• Proceedings of the Korean Magnestics Society Conference
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• 2007.05a
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• pp.254.1-254.1
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• 2007

• Journal of the Semiconductor & Display Technology
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• v.7 no.1
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• pp.11-16
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• 2008

Confocal scanning microscopy is a widely used technique for three dimensional measurements because it is characterized by high resolution, high SNR and depth discrimination. Generally an image is generated by moving one optical probe that satisfies the confocal condition on the specimen. Measurement speed is limited by movement speed of the optical probe; scanning speed. To improve measurement speed we increase the number of optical probes. Specimen region to scan is divided by optical probes. Multi-point information each optical probe points to can be obtained simultaneously. Therefore image acquisition speed is increased in proportion to the number of optical probes. And multiple optical probes from red, green and blue laser sources can be used for color imaging and image quality, i.e., contrast, is improved by adding color information by this way. To conclude, this technique contributes to the improvement of measurement speed and image quality.

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.383-384
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• 2006

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.113-117
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• 2020

In this paper, We investigated the effect of heat treatment process using photo-thermal effect in order to improve mechanical properties of nanostructure on polymer films made by nanoimprint process with hybrid resin. Nanostructures which have a low refractive characteristic were fabricated by UV nanoimprint and after that heat treatment was performed using IPL (intense pulsed light) under process condition of 550 V voltage, pulse width 5 ms, frequency 0.5 Hz. The transmittance and mechanical property of fabricated nanostructure films were evaluated to observe changes in the pattern transfer rate and mechanical properties of nanostructures. The transmittance of the nanostructure was measured at 97.6% at 550 nm wavelength. Nanoindentation was performed to identify improved anti-scatch properties. Result was compared by the heat source. In case of post treatment with IPL, hardness was 0.51 GPa and in the case of hotplate was 0.27 GPa, resulting the increase of hardness of 1.8 times. Elastic modulus of IPL treated sample was 5.9GPa and Hotplate treated one was 4GPa, showing the 1.4 time increase.

• Journal of Mechanical Science and Technology
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• v.16 no.2
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• pp.175-181
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• 2002

A new polariscope system involving two rotating optical elements and a digital camera for whole field fringe analysis allows automated data to be acquired quickly and efficiently. The developed phase measuring technique that uses eight images through a circular polariscope is presented for the digital measurement of isochromatics and isoclinics, respectively, from photoelastic fringes in a circular disk under diametric compression. Isochromatics can directly be obtained using wrapped isoclinic phases calculated by the arc tangent operator which is the four-quadrant operator from -$\pi$ to $\pi$. It is not required to unwrap isoclinic phases for the calculations of isochromatics. Unwrapped isoclinics are directly determined from isochromatic parameters. Distributions of digitally determined isoclinics are in close agreement to manual measurements. The errors which would appear in unwrapping process of isoclinics can be avoided in the determination of isochromatics.

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.276-277
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• 2005

• Journal of the Semiconductor & Display Technology
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• v.5 no.4 s.17
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• pp.1-4
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• 2006

Recently, with rapid development of digital media like semiconductor and large flat panel display, the manufacturing equipment is required to have high precision over large travel range. Moreover it should have high product throughput. To achieve high product throughput, a controller should perform fast point-to-point motion and high precision positioning after settling in spite of external disturbances or residual vibrations. We proposed a new mode switching control algorithm with an application to dual stage for long range and high precision positioning. The proposed algorithm uses a proximate time-optimal servomechanism for the fast settling and a time-delay controller for the high precision positioning. Experimental results show that the proposed method enables smooth mode switching and improves the settling time and the precision accuracy after settling by over than 33% and 45%, respectively.

• Korean Journal of Optics and Photonics
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• v.28 no.6
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• pp.304-313
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• 2017

The finite element analysis for optimizing a mirror system consisting of a large-diameter mirror and flexures requires numerous, repetitive calculations and corrections of the actual model to satisfy the given design conditions. In general, modification of this real model is conducted by reconfiguring nodes of the elements. The reconfiguration is very time-consuming work, to fix the continuity of each of the newly formed component nodes at the interfaces. But the process is a very important factor in determining the analysis time. To save time in modeling and actual computation, and to attain faster convergence, we present a new opto-mechanical analysis using non-shared node connections at each of the interfaces of the optical components. By comparing the results between the new element model and a conventional element model with shared node connections, we found that the opto-mechanical performance was almost the same, but the time to reach the given condition was drastically reduced.

• Korean Journal of Optics and Photonics
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• v.24 no.3
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• pp.111-119
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• 2013

A large aspheric mirror is a key component for large astronomical telescopes and high resolution satellite cameras. Since it is large and has an aspheric form, it is much more difficult to fabricate it compared to the similar size of spherical mirror. Especially, the opto-mechanical design and analysis is critical to reduce the deformation of mirror surface due to the external forces such as gravity or temperature change, as the mirror size is larger and lightweighting ratio is increased. The design requirements for the mirror are different depending on the particular ground and space applications because the environmental conditions are changed. In this paper, we explain the opto-mechanical design and analysis for ground and space applications that are among the most difficult to achieve among several technologies related to development of the large aspheric mirror.

• Proceedings of the Optical Society of Korea Conference
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• 2006.07a
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• pp.385-386
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• 2006