• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.25 no.2
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• pp.55-63
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• 2013

For a large-scale semiconductor manufacturing clean room, the energy consumed in an outdoor air conditioning system to heat, humidify, cool and dehumidify incoming outdoor air is very large. In particular, the energy requirement to humidify outdoor air in the winter season is generally known to be high. Recently, in order to overcome the high energy consumption nature of a steam generator in a conventional steam humidification type outdoor air conditioning system, an air washer is often introduced instead of the steam generator in the outdoor air conditioning system, which can be called a water spray humidification type outdoor air conditioning system. Therefore, the assessment and comparison of the annual energy consumed in the steam humidification type and the water spray humidification type outdoor air conditioning systems deserves to be examined in order to reduce the outdoor air conditioning load of a clean room. In the present study, a numerical analysis was conducted to obtain the annual electric power consumption of the two outdoor air conditioning systems. It was shown from the comparison of the numerical results that the water spray humidification type outdoor air conditioning system can reduce about 30% of annual electric power consumption of the steam humidification type outdoor air conditioning system.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.21 no.5
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• pp.273-281
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• 2009

In recent semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems represents about 45% of the total air conditioning load required to maintain a clean room environment. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery from the exhaust air is therefore useful for reducing the outdoor air conditioning load for a clean room. In the present work, an energy-efficient outdoor air conditioning system was proposed to reduce the outdoor air conditioning load by utilizing an air washer to recover heat from the exhaust air. The proposed outdoor air conditioning system consisted mainly of a preheating coil, an air washer, two stage cooling coils, a reheating coil, a humidifier and two heat recovery cooling coils inserted into the air washer and connected to a wet scrubber. It was shown from the lab-scale experiment with outdoor air flow of $1,000\;m^3/h$ that the proposed system was more energy-efficient for the summer and winter operations than an outdoor air conditioning system with a simple air washer.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.24 no.4
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• pp.297-305
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• 2012

In recent large-scale semiconductor manufacturing clean rooms, the energy consumption of outdoor air conditioning systems to heat, humidify, cool and dehumidify incoming outdoor air represents about 45% of the total air conditioning load required to maintain a clean room environment. Therefore, the energy performance evaluation and analysis of outdoor air conditioning systems is useful for reducing the outdoor air conditioning load for a clean room. In the present study, an experiment was conducted to compare the energy consumption of outdoor air conditioning systems with a simple air washer, an exhaust air heat recovery type air washer and a DCC return water heat recovery type air washer. It was shown from the present lab-scale experiment with an outdoor air flow of 1,000 $m^3/h$ that the exhaust air heat recovery type and DCC return water heat recovery type air washer outdoor air conditioning systems were more energy-efficient for the summer and winter operations than the simple air washer outdoor air conditioning system and furthermore, the DCC return water heat recovery type one was the most energy-efficient in the winter operation.

• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.1306-1311
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• 2009

In recent semiconductor manufacturing clean rooms, in order to improve clean room air quality, air washers are used to remove airborne gaseous contaminants such as $NH_3$, SOx and organic gases from the outdoor air introduced into clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is therefore useful for reducing the outdoor air conditioning load for a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to reheat the outdoor air. In the present study, numerical analysis and experiment was conducted to simulate the amount of energy reduction of exhaust air heat recovery type air washer system. The present numerical results showed good agreement with the results of the experimental data.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.14 no.3
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• pp.240-246
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• 2002

Bypass air conditioning systems are divided into three types; an outdoor air bypass, a mixed air bypass and a return air bypass system. What makes the return air by pass system more effective is that it directs all of moist outdoor air through the cooling coil. The bypass air conditioning system can maintain indoor R.H (Relative Humidity) less than a conventional CAV (Constant Air Volume) air conditioning system by adjusting face and bypass dampers at part load. When a design sensible load (the ratio of sensible load to total sensible load) is 70 percent (at this time, RSHF (Room Sensible Heat Factor) . 0.7), indoor R.H was maintained 59 percent by the return air bypass system, but 65 percent by the conventional CAV air conditioning system (valve control system). The bypass air conditioning system can also improve IAQ (Indoor Air Quality) in many buildings where the number of air change is high.

• Proceedings of the SAREK Conference
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• 2007.11a
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• pp.322-327
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• 2007

Dedicated outdoor air-conditioning(DOA) system that utilizes pre-cooling and desiccant dehumidification can be superior to conventional cooling and reheating system with respect to energy consumption and indoor thermal comfort. In this work, simulation has been conducted to study various factors that affect the performance of DOA. Dynamic simulation shows the transient variation of temperature and humidity as the on/off control logic is imposed. Exit humidity of process air and flow rate are varied to study the effect on exit temperature of process air, dehumidification quantity, required regeneration temperature and exit humidity of regeneration air. For an outdoor air condition of $28.5^{\circ}C$ temperature, 16 g/kg humidity ratio and 2000 cmh flow rate, the dehumidification efficiency is increased by 4.6% as the flow rate is doubled.

• Particle and aerosol research
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• v.13 no.2
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• pp.65-77
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• 2017

In recent large-scale semiconductor manufacturing cleanrooms, the energy consumption in outdoor air conditioning (OAC) systems to heat, humidify, cool and dehumidify outdoor air(OA) represents about 40~50 % of the total cleanroom power consumption required to maintain cleanroom environment. Therefore, the assessment of energy consumption in outdoor air conditioning systems is essential for reducing the outdoor air conditioning load for a cleanroom. In the present study, an experiment with an outdoor air flow rate of $1,000m^3/h$ was conducted to compare the energy consumption in steam humidification, simple air washer, exhaust air heat recovery type air washer and dry cooling coil(DCC) return water heat recovery type air washer OAC systems. Besides, a numerical analysis was carried out to evaluate the annual energy consumption of the aforementioned four OAC systems. It was shown that the simple air washer, exhaust air heat recovery type air washer and DCC return water heat recovery type air washer OAC systems using water spray humidification were more energy-efficient than the steam humidification OAC system. Furthermore the DCC return water heat recovery type air washer OAC system was the most energy-efficient.

• Proceedings of the SAREK Conference
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• 2008.06a
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• pp.591-596
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• 2008

The present study has been conducted to study the performance of dedicated outdoor air handling unit in central and personal air-conditioning. With conventional central and personal air-conditioning systems which are designed according to the maximum load, humidity increase above comfort level can not be avoided as the cooling load decreases. The adoption of dedicated outdoor air handling unit, however, can solve this problem. Moreover, the dedicated outdoor air handling unit has the characteristics of anti-bacteria due to dry coil, energy saving and good indoor air quality. During cooling seasons, dedicated outdoor air handling unit can save energy up to 30% than the conventional cooling+reheating system for controlling both temperature and humidity.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.35 no.12
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• pp.1249-1255
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• 2011

In modern large-scale semiconductor manufacturing clean rooms, the energy consumed by the outdoor air-conditioning system during heating, humidification, cooling, and dehumidification of the incoming outdoor air represents about 45% of the total air-conditioning load required to maintain a clean-room environment. In particular, the energy required for humidification of the outdoor air in winter is very high. Therefore, evaluation and comparison of the energy consumption in key humidification systems, viz., steam-humidification and water-spray-humidification systems, used in outdoor air-conditioning systems would be useful to reduce the outdoor air-conditioning load in clean rooms. In the present study, an experiment with an outdoor air flow of 1000 $m^3$/h was conducted to compare the air-conditioning process and energy consumption in outdoor air-conditioning systems with electrodeboiler steam humidifiers and air-washer water spray humidification systems. The experimental results showed that the water-spray-humidification-type outdoor air-conditioning system consumed less electrical power than did the steam-humidification-type system and was more energy efficient during winter.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.22 no.10
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• pp.697-703
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• 2010

In recent semiconductor manufacturing clean rooms, air washers are used to remove airborne gaseous contaminants from the outdoor air introduced into a clean room. Meanwhile, there is a large amount of exhaust air from a clean room. From an energy conservation point of view, heat recovery is useful for reducing the outdoor air conditioning load required to maintain a clean room. Therefore it is desirable to recover heat from the exhaust air and use it to cool or heat the outdoor air. In the present study, numerical analysis was conducted to evaluate the recovered heat of an exhaust air heat recovery type air washer system, which is the key part of an energy saving outdoor air conditioning system for semiconductor clean rooms. The present numerical results showed relatively good agreement with the available experimental data.