• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.05b
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• pp.327-330
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• 2000

The scanning Maxwell-stress microscopy (SMM) is a dynamic noncontact electric force microscopy that allows simultaneous access to the electrical properties of molecular system such as surface potential, surface charge, dielectric constant and conductivity along with the topography. The Scanning near-field optical / atomic force microscopy (SNOAM) is a new tool for surface imaging which was introduced as one application of the atomic force microscope (AFM). Operated with non-contact forces between the optical fiber and sample as well as equipped with the piezoscanners, the instrument reports on surface topology without damaging or modifying the surface for measuring of optical characteristic in the films. We report our recent results of its application to nanoscopic study of domain structures and electrical functionality in organic thin films by SMM. Furthermore, we have illustrated the SNOAM image in obtaining the merocyanine dye films as well as the optical image.

• Korean Journal of Optics and Photonics
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• v.15 no.1
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• pp.51-55
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• 2004

Surface plasmons (SPs) are charge density oscillations that propagate along an interface between a dielectric and metal. In this paper, the electric field of SPs and the intereference of two SPs are observed by using Near-field Scanning Optical Microscope (NSOM). The excitation condition of SPs is changed as the optical tip approaches the metal surface, because the excitation condition of SPs is very sensitive to surface structures. To measure the microscope field of SPs, the distance between metal surface and optical tip must contain a specific interval.

• Journal of the Semiconductor & Display Technology
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• v.11 no.3
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• pp.1-6
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• 2012

In this paper, inspection system based on optical scanning mechanism is designed and developed for solar cell wafer. It consists of optical scanning mechanism, NIR camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system. It is used to inspection of surface defects. NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that surface and internal micro defects can be detected in developed inspection system for solar cell wafer.

• Current Optics and Photonics
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• v.2 no.2
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• pp.172-178
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• 2018

We propose a precise 3D endoscopic technique for medical and industrial applications. As the 3D measuring principle, the continuously scanning structured illumination microscopy (CSSIM), which enables to obtain 3D sectional images by the synchronous axial scanning of the target with the lateral scanning of the sinusoidal pattern, is adopted. In order to reduce the size of the probe end, the illumination and detection paths of light are designed as coaxial and a coherent imaging fiber bundle is used for transferring the illumination pattern to the target and vice versa. We constructed and experimentally verified the proposed system with a gauge block specimen. As the result, it was confirmed that the 3D surface profile was successfully measured with $16.1{\mu}m$ repeatability for a gauge block specimen. In order to improve the contrast of the sinusoidal illumination pattern reflected off on the target, we used polarizing optical components and confirmed that the visibility of the pattern was suitable in CSSIM.

• Korean Journal of Optics and Photonics
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• v.10 no.4
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• pp.267-272
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• 1999

We attached a fiber tip on the branch of a quartz crystal oscillator in order to make a feedback control system for near field optical microscope. The electrical impedance of the quartz crystal oscillator depends on the distance between the surface of the sample and the tip caused by the surface damping. Using this method, we can directly monitor the distance between the sample and the tip without inserting extra beam which might give extra optical noise. We characterize the XY scanning resolution and the amplitude of the vibrating tip and the Z-dependent decay of the evanescent wave.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.201-206
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• 2004

Laser scanner are getting used for inspection and reverse engineering in industry such as motors, electronic products, dies and molds. However, due to the lack of efficient scanning technique, the tasks become limited to the low accuracy purpose. The main reasons for this limitation for usefulness are caused from the optical drawback, such as irregular reflection, scanning direction normal to measuring surface, the influence of surface integrity, and other optical disturbances. To overcome these drawback of laser scanner, this study propose the mechanism to reduce the optical trouble by using the 2 kinds of rotational movement axis and by composing the spherical coordinate to scanning the surface keeping normal direction consistently. So, it could be designed and interfaced the measuring device to realize that mechanism, and then it could acquisite the accurate 3D form cloud data. Also, these data are compared with the standard master ball and the data acquisited from the touch point sensor, to evaluate the accuracy and stability of measurement and to demonstrate the implementation of an dental tooth purpose system

• Korean Journal of Optics and Photonics
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• v.10 no.3
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• pp.201-207
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• 1999

The fiber-optical confocal scanning interference microscope with a simple configuration was constructed with a 4-port fiber-optic coupler, and the new method based on the phase shifting method was proposed for surface profiling by the system. In the method, the height of a specimen was determined from the phase of confocal beam. It was verified experimentally that the method was applicable to even the confocal interference microscope with a long-wavelength source and a low NA objective, and that the scanning time could be drastically reduced compared with the conventional method. Finally, it was found that our method is less sensitive to the variation of surface reflectivity than the conventional method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.436-437
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• 2005

3-dimension object's feature measurement is used several industrial field to produce for examination of demanded high quality products by using optical measurement method. 3-dimension object's feature measurement is separated surface scanning and surface non-scanning. In this research, we illuminated interfero-pattern to object, it was constructed with Michelson interferometer by using laser is one of surface non-scanning method. And we extracted phase-map, it is one of featural measurement analysis of 3-dimensional object by using a phase shifting theory.

• Laser Solutions
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• v.1 no.1
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• pp.24-29
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• 1998

A new wide laser beam optical system for the laser materials processing has been developed with a polygonal mirror. It consists of polygonal mirror and cooling part that prevents the surface of rotating polygonal mirror from damage by heat. The polygonal minors have been designed and made as 24 and 30 facets in pyramid type. This system provides a uniform linear laser heat source with the surface scanning width from 15 to 50mm according to the scanning height To examine the wide laser beam, He-Ne laser is used. Also, Acryl is used to confirm the laser beam pattern by bum-pattern print To analyze the energy distribution of the wide laser ben empirical values and theoretical values are compared and discussed. To improve the efficiency of the wide laser beam optical system, methods are suggested by the optical theories. For larger area processing like turbine blade, drawing blade, cold roller and guide plate, optimal overlapping locations have been calculated and analyzed by geometric and optical theories.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.402.1-402.1
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• 2014

Photonic force microscopy (PFM) is an optical tweezers-based scanning probe microscopy, which measures the forces in the range of fN to pN. The low stiffness leads proper to measure single molecular interaction. We introduce a novel photonic force microscopy to stably map various chemical properties as well as topographic information, utilizing weak molecular bond between probe and object's surface. First, we installed stable optical tweezers instrument, where an IR laser with 1064 nm wavelength was used as trapping source to reduce damage to biological sample. To manipulate trapped material, electric driven two-axis mirrors were used for x, y directional probe scanning and a piezo stage for z directional probe scanning. For resolution test, probe scans with vertical direction repeatedly at the same lateral position, where the vertical resolution is ~25 nm. To obtain the topography of surface which is etched glass, trapped bead scans 3-dimensionally and measures the contact position in each cycle. To acquire the chemical mapping, we design the DNA oligonucleotide pairs combining as a zipping structure, where one is attached at the surface of bead and other is arranged on surface. We measured the rupture force of molecular bonding to investigate chemical properties on the surface with various loading rate. We expect this system can realize a high-resolution multi-functional imaging technique able to acquire topographic map of objects and to distinguish difference of chemical properties between these objects simultaneously.