• Industrial Engineering and Management Systems
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• v.4 no.1
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• pp.54-67
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• 2005

This paper provides an evaluation of an optimization-based, multiple-input double-output (MIDO) run-to-run (R2R) control scheme for general semiconductor manufacturing processes. The controller in this research, termed adaptive dual response optimizing controller (ADROC), can serve as a process optimizer as well as a recipe regulator between consecutive runs of wafer fabrication. In evaluation, it is assumed that the equipment model could be appropriately described by a pair of second-order polynomial functions in terms of a set of controllable variables. Of practical relevance is to consider a drifting effect in the equipment model since in common semiconductor practice the process tends to drift due to machine aging and tool wearing. We select a typical application of R2R control to chemical mechanical planarization (CMP) in semiconductor manufacturing in this evaluation, and there are five different CMP process scenarios demonstrated, including mean shift, variance increase, and IMA disturbances. For the controller, ADROC, an on-line estimation technique is implemented in a self-tuning (ST) control manner for the adaptation purpose. Subsequently, an ad hoc global optimization algorithm based on the dual response approach, arising from the response surface methodology (RSM) literature, is used to seek the optimum recipe within the acceptability region for the execution of next run. The main components of ADROC are described and its control performance is assessed. It reveals from the evaluation that ADROC can provide excellent control actions for the MIDO R2R situations even though the process exhibits complicated, nonlinear interaction effects between control variables, and the drifting disturbances.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.77-86
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• 1998

A two-chip humidity sensor system has been developed which consists of a capacitive sense element die and a CMOS interface chip. The sense element was fabricated using thin polyimide films on (100) silicon substrate and showed excellent linearity(0.72%FS), low hysteresis (<3%) and low temperature coefficient(-0.0285 ~-0.0542pF/K) over a wide range of relative humidity and temperature. The capacitance-relative humidity characteristic exhibited a drift of 2~3% after 9 weeks of exposure to 4$0^{\circ}C$/90%RH. The signal-conditioning circuitry was fabricated using an 1.2- ${\mu}{\textrm}{m}$, one poly double metal CMOS process. The measured output voltage of the sensor system was directly proportional to relative humidity and showed good agreement with theory.

• Transactions of the Korean Society of Automotive Engineers
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• v.15 no.6
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• pp.102-107
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• 2007

A fast response $CO_2$ ($fCO_2$) analyzer for real-time measurement of carbon dioxide concentration during transient states of internal combustion engines has been developed. This analyzer uses non-dispersive infrared absorption (NDIR) technique for measuring $CO_2$ concentration and Kalman filter for removing noise components from output signals. The analyzer has good linearity, repeatability and drift with a response time of 11 ms; it is sufficiently fast to detect $CO_2$ concentration during transient states of internal combustion engines. The $fCO_2$ analyzer was used to measure transient $CO_2$ concentration of exhaust gas of the SI engine with a standard gas analyzer, and the signal of the $fCO_2$ analyzer was compared to that of the standard gas analyzer. The two concentrations were well matched during the steady state, and the $fCO_2$ analyzer could measure the variations of $CO_2$ concentration during the transient state.

• The Journal of the Acoustical Society of Korea
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• v.14 no.3
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• pp.28-36
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• 1995

In this paper, a double loop control model using leaky delay LMS algorithm are proposed for active noise control. The proposed double loop control model estimates the loudspeaker characteristic and the error path transfer function with on-line using only gain and acoustic time delay to reduce computation burden. The control of error signal through double loop control scheme makes the more robust cntrol system. The input signal of filter to estimate acoustic time delay is used difference between input signal of input microphone and adaptive filter output. And also, in nonstationary environments, the leaky delay LMS algorithm is employed to counteract parameter drift of delay LMS algorithm. For practical noise signal, the proposed double loop control model reduces noise level about 12.9 dB.

• Journal of Korean Institute of Industrial Engineers
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• v.32 no.3
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• pp.210-218
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• 2006

Traditional statistical process control (SPC) applied to discrete part industry in the form of control charts can look for and eliminate assignable causes by process monitoring. On the other hand, engineering process control (EPC) applied to the process industry in the form of feedback control can maintain the process output on the target by continual adjustment of input variable. This study presents controlling and monitoring rules adopted by variable sampling interval (VSI) to change sampling intervals in a predetermined fashion on the predicted process levels under integrated EPC and SPC systems. Twelve rules classified by EPC schemes(MMSE, constrained PI, bounded or deadband adjustment policy) and type of sampling interval combined with EWMA chart of SPC are proposed under IMA (1,1) disturbance model and zero-order (responsive) dynamic system. Properties of twelve control rules under three patterns of process change (sudden shift, drift and random shift) are evaluated and discussed through simulation and control rules for integrated VSI EPC and SPC systems are recommended.

• Proceedings of the IEEK Conference
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• 2000.11b
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• pp.249-252
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• 2000

A new Smart rower IC's based on the Partial SOI technology was designed for such applications as mobile communication systems, high-speed HDD systems etc. A new methodology of integrating a 0.8${\mu}{\textrm}{m}$ BiCMOS compatible Smart Power technology, high voltage bipolar device, high speed SAVEN bipolar device, LDD NMOSFET and a new LDMOSFET based on the Partial SOI technology is presented in this paper. The high voltage bipolar device has a breakdown voltage of 40V for the output stage of analog circuit. The optimized Partial SOI LDMOSFET has an off-state breakdown voltage of 75 V and a specific on- resistance of 0.249mΩ.$\textrm{cm}^2$ with the drift region length of 3.5${\mu}{\textrm}{m}$. The high-speed SAVEN bipolar device shows cut-off frequency of about 21㎓. The simulator DIOS and DESSIS has been used to get these results.

• Proceedings of the KOSOMBE Conference
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• v.1997 no.11
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• pp.126-130
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• 1997

In the development of the totally implantable artificial heart (TAH), the information of the preload condition is important to ind appropriate condition or the automatic control of the heart. Our TAH configuration consists of two artificial ventricles, and brushless DC motor within actuator. The pressure between ventricles could indicate the preload condition during the TAH operation. If we can measure accurately inspite of the noise induced from TAH and environmental condition. We suggested integrating a feedback loop to remove an unexpected DC drift. NPI 19-series Nova sensor was used which could measure pressure in gas and liquid. This method and sensor enabled us to develop the pressure transducer compact so (that) the systems can be implanted with TAH into patient. This system has been verified in vitro and in vivo test. This results showed that the output waveform of this system was stable irrespective of animal condition.

• Journal of the Korean Society for Precision Engineering
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• v.32 no.7
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• pp.643-651
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• 2015

Multi-axis magnetic and accelerometer sensor are widely used in consumer product such as smart phones. The vector output of multi-axis sensors have errors on each axis such as offset error, scale error, non-orthogonality. These errors cause many problems on the performance of the applications. In this paper, we designed the effective inline compensation algorithm for calibrating of 3 axis sensors using ellipsoid for mass production of multi-axis sensors. The outputs with those kinds of errors can be modeled by ellipsoid, and the proposed algorithm makes sequential mappings of the virtual ellipsoid to perfect sphere which is calibrated function of the sensor on three-dimensional space. The proposed calibrating process composed of four main stages and is very straightforward and effective. In addition, another imperfection of the sensor such as the drift from temperature can be easily inserted in each mapping stage. Numerical simulation and experimental results shows great performance of the proposed compensation algorithm.

• Current Optics and Photonics
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• v.5 no.4
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• pp.384-390
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• 2021

This paper presents a wide-range tunable wavelength-locking technology based on optoelectronic oscillation (OEO) loops for optical fiber sensors and microwave photonics applications, explains the theoretical fundamentals of the design, and demonstrates a method for locking the relative wavelength differences between a leader semiconductor laser and its follower lasers. The input of the OEO loop in the proposed scheme (the relative wavelength difference) determines the radio-frequency (RF) signal frequency of the oscillation output, which is quantized into an injection current signal for feedback to control the wavelength drift of follower lasers so that they follow the wavelength change of the leader laser. The results from a 10-hour continuous experiment in a field environment show that the wavelength-locking accuracy reached ±0.38 GHz with an Allan deviation of 6.1 pm over 2 hours, and the wavelength jitter between the leader and follower lasers was suppressed within 0.01 nm, even though the test equipment was not isolated from vibrations and the temperature was not controlled. Moreover, the tunable range of wavelength locking was maintained from 10 to 17 nm for nonideal electrical devices with limited bandwidth.

• Journal of the Institute of Electronics Engineers of Korea TC
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• v.43 no.11 s.353
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• pp.210-215
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• 2006

In this paper, we develop the PLL system of the local oscillator system using Gunn oscillator VCO for millimeter wave band receiving system. The local oscillator system consists of the $86{\sim}115GHz$ Gunn. diode oscillator part, the RF processing part including the diplexer and the harmonic mixer, and the DPLL system including Gunn modulator and controller. Based on this configuration, we verify the frequency and power stability of the developed local oscillator system. We developed system which applied to DPLL technique instead of the existing analog PLL method to accomplish this purpose. The developed system for this purpose is tested the frequency and power stability for a long time to confirm performance. Since we confirmed this system that had frequency characteristic of within ${\pm}10Hz$, very fine output drift power characteristic of $0.2{\sim}0.3dBm$ and about 200MHz locking range, it verified suitable for cosmic radio receiving system through the test result.