한국표면공학회지 (Journal of the Korean institute of surface engineering)

  • 제50권5호
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  • Pages.411-420
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  • 2017
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  • 1225-8024(pISSN)
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  • 2288-8403(eISSN)
한국표면공학회 (The Korean Institute of Surface Engineering)
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Pd 첨가량 및 첨가방법이 알코올 센서용 SnO2 반도체 후막 특성에 미치는 영향 연구

Effects of Pd Addition Amount and Method on the Characteristics of SnO2 Semiconductor Thick Films for Alcohol Gas Sensors

  • 김준형 (한국산업기술대학교 신소재공학과) ;
  • 김형관 (한국산업기술대학교 신소재공학과) ;
  • 이호년 (한국생산기술연구원 표면처리그룹) ;
  • 김현종 (한국생산기술연구원 표면처리그룹) ;
  • 이희철 (한국산업기술대학교 신소재공학과)
  • Kim, Jun-Hyung (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Kim, Hyeong-Gwan (Department of Advanced Materials Engineering, Korea Polytechnic University) ;
  • Lee, Ho-Nyun (Surface Technology R&BD Group, Korea Institute of Industrial Technology) ;
  • Kim, Hyun-Jong (Surface Technology R&BD Group, Korea Institute of Industrial Technology) ;
  • Lee, Hee-Chul (Department of Advanced Materials Engineering, Korea Polytechnic University)
  • 투고 : 2017.06.15
  • 심사 : 2017.09.20
  • 발행 : 2017.10.31
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초록

In this paper, two methods of making the Pd-added $SnO_2$ ($Pd-SnO_2$) powder with pure tetragonal phase by the hydrazine method were suggested and compared in terms of crystal structure, surface morphology, and alcohol gas response. One of the addition methods is to use $PdCl_2$ as a Pd source, the other is to use Pd-based organic with oleylamine (OAM). When Pd concentration was increased from 0 to 5 wt%, the average grain size of $Pd-SnO_2$ made with Pd-OAM were decreased from 32 to 12 nm. In the case of using with $PdCl_2$, grain size of the $PdCl_2$ fell to less than 10 nm. However, agglomerated and extruded surface morphology was observed for the films with Pd addition over 4 wt%. The crack-free $Pd-SnO_2$ thick films were able to successfully fill the $30{\mu}m$ gap of patterned Pt electrodes by optimized ink dropping method. Also, the 2 wt% $Pd-SnO_2$ thick film made with PdCl2 showed gas responses ($R_{air}/R_{gas}$) of 3.7, 5.7 and 9.0 at alcohol concentrations of 10, 50 and 100 ppm, respectively. On the other hand, the prepared 3 wt% $Pd-SnO_2$ thick film with Pd-OAM exhibited very excellent responses of 3.4, 6.8 and 12.2 at the equivalent measurement conditions, respectively. The 3 wt% $Pd-SnO_2$ thick film with Pd-OAM has a specific surface area of $31.39m^2/g$.

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