• 센서학회지
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• 제4권2호
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• pp.45-50
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• 1995

The excellent c-axis oriented zinc oxide thin films were prepared by the RF magnetron sputtering method on glass substrates. Optimum fabrication conditions of the ZnO films were such that RF power, substrate temperature, and gas pressure of mixture Ar(50%):$O_{2}$(50%) were 150 W, $200^{\circ}C$, and 5 mTorr, respectively. In these conditions, the deposition rate was $310\;{\AA}/min$, and the resistivity of the film was $1{\times}10^6\;{\Omega}{\cdot}cm$. The ZnO film also showed high c-axis orientation and crystalinity according to XRD pattern and SEM photograph. A fabricated interdigital transducer generated 1st mode surface acoustic wave at 46.6 MHz and 2nd mode surface acoustic wave at 52.5 MHz. At the 1st mode, the phase velocity of surface acoustic wave and the electromechanical coupling coefficient were 2795 m/sec and 0.031 %, respectivly. At the 2nd mode, they were 3149 m/sec and 0.019 %. respectivly.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2007년도 추계학술대회 논문집
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• pp.306-306
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• 2007

The surface was transformed to porous titanium oxide by the anodization of pure titanium. Titanium was anodized in non-aqueous and aqueous electrolytes at different potentials between 5 V and 150 V. Various electrolytes were compose of ethylene glycerol, $H_2SO_4,\;NH_4F\;and\;H_2O$. We obtained titania nanotube arrays on the micro pore of titanium. Micro pores and nano tubes were obtained by anodization at high potentials and low potentials, respectively. Morphologies of nanotubes and micro pore were characterized by FE-SEM. The unique surface structure is very attractive to electrical and medical applications such as gas sensor, biosensor, dental implant and stent.

• 센서학회지
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• 제7권5호
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• pp.319-326
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• 1998

연속 기체흐름계에서 감지막으로 $Na_2CO_3$와 $MCO_3$ ($M=Cs_2,K_2,Li_2,Ca$)를 입힌 $Na^+$ 이온 전해질 센서가 $CO_2$ 가스를 감지할 때 anode반응을 도출하였다. 흔히 사용되는 전기화학 센서에 대해 일반적으로 알려진 전체 전극반응인 $MCO_3=MO+CO_2$ 반응은 위의 $Na^+$이온 전해질 센서에는 적합한 반응이 아니었다. 따라서 anode 반응은 전체cell 내의 ionic balance를 유지하기 위해 전해질과 감지막 계면에 이온교환반응을 첨가시킴으로써 도출할 수 있었으며 anode반응은 $Na_2CO_3$ 및 감지막의 금속($M^{++}$) 이온이 포함된 산화물이 참가하는 반응임을 알 수 있었다. 이와 같이 도출된 전극반응으로부터 구한 EMF와 일시 기체흐름계에서의 출력 EMF와의 차이를 아울러 검토하였다. 이러한 출력에서의 차이는 $CO_2$와 $O_2$의 분압과 분위기가스와 전극물질과의 비가역반응에 기인됨을 알았다.

• 한국재난정보학회 논문집
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• 제16권2호
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• pp.383-391
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• 2020

연구목적 : 에너지 저장실의 외부 화염에 의한 내부자기 점화 및 점화를 식별하고, 과열로 인한 점화와 외부 열원에 의한 점화의 차이를 분석하는 것이다. 연구방법 : 분리막 녹는점 측정, 배터리 외부 수열 실험, 배터리 과충전 실험, 과충전과 외부수열에 의한 연소 시 전극 판 비교분석, 과충전 연소 특징, 외부수열 화재 연소특징, 3.4(전극판 비교)/ 3.5(과충전)/ 3.6(외부수열) 분석 실험을 하였다. 연구결과: 화재 발생 시까지 센서의 위치에 따른 온도 차이가 극심했음으로 기존처럼 한 모듈 당 온도 센서 두 개로는 측정값이 부족해 온도제어를 통한 화재를 사전에 방지할 수 없다고 판단한다. 결론: 단락이 점화원으로 작용하여 혼합가스에 착화돼 가스폭발이 발생하고, 폭발 압력에 의해 전극이 잘게 파손되며, 가루형태의 리튬산화물이 불꽃반응에 의해 폭죽과 유사한 불꽃이 분출되었다.

• 센서학회지
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• 제6권3호
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• pp.200-206
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• 1997

열산화시킨 실리콘 웨이퍼 위에 저압화학기상성장법으로 $SiCl_{2}H_{2}$, $NH_{3}$ 및 $N_{2}O$ 기체를 사용하여 실리콘 옥시나이트라이드($Si_{x}O_{y}N_{z}$) 층을 제작하였다. 세 가지의 다른 조성이 기체 유속비($NH_{3}/N_{2}O$)를 각기 0.2, 0.5 및 2로 변화시키고 $SiCl_{2}H_{2}$의 기체 유속은 고정시킴으로써 얻어졌다. 엘립소메트리와 HFCV(High Frequency Capacitance-Voltage) 측정법을 채택하여 굴절율, 유전율 및 조성의 차이를 각각 조사했다. 실리콘 옥시나이트라이드는 내부에 포함된 실리콘 나이트라이드 성분량에 관계없이 용액 중에서 순수한 실리콘 나이트라이드와 유사한 안정성을 보유했다. 실리콘 옥시나이트라이드 층 알칼리이온 감지성의 크기 순서는 실리콘 나이트라이드 성분량에 영향을 받았다. 보다 나은 알칼리이온 감지성이 실리콘 옥시나이트라이드의 벌크 내에 있는 실리콘 디옥시드의 성분량을 증가시킴으로써 얻어졌다.

• 센서학회지
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• 제27권4호
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• pp.237-241
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• 2018

The real-time enrichment and detection of pathogens are serious issues and rapidly evolving field of research because of the ability of these pathogens to cause infectious diseases. In general, bacterial detection is accomplished by conventional colony counting or by polymerase chain reaction (PCR) after DNA extraction. As colony counting requires considerable time to cultivate, PCR is an attractive method for rapid detection. A small number of pathogens can cause diseases. Hence, a pretreatment process, such as enrichment is essential for detecting bacteria in an actual environment. Thus, in this study, we developed a microfluidic chip capable of performing rapid enrichment of bacteria and the extraction of their genes. A lectin, i.e., Concanavalin A (ConA), which shows binding affinity to the surface of most bacteria, was coated on the surface of magnetic particles to nonspecifically capture bacteria. It was subsequently concentrated through magnetic forces in a microfluidic channel. To lyse the captured bacteria, magnetic particles were irradiated by a wavelength of 532nm. The photo-thermal effect on the particles was sufficient for extracting DNA, which was consequently utilized for the identification of bacteria. Our device will help monitor the existence of bacteria in various environmental situations such as water, air, and soil.

• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.28.1-28.1
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• 2009

The superior properties of ZnO such as high exciton binding energy, high thermal and chemical stability, low growth temperature and possibility of wet etching process in ZnO have great interest for applications ranging from optoelectronics to chemical sensor. Particularly, vertically well-aligned ZnO nanorods on large areas with good optical and structural properties are of special interest for the fabrication of electronic and optical nanodevices. Currently, low-dimensional ZnO is synthesized by metal-organic chemical vapor deposition (MOCVD), molecular beam epitaxy (MBE), thermal evaporation, and sol.gel growth. Recently, our group has been reported about achievement the growth of Ga-doped ZnO nanorods using ZnO seed layer on p-type Si substrate by RF magnetron sputtering system at high rf power and high growth temperature. However, the crystallinity of nanorods deteriorates due to lattice mismatch between nanorods and Si substrate. Also, in the growth of oxide using sputtering, the oxygen flow ratio relative to argon gas flow is an important growth parameter and significantly affects the structural properties. In this study, Phosphorus (P) doped ZnO nanorods were grown on c-sapphire substrates without seed layer by radio frequency magnetron sputtering with various argon/oxygen gas ratios. The layer change films into nanorods with decreasing oxygen partial pressure. The diameter and length of vertically well-aligned on the c-sapphire substrate are in the range of 51-103 nm and about 725 nm, respectively. The photoluminescence spectra of the nanorods are dominated by intense near band-edge emission with weak deep-level emission.

• 센서학회지
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• 제31권5호
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• pp.343-347
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• 2022

Recently, the problem of global warming caused by greenhouse gases is getting serious due to the development of industry and the increase in transportation means. Accordingly, the need for a technology to reduce carbon dioxide, which accounts for most of the greenhouse gas, is increasing. Among them, a catalyst for converting carbon dioxide into fuel is being actively studied. Catalysts for reducing carbon dioxide are classified into thermal catalysts and photocatalysts. In particular, the photocatalyst has the advantage that carbon dioxide can be reduced only by irradiating ultraviolet rays at room temperature without high temperature or additional gas. TiO₂ is widely used as a photocatalyst because it is non-toxic and has high stability, but has a disadvantage of low carbon dioxide reduction efficiency. To increase the reduction efficiency, 1-propanol was used in the synthesis process. This prevents agglomeration of the catalyst and increases the specific surface area and pores of TiO₂, thereby increasing the surface area in contact with carbon dioxide. As a result of measuring the CO₂ reduction efficiency, it was confirmed that the efficiency of TiO₂ with 1-propanol and TiO₂ without 1-propanol was 19% and 12.3%, respectively, and the former showed a 1.5 times improved efficiency.

• 한국표면공학회지
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• 제50권5호
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• pp.411-420
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• 2017

In this paper, two methods of making the Pd-added $SnO_2$ ($Pd-SnO_2$) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use $PdCl_2$ as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of $Pd-SnO_2$ made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with $PdCl_2$, grain size of the $PdCl_2$ fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free $Pd-SnO_2$ thick films were able to successfully fill the $30{\mu}m$ gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% $Pd-SnO_2$ thick film made with PdCl2 showed gas responses ($R_{air}/R_{gas}$) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% $Pd-SnO_2$ thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% $Pd-SnO_2$ thick film with Pd-OAM has a specific surface area of $31.39m^2/g$.

• 한국축산식품학회지
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• 제30권2호
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• pp.313-320
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• 2010

본 연구에서는 저장기간에 따른 계육의 신선도 변화를 GC-MS를 이용한 가스 성분의 변화, 미생물의 총균수와 지방 산패도의 변화를 통해 분석하고, MOS 센서와 수분센서를 기반으로 한 전자코 시스템을 구성하여, 계육의 품질 평가를 실시하였다. 계육의 GC-MS, 미생물, 지방 산패도를 이용한 품질의 측정결과 저장기간이 증가함에 따라 품질은 저하되었고, 저장기간이 5일 이후부터 급격한 품질의 저하를 나타내기 시작했다. 전자코 시스템을 이용한 실험결과, 그래프 분석을 이용하여 계육은 저장기간 초기부터 저장기간의 증가에 따라 선형적으로 저항값의 변화율이 감소함을 확인할 수 있었다. 전자코 센서의 신호를 이용하여 주성분 분석을 한 결과 저장일수에 따라 제1, 2주성분이 뚜렷이 구분됨을 확인할 수 있었다. 선형판별을 이용하여 분석한 결과 1일에서 19일까지 전체 분류 정확도가 92.5%였다. 저장 초기의 1일에서 5일까지의 데이터를 기반으로 선형판별분석을 한 경우 제1, 2판별함수를 이용할 경우 100%의 정확도를 보였다. 결론적으로 본 연구에서의 전자코를 이용한 계측과 주성분분석 및 선형판별분석법을 이용할 경우 냉장 저장된 계육의 신선도 변화가 예측 가능함을 확인할 수 있었다.