• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 영호남학술대회 논문집
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• pp.327-330
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• 2000

The scanning Maxwell-stress microscopy (SMM) is a dynamic noncontact electric force microscopy that allows simultaneous access to the electrical properties of molecular system such as surface potential, surface charge, dielectric constant and conductivity along with the topography. The Scanning near-field optical / atomic force microscopy (SNOAM) is a new tool for surface imaging which was introduced as one application of the atomic force microscope (AFM). Operated with non-contact forces between the optical fiber and sample as well as equipped with the piezoscanners, the instrument reports on surface topology without damaging or modifying the surface for measuring of optical characteristic in the films. We report our recent results of its application to nanoscopic study of domain structures and electrical functionality in organic thin films by SMM. Furthermore, we have illustrated the SNOAM image in obtaining the merocyanine dye films as well as the optical image.

• 한국광학회지
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• 제15권1호
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• pp.51-55
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• 2004

표면 플라즈몬은 금속 표면에 존재하는 자유전자의 밀도파이며, 광자와 결합하여 존재한다. 본 논문에서는 근접장 주사 광학 현미경을 구성하고 이를 이용하여 표면에서 지수함수적으로 감소하는 표면 플라즈몬과 두 표면 플라즈몬에 의한 간섭무늬를 측정하였다. 표면 플라즈몬은 표면의 작은 광학적 분포에도 민감하게 변화하여, 광학 탐침이 금속 표면에 접근함에 따라서 표면 플라즈몬의 공명 조건에 영향을 준다. 이로 인해 광학 탐침이 금속 표면으로부터 약 250nm 떨어진 곳에서 광의 세기가 최대가 됨을 확인하였다.

• 반도체디스플레이기술학회지
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• 제11권3호
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• pp.1-6
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• 2012

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

• Current Optics and Photonics
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• 제2권2호
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• pp.172-178
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• 2018

We propose a precise 3D endoscopic technique for medical and industrial applications. As the 3D measuring principle, the continuously scanning structured illumination microscopy (CSSIM), which enables to obtain 3D sectional images by the synchronous axial scanning of the target with the lateral scanning of the sinusoidal pattern, is adopted. In order to reduce the size of the probe end, the illumination and detection paths of light are designed as coaxial and a coherent imaging fiber bundle is used for transferring the illumination pattern to the target and vice versa. We constructed and experimentally verified the proposed system with a gauge block specimen. As the result, it was confirmed that the 3D surface profile was successfully measured with $16.1{\mu}m$ repeatability for a gauge block specimen. In order to improve the contrast of the sinusoidal illumination pattern reflected off on the target, we used polarizing optical components and confirmed that the visibility of the pattern was suitable in CSSIM.

• 한국광학회지
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• 제10권4호
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• pp.267-272
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• 1999

근접장광학계 (Near-Field Scanning Optical Microscope :NSOM)의 표본과 팁의 거리 유지를 위해 소리굽쇠모양의 수정발진자 (tuning forktype quartz crystal unit)의 한쪽 다리에 광섬유를 고정시키고 광섬유 팁을 수정발진자와 같이 진동하게 만들어 사용하였다. 수정 진동자는 광섬유 팁이 시료에 얼마나 가까이 갔느냐에 따라 진폭이 바뀌게 되고 이 변화를 일반적인 방법인 레이저 빛에 의하여 읽어내는 것이 아니라 바로 수정 발진자의 임피던스 변화에 따른 전압 변화를 측정하여 알아냈다. 팁이 표면에 접근함에 따라 수정발진자 진동폭의 변화와 팁을 통해 들어오는 빛의 세기 변화 등을 측정하여 계의 감도를 조사하였다.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 추계학술대회 논문집
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• pp.201-206
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• 2004

Laser scanner are getting used for inspection and reverse engineering in industry such as motors, electronic products, dies and molds. However, due to the lack of efficient scanning technique, the tasks become limited to the low accuracy purpose. The main reasons for this limitation for usefulness are caused from the optical drawback, such as irregular reflection, scanning direction normal to measuring surface, the influence of surface integrity, and other optical disturbances. To overcome these drawback of laser scanner, this study propose the mechanism to reduce the optical trouble by using the 2 kinds of rotational movement axis and by composing the spherical coordinate to scanning the surface keeping normal direction consistently. So, it could be designed and interfaced the measuring device to realize that mechanism, and then it could acquisite the accurate 3D form cloud data. Also, these data are compared with the standard master ball and the data acquisited from the touch point sensor, to evaluate the accuracy and stability of measurement and to demonstrate the implementation of an dental tooth purpose system

• 한국광학회지
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• 제10권3호
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• pp.201-207
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• 1999

단일모드 광섬유와 결합기를 이용하여 간결한 구조의 광섬유 공초점 간섭 현미경을 구성하였으며, 위상 변위법을 응용한 표면 검색 방법을 제안하여 통신용의 반도체 레이저와 같이 비교적 긴 파장의 광원과, 낮은 NA의 대물렌즈를 사용하더라도 정밀한 시료 표면 검색이 가능함을 보였다. 이때 시료 표면의 높낮이는 시료로부터 반사된 빛의 위상으로부터 결정되며, 종래의 공초점 현미경에 비하여 주사시간을 크게 단축할 수 있었다. 끝으로 종래의 방법에 비해 제안된 방법은 시료의 반사율 변화에 덜 민감함을 확인할 수 있었다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 하계학술대회 논문집 Vol.6
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• pp.436-437
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• 2005

3-dimension object's feature measurement is used several industrial field to produce for examination of demanded high quality products by using optical measurement method. 3-dimension object's feature measurement is separated surface scanning and surface non-scanning. In this research, we illuminated interfero-pattern to object, it was constructed with Michelson interferometer by using laser is one of surface non-scanning method. And we extracted phase-map, it is one of featural measurement analysis of 3-dimensional object by using a phase shifting theory.

• 한국레이저가공학회지
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• 제1권1호
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• pp.24-29
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• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.402.1-402.1
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• 2014

Photonic force microscopy (PFM) is an optical tweezers-based scanning probe microscopy, which measures the forces in the range of fN to pN. The low stiffness leads proper to measure single molecular interaction. We introduce a novel photonic force microscopy to stably map various chemical properties as well as topographic information, utilizing weak molecular bond between probe and object's surface. First, we installed stable optical tweezers instrument, where an IR laser with 1064 nm wavelength was used as trapping source to reduce damage to biological sample. To manipulate trapped material, electric driven two-axis mirrors were used for x, y directional probe scanning and a piezo stage for z directional probe scanning. For resolution test, probe scans with vertical direction repeatedly at the same lateral position, where the vertical resolution is ~25 nm. To obtain the topography of surface which is etched glass, trapped bead scans 3-dimensionally and measures the contact position in each cycle. To acquire the chemical mapping, we design the DNA oligonucleotide pairs combining as a zipping structure, where one is attached at the surface of bead and other is arranged on surface. We measured the rupture force of molecular bonding to investigate chemical properties on the surface with various loading rate. We expect this system can realize a high-resolution multi-functional imaging technique able to acquire topographic map of objects and to distinguish difference of chemical properties between these objects simultaneously.