• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.106-107
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• 2007

We fabricated anodic aluminium oxides (AAO) on Si and sapphire substrates from the electrochemical reactions of thin AI films in an aqueous solution of oxalic acid. The thin AI films have deposited on Si and Sapphire substructure by using E-beam evaporation and thermal evaporation, respectively. The formation of AAO structures has investigated from FE-SEM measurement image and showed randomly distributed phase of nanoholes instead of the periodic lattice of photonic crystals. The AAO structure on sapphire shows the double layers of nanoholes.

• Journal of the Korean Magnetics Society
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• v.17 no.3
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• pp.137-140
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• 2007

The ordering of nanopores in AAO has been improved by using laser interference lithography. After growing Fe and Cu on this substrate in vacuum and removing AAO, Fe nanodots are fabricated. The nanopores in AAO and nanodots are ordered in one dimension following the prepatterning. It has been confirmed from the magnetic hysteresis loop that the Fe nanodots have vortex structure and the dipolar interaction is dominant among them.

• Journal of the Microelectronics and Packaging Society
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• v.20 no.4
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• pp.13-16
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• 2013

A lot of various researches have been going on to use heat spreader for LED module. Nano porous aluminum anodic oxide (AAO) applied LED, which is produced from anodization, is easy and economically advantageous. Convensional LED module is consist of aluminum/adhesive/copper circuit. The polymer adhesive in this module is used as heat spreader. However the thermal emission of LED component is degraded because of low heat conductivity of polymer and also reliability of LED component is reduced. Therefore, AAO in this work was applied to heat spreader of LED module which has higher heat conductivity compare to polymer. Bonding strength between AAO and copper circuit was improved with Ti/Cu seed layer by copper sputtering process (DBC) before the bonding. And this copper circuit has been fabricated by electro plating method. Peel strength of AAO and copper circuit in this work showed range between 1.18~1.45 kgf/cm with anodizing process which is very suitable for high power LED application.

• Membrane Journal
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• v.22 no.1
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• pp.35-45
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• 2012

We prepared the highly ordered nano-wires of polypyrrole, polyaniline conductive polymers and polypyrrole/ polyaniline conductive copolymers by templating the anodic aluminum oxide (AAO) porous membrane, in which pore diameter was 20 nm, 100 nm and 200 nm. Those conductive polymers were grown from pore inner surface of AAO membrane forming hollow tubes and then wire structures were formed after 3 hour polymerization. By removing AAO membrane templates using sodium hydroxide solution, the conductive polymer nano-wires were successfully obtained, of which diameter and length were close to the ones of nano-pores in AAO membrane template. Crystallinity and thermal stability of the conductive polymer nano-wires were higher than irregular ones that prepared by solution polymerization. Furthermore, the electrical resistance of conductive polymer nano-wires were reduced by about 4~60% compared with that of the irregular polymers prepared by solution polymerization.

• Journal of Surface Science and Engineering
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• v.56 no.3
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• pp.169-179
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• 2023

This work studies dielectric breakdown behavior of AAO (anodic aluminum oxide) films formed on pure aluminum at a constant current density in 5 ~ 20 vol.% sulfuric acid (SA) and 2 ~ 8 wt.% oxalic acid (OA) solutions. It was observed that dielectric breakdown voltage of AAO film with the same thickness increased with increasing concentration of both SA and OA solutions up to 15 vol.% and 6 wt.%, respectively, above which it decreased slightly. The dielectric breakdown resistance of the OA films appeared to be superior to that of SA films. After dielectric breakdown test, cracks and a hole were observed. The crack length increased with increasing SA film thickness but it did not increase with increasing OA film thickness. To explain the reason why shorter cracks formed on the OA films than the SA films after dielectric breakdown test, the generation of tensile stresses at the oxide/metal interface was discussed in relation to porosity of AAO films obtained from cross-sectional morphologies.

• Tribology and Lubricants
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• v.27 no.4
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• pp.193-197
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• 2011

Friction behavior of nanoporous anodic aluminum oxide(AAO) film was investigated. A 60 ${\mu}m$ thick AAO film having nanopores of 45 nm diameter with 105 nm interpore-diatance was fabricated by mild anodization process. The AAO film was then saturated with paraffinic oil. Reciprocating ball-on-flat sliding friction tests using 1 mm diameter steel ball as the counterpart were carried out with normal load ranging from 0.1 N to 1 N in an ambient environment. The morphology of worn surfaces were analyzed using scanning electron microscopy. The friction coefficient significantly increased with the increase of load. The boundary lubrication layer of paraffinic oil contributed to the lower friction at relatively low load (0.1 N), but it is less effective at high load (1 N). Plastic deformed layer patches were formed on the worn surface of oil-enriched AAO at relatively low load (0.1 N) without evidence of tribochemical reaction. On the other hand, thick tribolayers were formed on the worn surface of both oil-enriched and as-prepared AAO at relatively high load (1 N) due to tribochemical reaction and material transfer.

• Composites Research
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• v.36 no.3
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• pp.224-229
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• 2023

Due to the increasing demand for wearable devices and miniaturization of various electronic devices, the trend of nanofabrication in IT devices is underway. In order to overcome the limitations of battery size and capacity, there has been a lot of research interest in energy harvesting technology, also known as triboelectric nanogenerator. AAO(Anodic Aluminum oxide) coated with fluoride is a structure that includes an anode layer with high properties in the triboelectric series, an dielectric layer that helps transfer the triboelectrically generated charges to the electrode without loss, and the electrode. For these reasons, AAO has been a lot of research on its application to frictional energy harvesting nanogenerators. In this work, we analyzed the correlation of AAO between the surface morphology and thickness of the insulating layer by utilizing aluminum oxide, which is advantageous for the application of triboelectric nanogenerators, and adjusting the thickness of the insulating layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.271-271
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• 2009

AAO(Anodic Aluminum Oxide)는 전형적인 자기정렬 되는 물질로 이루어진 나노 다공성 구조이며 많은 나노 기술적으로 응용이 되고 있다. 양극산화 알루미나 기술은 간단한 공정으로 경제적이며 규칙적인 배열의 나노 크기의 육각형의 셀 형태의 hole구조를 형성할 수 있는 장점을 가지고 있다. 이런 나노 다공성 구조는 나노 단위의 물질을 형성하는 Template로 유용하게 쓰인다. 균일한 대면적 AAO의 형성을 위한 공정 step의 개선, 공정변수의 영향에 대하여 연구 중이며 공정변수의 조절에 따라 hole의 직경, 길이, 균일성을 제어 가능하며 제작된 AAO의 특성은 FE-SEM, AFM을 이용하여 분석한다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.419-420
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• 2009

The authors fabricated the nanostructural patterns on the surface of SiN antireflection layer of polycrystalline Si solar cell and the surface of crystalline Si wafer using anodic aluminum oxide (AAO) masks in an inductively coupled plasma(ICP) etching process. The AAO nanopattern mask has the hole size of about 70~80nm and an ave rage lattice constant of 100nm. The transferred nano-patterns were observed by the scanning electron microscope (SEM) and the enhancement of solar cell efficiency will be presented.

• 한국정보디스플레이학회:학술대회논문집
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• 2002.08a
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• pp.697-700
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• 2002

Porous anodic aluminum oxide(AAO) templates prepared by anodizing method were used for growing multiwalled carbon nanotubes(CNTs). AAO templates with the homogeneous pore diameter and length were obtained by two step anodizing technique. Using AAO templates, vertically well-ordered two-dimensional carbon nanotube arrays were fabricated. We investigated the field emission property of CNTs grown using different catalyst metals in vacuum chamber (<$10^{-7}$ Torr) on AAO Template. To explain the different emission property, the surface reaction between catalysts and alumina pores which inserted carbon species of $C_2H_2$ using High resolution transmission electron microscopy (HRTEM) was studied.