 반응속도는 전자와 $O_2$ 및 O 사이의 전자충돌단면적으로부터 계산되었다. 플라즈마 모델과 유체 유동 모델을 결합하고 상세한 반응메커니즘을 포함시킴으로써 전하를 띠는 전자와 이온($O_2{^+}$, $O^+$, $O_2{^-}$, and $O^-$) 그리고 기저상태의 산소($O_2$ and O)뿐만 아니라 $O_2(a^1{\Delta}_g)$, $O_2(b^1{{\Sigma}_g}^+)$, $O(^1D)$, $O(^1S)$ 등과 같이 산소플라즈마 특성에 중요한 역할을 하는 준안정상태 성분들의 시공간적 분포를 예측할 수 있었다. 또한 산소플라즈마의 전산모사로부터 sheath 경계에 이중층이 존재함을 확인할 수 있었다.

충전재-탄성체 상호작용. 6. 산소 플라즈마 처리가 카본블랙표면특성 미치는 영향 (Filler-Elastomer Interactions. 6. Influence of Oxygen Plasma Treatment on Surface Properties of Carbon Blacks)

  • 조기숙;;;박수진
    • Elastomers and Composites
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    • 제37권2호
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    • pp.99-106
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    • 2002
  • 본 연구에서는 산소 플라즈마 처리에 의한 카본블랙의 표면특성과 카본블랙/고무 복합재료의 기계적 계면물성에 대하여 고찰하였다. 산소플라즈마의 산화반응에 의한 카본블랙 표면특성은 표면산도-염기도와 제타전위, 그리고 X-ray photo-electron spectroscopy (XPS)를 통하여 알아보았으며 카본블랙/고무 복합재료의 기계적 물성은 인열에너지 ($G_{III}c$)를 측정하여 관찰하였다. 본 실험결과로부터 플라즈마 처리에 의해 카본블랙 표면에 카르복시기, 하이드록시기, 락톤, 카르보닐기와 같은 산소를 함유하는 극성관능기들이 플라즈마 처리시간이 증가함에 따라 증가하는 경향을 나타내었으며, 카본블랙 표면에 산소를 함유한 관능기와 극성고무인 NBR과 높은 상호작용으로 인해 카본블랙과 고무사이의 계면 결합력이 증가하여 카본블랙/고무 복합재료의 기계적 계면물성인 tearing energy가 증가한 것을 확인할 수 있었다.

산소-플라즈마 공정에서 산화제의 생성에 대한 연구 (A Study for Oxidants Generation on Oxygen-plasma Discharging Process Discharging System)

  • 김동석;박영식
    • 한국환경과학회지
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    • 제22권12호
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    • pp.1561-1569
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    • 2013
  • This study carried out a laboratory scale plasma reactor about the characteristics of chemically oxidative species (${\cdot}OH$, $H_2O_2$ and $O_3$) produced in dielectric barrier discharge plasma. It was studied the influence of various parameters such as gas type, $1^{st}$ voltage, oxygen flow rate, electric conductivity and pH of solution for the generation of the oxidant. $H_2O_2$ and $O_3$.) $H_2O_2$ and $O_3$ was measured by direct assay using absorption spectrophotometry. OH radical was measured indirectly by measuring the degradation of the RNO (N-Dimethyl-4-nitrosoaniline, indicator of the generation of OH radical). The experimental results showed that the effect of influent gases on RNO degradation was ranked in the following order: oxygen > air >> argon. The optimum $1^{st}$ voltage for RNO degradation were 90 V. As the increased of $1^{st}$ voltage, generated $H_2O_2$ and $O_3$ concentration were increased. The intensity of the UV light emitted from oxygen-plasma discharge was lower than that of the sun light. The generated hydrogen peroxide concentration and ozone concentration was not high. Therefore it is suggested that the main mechanism of oxidation of the oxygen-plasma process is OH radical. The conductivity of the solution did not affected the generation of oxidative species. The higher pH, the lower $H_2O_2$ and $O_3$ generation were observed. However, RNO degradation was not varied with the change of the solution pH.

ITO 기판의 산소 플라즈마 표면 처리에 의한 OLED의 전기적ㆍ광학적 특성에 관한 연구 (A Study on ElectricalㆍOptical Properties of Organic Light Emitting Diode by Oxygen Plasma Surface Treatment of Indium-Tin-Oxide Substrates)

  • 양기성;김병상;김두석;신훈규;권영수
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제54권1호
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    • pp.8-12
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    • 2005
  • Indium tin oxide(ITO) surface treated by Oxygen plasma has been in situ analyzed using XPS(X-ray Photoelectron Spectroscopy) and EDS(Energy Dispersive Spectroscopy), to investigate the relations between the properties of the ITO surface and the properties of OLED(Organic Light Emitting Diode). We measured electrical resistivity using Four-Point-Probe and calculated sheet resistance, and ITO surface roughness was measured by AFM(Atomic Force Microscope). We fabricated OLED using substrate that was treated optimum ITO surface. The plasma treatment of the ITO surface lowered the operating voltage of the OLED. We have obtained an improvement of luminance and decrease of turn-on voltage.

글라스 기판 위에 증착된 Zin Aluminate 박막의 열처리를 통한 소수성 특성의 향상 (Enhancement of Hydrophobicity by a Heat Treatment of Zinc Aluminate Thin Film Deposited on Glass Substrate)

  • 서상영;윤순길
    • 한국전기전자재료학회논문지
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    • 제33권4호
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    • pp.249-254
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    • 2020
  • An 80 nm thick zinc aluminate thin film was deposited on a glass substrate via radio-frequency (rf) magnetron sputtering and heat treated to analyze changes in the wetting angles due to a surface modification. The thin films were modified from hydrophilic to hydrophobic by a simple thermal treatment. The surface modification from a heat treatment increased the wetting angles up to 111°, which was explained by the relationship with the excess surface area. The wetting angles of the annealed thin films decreased with increasing exposure time under ambient conditions, which was attributed to the oxygen vacancies in the films that were introduced during deposition. The annealed thin films were treated by ionized oxygen via oxygen plasma. After the oxygen plasma treatment, the decreased wetting angles were maintained at ~95° for 11 days.

Nonthermal Atmospheric Pressure Plasmas and their Applications to Plasma Bioscience and Medicines

  • 최은하
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.56.2-56.2
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    • 2015
  • Nonthermal Atmospheric Pressure Plasmas and their Applications to Plasma Bioscience and Medicines have been introduced for next generation human healthcare's quantum developments. Various kinds of nonthermal atmospheric pressure plasmas have been introduced and their electron temperature and plasma densities along with reactive oxygen and nitrogen species have been diagnosed and analyzed for biological cell interactions, especially, used in Plasma Bioscience Research Center (PBRC), Korea. Herein, we have also introduced the plasma-initiated ultraviolet photolysis, which might be a generation mechanism for the reactive oxygen and nitrogen species (RONS) intracellular and extracellular regions inside the liquid when the plasma has been bombarded onto the water. Finally we have investigated the interactions of these RONS with the various cancer cells resulting in apoptotic cell death.

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산소 플라즈마로 표면처리된 탄소섬유/에폭시 적층복합재의 전단거동 (Shear Behavior of Plasma-treated Graphite/Epoxy Laminated Composites Using Oxygen Gas)

  • 김민호;이경엽;백영남;정동호;김현주
    • 한국정밀공학회지
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    • 제25권9호
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    • pp.103-108
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    • 2008
  • In-plane shear tests were performed to investigate the shear property change of FRP by plasma modification. Graphite/epoxy prepreg was used as a test material and plasma source was a microwave (2.4GHz) type. Plasma was induced by oxygen gas and its flow rate was kept $4{\sim}5$sccm with low vacuum state of $10^{-3}$ Torr. Prepreg was stacked unidirectionally ($[0^0]_8$) after plasma modification. Wettability was determined by measuring a contact angle. The results showed that the contact angle was decreased from $86^0$ to $45^0$ after plasma modification. Shear strength was also improved by ${\sim}10%$. SEM examination was made on the fracture surface and functional group produced by the plasma modification was investigated by XPS.

체외순환에 따른 혈장 단백 함량과 폐포모세혈관 산소 분압차의 변화 (Changes in Plasma Protein Concentration and Alveolar -Arterial Oxygen Tension Differnce Associated with CPB-)

  • 전태국
    • Journal of Chest Surgery
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    • 제23권6호
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    • pp.1084-1089
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    • 1990
  • Plasma protein concentration, plasma albumin concentration, hematocrit, and arterial blood gas tension were measured in 15 mongrel dogs undergoing heart transplantation with cardiopulmonary bypass. The hemodilution due to priming solution resulted in a 49% decrease in plasma protein concentration, a 57% decrease in plasma albumin concentration, a 46%a decrease in hematocrit. The measurements had returned to preperfusion values 1 hour after the end of cardiopulmonary bypass. The intraoperative changes in plasma protein and albumin concentration did not correlate with changes in alveolar-arterial oxygen tension gradients[D[A\ulcorner PO2]]. It is concluded that, in the absence of an increase in left atrial pressure, marked decrease in plasma protein concentration can be tolerated without the occurrence of pulmonary edema. And further study should be done to determine how to prepare an ideal priming solution.

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플렉서블 플라즈마 패치에서 발생되는 활성종이 다당류 표면에 미치는 영향 (Effect of Active Species Generated from Flexible Plasma Patch on Polysaccharide Surface)

  • 이유리;이승훈;김도근
    • 한국표면공학회지
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    • 제51권2호
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    • pp.133-137
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    • 2018
  • Plasma devices such as jets, pencils, and torches have been developed as new tools that help penetration of target agents and applied to plasma medicine. However, these devices cannot be used in a large area. Therefore, we introduced a flexible plasma device, which can be treated of large area and designed as bendable plasma. In additional, in vitro model based on agarose gel was prepared that can be show effectiveness in the depth of penetration. Plasma treatment conditions such as power, time and distance can be optimized on the agarose gel wound model. The chemical structure of changed polysaccharides was predicted due to reactive excited atoms and molecules, UV photons, charged particles and reactive oxygen and nitrogen species (RONS).

Helium/Oxygen Atmospheric Pressure Plasma Treatment on Poly(ethylene terephthalate) and Poly(trimethylene terephthalate) Knitted Fabrics: Comparison of Low-stress Mechanical/Surface Chemical Properties

  • Hwang Yoon Joong;McCord Marian G.;Kang Bok Choon
    • Fibers and Polymers
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    • 제6권2호
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    • pp.113-120
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    • 2005
  • Helium-oxygen plasma treatments were conducted to modify poly(trimethylene terephthalate) (PIT) and poly(ethylene terephthalate) (PET) warp knitted fabrics under atmospheric pressure. Lubricant and contamination removals by plasma etching effect were examined by weight loss $(\%)$ measurements and scanning electron microscopy (SEM) analysis. Surface oxidation by plasma treatments was revealed by x-ray photoelectron spectroscopy (XPS) analyses, resulting in formation of hydrophilic groups and moisture regain $(\%)$ enhancement. Low-stress mechanical properties (evaluated by Kawabata evaluation system) and bulk properties (air permeability and bust strength) were enhanced by plasma treatment. Increasing interfiber and interyarn frictions might play important roles in enhancing surface property changes by plasma etching effect, and then changing low-stress mechanical properties and bulk properties for both fabrics.