• 제목/요약/키워드: Oxidized material

검색결과 240건 처리시간 0.027초

산소 플라즈마 처리에 의한 반도전-절연 실리콘 고무의 접착 특성 (Adhesion Characteristics of Semiconductive and Insulating Silicone Rubber by Oxygen Plasma Treatment)

  • 이기택;허창수
    • 한국전기전자재료학회논문지
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    • 제19권2호
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    • pp.153-157
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    • 2006
  • In this work, the effects of plasma treatment on surface properties of semiconductive silicone rubber were investigated in terms of X-ray photoelectron spectroscopy (XPS) and contact angles, The adhesion characteristics of semiconductive-insulating interface layer of silicone rubber were studied by measuring the T-peel strengths, The results of the chemical analysis showed that C-H bonds were broken due to plasma discharge and Silica-like bonds(SiOx, x=3${\~}$4) increased, It is thought that semiconductive silicone rubber surfaces treated with plasma discharge led to an increase in oxygen-containing functional groups, resulting in improving the degree of adhesion of the semiconductive-insulating interface layer of silicone rubber. However, the oxygen plama for 20 minute produces a damaged oxidized semiconductive silicone rubber layer, which acts as a weak layer producing a decrease in T-peel strength, These results are probably due to the modifications of surface functional groups or polar component of surface free energy of the semiconductive silicone rubber.

Polypyrrole-Glucose Oxidase 효소전극의 전기화학적 특서: 1. 효소전극의 산화환원에 대한 Glucose Oxidase의 영향 (Electrochemical Properties of Polypyrrole-Glucose Oxidase Enzyme Electrode: 1. An Influence of Glucose Oxidase on Redox Behavior of Enzyme Electrode)

  • 김현철;구할본;사공건
    • 한국전기전자재료학회논문지
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    • 제13권6호
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    • pp.520-525
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    • 2000
  • Glucose oxidase was immobilized in polypyrrole by electrosynthesis. The enzyme had an influence on the redox properties of a complex enzyme electrode. In the cyclic voltammograms of the enazyme electrode new peaks were appeared at the potential around 0.7V vs. Ag/AgCl in additional to the typical peaks for polypyrrole. The more immobilized the stronger the peaks became. During the cycling the pH of electrolyte solution was decreased to about 4.4 The reason for that is to be the proton released from the carboxyl in the glucose oxidase in order to keep on a charge neutrality of the oxidized enzyme. This fact suggests that the new peaks in the voltammograms are caused by the redox of glucose oxidase. In the AC impedance spectrum analysis of the electrode the diffusion of electrolyte anion was limited because of chained structure of the enzyme. The faradic impedance was large since the glucose oxidase is an insulator. Therefore when glucose oxidase is entrapped the enzyme should be limited in amount. Because the growth of the polypyrrole is accompanied both charge transfer and mass transport. For the traditional electrosynthesis that means amount of enzyme present in the electrode is limited to as much as film growable.

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와이어 공급에 의한 Inconel의 Nd:YAG 레이저 클래딩 (Nd:YAG Laser Cladding of Inconel with Wire Feeding)

  • 김재도;배민종;팽윤
    • Journal of Welding and Joining
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    • 제18권3호
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    • pp.83-88
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    • 2000
  • Laser cladding processing allows rapid transfer of heat to the material being processed with minimum conduction into base metal, resulting in low total heat input. The effects of Nd:YAG laser cladding with wire feeding on the mechanical properties of Inconel alloy were investigated. inconel alloy is used as the material of nuclear steam generator tubing because of its mechanical properties and corrosion resistance properties. The device for Nd:YAG laser cladding with wire feeding was designed. It consists of the wire feeding system, the wire cladding system and the shielding gas system which prevents the clad layer from being oxidized. Experimental as results indicated that the wire feeding direction and position were important for laser cladding with wire feeding. The wire feeding speed should be adapted according to cladding speed for good shaping of clad layer. The effect of heat on the HAZ size can be limited and the growth of grain size of HAZ size was not serious. The hardness of clad layer and heat affected zone increased with increasing of cladding speed.

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스퍼터링 방법으로 증착한 HfO$_2$ MIM 커패시터의 유전특성 (Characteristics of Metal-Insulator-Metal Capacitors with HfO$_2$ Deposited by Sputtering)

  • 정석원;정성혜;강대진;노용한
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 하계학술대회 논문집
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    • pp.362-365
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    • 2002
  • Hf thin films were deposited on bottom metal using a RF magnetron sputtering method followed by oxidation and annealing in O$_2$ and N$_2$ ambient, respectively. Various top metal electrodes (i.e., Al, Au, and Cu) were deposited by evaporation, and their roles on physical and electrical properties were investigated. Using the XRD, SEM and AFM techniques, we confirmed that the grain size of HfO$_2$ thin films enlarges as a function of oxidation temperature, increasing dielectric constant. However, other electrical properties (e.g., tan) deteriorateas a consequence. The dielectric constant and tan of HfO$_2$ thin films oxidized at 500 $^{\circ}C$ were 17-25 and 3${\times}$10-3 - 2x10-2, respectively, in the frequency range of 1 Hz to 1 MHz. The leakage current density was less than 1${\times}$10-8A/cm2 up to 0.7 MV/cm. In addition, electrical properties of HfO$_2$ thin films (e.g., the dielectric constant, leakage current and tan $\delta$) depend on top metal electrode. We showed that Al top metal electrode results in the best result.

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SDB와 etch-back 기술에 의한 MEMS용 SiCOI 구조 제조 (Fabrication of SiCOI Structures Using SDB and Etch-back Technology for MEMS Applications)

  • 정수용;우형순;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.830-833
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    • 2003
  • This paper describes the fabrication and characteristics of 3C-SiCOI sotctures by SDB and etch-back technology for high-temperature MEMS applications. In this work, insulator layers were formed on a heteroepitaxial 3C-SiC film grown on a Si(001) wafer by thermal wet oxidation and PECVD process, successively. The pre-bonding of two polished PECVD oxide layers made the surface activation in HF and bonded under applied pressure. The wafer bonding characteristics were evaluated by the effect of HF concentration used in the surface treatment on the roughness of the oxide and pre-bonding strength. Hydrophilic character of the oxidized 3C-SiC film surface was investigated by ATR-FTIR. The strength of the bond was measured by tensile strengthmeter. The bonded interface was also analyzed by SEM. The properties of fabricated 3C-SiCOI structures using etch-back technology in TMAH solution were analyzed by XRD and SEM. These results indicate that the 3C-SiCOI structure will offers significant advantages in the high-temperature MEMS applications.

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습식 플라즈마에 의한 물의 특성 변화 (The characteristic change of water using the wet-plasma)

  • 이재동;박홍재;이동훈;김영주;박재윤
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.1151-1154
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    • 2003
  • Ultraviolet rays, OH H O radical and $O_3$ produced by the streamer discharge in water are widely used to deactivate microorganisms and remove organic contaminants in water and the dominant factor of these decomposition is the oxidized reaction of hydrogen peroxide and dissolved $O_3$ in water. In this paper, the barrier discharge was used to create plasma in a gas, liquid and solid medium and the electrode with the reactor combined barrier with packed type(BPR) was made as noncontact way against water so that the effect of water characteristic change by the erosion of electrodes exposing in water should be minimized. The active radical and $O_3$ gas generated in plasma region were reacted into the water as electrode so that at the same time a dissolved $O_3$ and hydrogen peroxide were formed in water and The change of pH and conductivity were measured.

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고온용 마이크로 세라믹 박막형 압력센서의 제작과 그 특성 (Fabrication of Micro Ceramic Thin-Film Type Pressure Sensors for High-Temperature Applications and Its Characteristics)

  • 김재민;이종춘;정귀상
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2003년도 하계학술대회 논문집 Vol.4 No.2
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    • pp.888-891
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    • 2003
  • This paper describes on the fabrication and characteristics of micro ceramic thin-film type pressure sensors based on Ta-N strain-gauges for high-temperature applications. The Ta-N thin-film strain-gauges are deposited onto thermally oxidized Si diaphragms by RF sputtering in an argon-nitrogen atmosphere($N_2$ gas ratio: 8 %, annealing condition: $900^{\circ}C$, 1 hr.), Patterned on a wheatstone bridge configuration, and use as pressure sensing elements with a high stability and a high gauge factor. The sensitivity is $1.097{\sim}1.21mV/V.kgf/cm^2$ in the temperature range of $25{\sim}200^{\circ}C$ and the maximum non-linearity is 0.43 %FS. The fabricated pressure sensor presents a lower TCR, non-linearity than existing Si piezoresistive pressure sensors. The fabricated micro ceramic thin-film type pressure sensor is expected to be usefully applied as pressure and load sensors that is operable under high-temperature environments.

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인지질(DOPC)과 지방산(8A5H)의 혼합 LB막의 광이성질화 현상과 전기화학적 특성 (Electrochemical Properties and Photoisomerization of DOPC-8A5H Mixture Langmuir-Blogett Films)

  • 박근호;최성현;김남석;김덕술
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
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    • pp.874-877
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    • 2004
  • We carried out this subject to observe electrochemical properties of 1,2-dioleoyl-sn- glycero-3-phosphocholine(DOPC) mixed with fatty acid containing azobenzene group by using cyclic voltammetry with a three-electrode system, An Ag/AgCl reference electrode, a platinum wire counter electrode and LB film-coated ITO working electrode in $NaClO_4$ solution. We investigated the photoisomerization and electrochemical property of the organic ultra thin film of fatty acid containing azobenzene was prepared on the hydrophilic ITO(idium tin oxide) glass plate by LB method. As a result, the absorption spectra of BASH and DOPC of mixture LB films was induced to photoisomerization by alternating irradiation of ultraviolet and visible light. A measuring range was reduced from initial potential to -1350mV, continuously oxidized to 1650 mV and measured to the initial point. The scan rate were 50, 100, 150 and 200 mV/s. As a results, LB films of BASH-DMPC appeared reversible process caused by the reduction-oxidation current from the cyclic voltammogram.

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다결정 다공질 실리콘 나노구조의 전계 방출 특성 (Field Emission properties of Porous Polycrystalline silicon Nano-Structure)

  • 이주원;김훈;박종원;이윤희;장진;주병권
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 춘계학술대회 논문집 디스플레이 광소자 분야
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    • pp.69-72
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    • 2002
  • We establish a visible light emission from porous polycrystalline silicon nano structure(PPNS). The PPNS layer are formed on heavily doped n-type Si substrate. 2um thickness of undoped polycrystalline silicon deposited using LPCVD (Low Pressure Chemical Vapor Deposition) anodized in a HF: ethanol(=1:1) as functions of anodizing conditions. And then a PPNS layer thermally oxidized for 1 hr at $900^{\circ}C$. Subsequently, thin metal Au as a top electrode deposited onto the PPNS surface by E-beam evaporator and, in order to establish ohmic contact, an thermally evaporated Al was deposited on the back side of a Si-substrate. When the top electrode biased at +6V, the electron emission observed in a PPNS which caused by field-induces electron emission through the top metal. Among the PPNSs as functions of anodization conditions, the PPNS anodized at a current density of $10mA/cm^{2}$ for 20 sec has a lower turn-on voltage and a higher emission current. Furthermore, the behavior of electron emission is uniformly maintained.

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Synthesis of Highly Dispersed and Conductive Graphene Sheets by Exfoliation of Preheated Graphite in a Sealed Bath and its Applications to Polyimide Nanocomposites

  • Hossain, Muhammad Mohsin;Hahn, Jae Ryang;Ku, Bon-Cheol
    • Bulletin of the Korean Chemical Society
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    • 제35권7호
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    • pp.2049-2056
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    • 2014
  • A simple method for exfoliating pristine graphite to yield mono-, bi-, and multi-layers of graphene sheets as a highly concentrated (5.25 mg/mL) and yielded solution in an organic solvent was developed. Pre-thermal treatment of pristine graphite at $900^{\circ}C$ in a sealed stainless steel bath under high pressures, followed by sonication in 1-methyl-2-pyrrolidinone solvent at elevated temperatures, produced a homogeneous, well-dispersed, and non-oxidized graphene solution with a low defect density. The electrical conductivities of the graphene sheets were very high, up to 848 S/cm. These graphene sheets were used to fabricate graphene-polyimide nanocomposites, which displayed a higher electrical conductivity (1.37 S/m) with an improved tensile strength (95 MPa). The synthesized graphene sheets and nanocomposites were characterized by transmission electron microscopy, scanning electron microscopy, atomic force microscopy, X-ray photoelectron spectroscopy, and Raman spectroscopy.