• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.126-126
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• 2009

Noninvasive plasma diagnostic technique is introduced to analyze and characterize HICP (Helmholtz Inductively Coupled Plasma) source during the plasma etching process. The HICP reactor generates plasma mainly through RF source power at 13.56MHz RF power and RF bias power of 12.56MHz is applied to the cathode to independently control ion density and ion energy. For noninvasive sensors, the RF sensor and the OES (Optical emission spectroscopy) were employed since it is possible to obtain both physical and chemical properties of the reactor with plasma etching. The plasma impedance and optical spectra were observed while altering process parameters such as pressure, gas flow, source and bias power during the poly silicon etching process. In this experiment, we have found that data measured from these noninvasive sensors can be correlated to etch results. In this paper, we discuss the relationship between process parameters and the measurement data from RF sensor and OES such as plasma impedance and optical spectra and using these relationships to analyze and characterize H-ICP source.

• Journal of Korean Association for Spatial Structures
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• v.7 no.3 s.25
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• pp.49-55
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• 2007

In this paper, always monitoring system of fiber Bragg Crating(FBG)Sensor is described and FBGs are well suited for measuring the movement in the part of the spatial structure(for example, cable, membrane and so on)under the pressure conditions. In order to measure the movement of long span structure, we need the measurable equipment that takes in many spots to measure. In the result of experiment, the fiber sensors showed good response to the pressure conditions. Therefore, We could calculate the movement of spatial structure and be possible health monitoring of the spatial structure.

• Proceeding of KASS Symposium
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• 2008.05a
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• pp.189-194
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• 2008

The main object of this paper is that it's possible to monitoring the deformation of cable in the tensegrity structure. always monitoring system of Fiber Bragg Grating(FBG)Sensor is described. The measurement of parts on the cable is very important. We make an experiment with measuring deformation of cable in the tensegrity structure to the pressure conditions. In the result of experiment, the fiber sensors showed good response to the pressure conditions. Therefore, We could calculate the deformation of cable structure and be possible health monitoring of the tensegrity structure.

• Proceedings of the Korean Society For Composite Materials Conference
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• 1999.11a
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• pp.251-257
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• 1999

Smart structure that contains sensors, which are either embedded in a composite material or attached to a structure, is currently receiving considerable attention. Fiber Bragg grating sensor, one of the optical fiber sensors, has been widely used to sense strain and temperature for smart structures since both parameters change the resonant frequency of the grating. In this paper, according to the various heating and cooling conditions the thermal behavior of unidirectional composite material was monitored by embedding the fiber Bragg grating sensors in the longitudinal and transverse directions of unidirectional composites. The thermal behavior of unidirectional composite material was monitored for various heating and cooling rates and applied pressure. It was found that the thermal behavior was unaffected by pressure variations and heating and cooling rates applied to the composites. The thermal strains were measured by considering the shift in Bragg wavelength that was generated by the thermal expansion of composite specimen. The longitudinal and transverse C.T.E.'s were also obtained from the corresponding temperature-thermal strain curves.

• Journal of Convergence for Information Technology
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• v.12 no.2
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• pp.149-156
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• 2022

In this paper, it was attempted to form a titanium (Ti: Titanium) thin film using the atmospheric pressure plasma process technology for the conductor, which is the main component of the optical sensor. The atmospheric plasma equipment was remodeled. A 4-inch Ti target for sputter was etched using CF4 gas, and the by-product was coated on a glass sample. These by-products were formed up to about 2 cm, and could be divided into 15 areas according to color. Surface shape and constituent elements were analyzed using scanning electron microscopy (SEM) and energy dispersive spectrometer (EDS), respectively. Electrical properties using 4-point probe equipment were also measured. If the process is performed by positioning the sample at about 4.5 mm to 5 mm from the target, a uniform Ti thin film will be deposited. However, it was found that the thin film contained a significant amount of fluorine, which greatly affects the electrical properties of the thin film. Therefore, additional experiments and studies should be performed to remove or minimize fluorine during deposition.

• Journal of the Korean Institute of Telematics and Electronics A
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• v.28A no.11
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• pp.894-901
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• 1991

Contact-type linear image sensors have been fabricated by means of RF glow discharge decomposition method of silane and hydrogen mixtures. The dependences of the electrical and optical properties of these sensor on thickness, RF power, substrate temperature and ambient gas pressure have been investigated. the ITO/i-a-Si:H/Al structure film shows photosensitivity of 0.85 and photocurrent to dark current ratio ($I_{ph}/I_{d}$) of 150 at 5V bias voltage under 200${\mu}W/cm^[2}$ red light intensity. Under 200${\mu}W/cm^[2}$ green light intensity, the ratio is 100. In order to investigate photocarrier transport mechanism and to obtain ${\mu}{\gamma}$ product we have measured the I-V characteristics of these sensors favricated with several different deposition parameters under various light sources. The linear inage sensor for document reading has been operated under reverse bias condition with green light source, resulting in ${\mu}{\gamma}$ product of about 1.5$[\times}10^{-9}cm^{2}$/V.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.23-29
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• 2017

The packaged optical fiber Bragg grating sensors which were networked by multiplexing the Bragg grating sensors with WDM technology were investigated in application for the structural health monitoring of the marine trestle structure transporting the ship. The optical fiber Bragg grating sensor was packaged in a cylindrical shape made of aluminum tubes. Furthermore, after the packaged optical fiber sensor was inserted in polymeric tube, the epoxy was filled inside the tube so that the sensor has resistance and durability against sea water. The packaged optical fiber sensor component was investigated under 0.2 MPa of hydraulic pressure and was found to be robust. The number and location of Bragg gratings attached at the trestle were determined where the trestle was subject to high displacement obtained by the finite element simulation. Strain of the part in the trestle being subjected to the maximum load was analyzed to be ${\sim}1000{\mu}{\varepsilon}$ and thus shift in Bragg wavelength of the sensor caused by the maximum load of the trestle was found to be ~1,200 pm. According to results of the finite element analysis, the Bragg wavelength spacings of the sensors were determined to have 3~5 nm without overlapping of grating wavelengths between sensors when the trestle was under loads and thus 50 of the grating sensors with each module consisting of 5 sensors could be networked within 150 nm optical window at 1550 nm wavelength of the Bragg wavelength interrogator. Shifts in Bragg wavelength of the 5 packaged optical fiber sensors attached at the mock trestle unit were well interrogated by the grating interrogator which used the optical fiber loop mirror, and the maximum strain rate was measured to be about $235.650{\mu}{\varepsilon}$. The modelling result of the sensor packaging and networking was in good agreements with experimental result each other.

• Journal of Korean Society of societal Security
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• v.1 no.3
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• pp.77-81
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• 2008

In this paper, we introduce a multi purpose environmental monitoring system developed as a commercially available standard using the technique of hetero-core spliced fiber optic sensor. The monitoring system has been tested and evaluated in a possible outdoor condition in view of the full scaled operation at actual sites to be monitored. Additionally, the developed system in this work conveniently provides us with various options of sensor modules intended for monitoring such physical quantities as displacement, distortion, pressure, binary states, and liquid adhesion. Two channels of optical fiber line were monitored, in each of which three displacement sensor modules were connected in series, in order to examine the performance to a pseudo-cracking experiment in the outdoor situation, and to clarify temperature influences to the system in terms of the coupling of optical connectors and the OTDR stability. The pseudo-cracking experiment successfully observed the actually given cracks by means of calculation based on the detected displacement values and their geometrical arrangement of the used sensor modules. And the robustness to the temperature is verified in the various temperature change.

• Journal of the Korea institute for structural maintenance and inspection
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• v.20 no.4
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• pp.35-43
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• 2016

Recently, the pipeline system for waste transportation has been increasingly constructed as new solution for the waste collection and disposal system by constantly increasing domestic waste which issued as social problem. The pipeline system is constructed through long distance, so proper long-term monitoring system is necessary which available to detect the damage location for the effective maintenance. In this paper, the experimental study is carried out to evaluate the applicability of optical strain gauge sensor based on FBG for the long-term monitoring system. Three test parameters such as pressure leaking, blockage and deformation are considered as typical damages for real-scale pipeline test specimen. In order to measure flexural and volumetric strain and temperature, three FBG sensors are installed at each monitoring sections. From the test results, this study suggested effective methods of sensor installation and arrangement. Also the sensor spacing for the design of monitoring system using FBG sensor is derived by the correlation of distances from deformation between sensor responses.

• Journal of Sensor Science and Technology
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• v.14 no.3
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• pp.198-205
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• 2005

Recently, the systems using multiple sensors such as magnetic, acoustic and pressure sensor are used for detection of underwater objects or vehicles. Those systems have difficulty of maintenance and repair because they operate underwater. Thus, this paper describes a hybrid detection system with long term operating reliability. This has a multi-signal transmission structure to have a high reliability. First, a signal transmission & receiving part, which transfers data from underwater sensors to land and receive control message from land through optical cable, has 4 multi-path. Second, the nodes for signal transmission are connected dually each other with single-hop construction and sensors are connected to a couple of neighboring nodes. This enables the output signal to transmit from a node to the next node and the next but one node together. Also, the signal from a sensor can be transmitted to two nodes at the same time. Therefore, the system with this construction has high reliability in long term operation because it makes possible to transmit sensor data to another node which works normally although a transmission node or cable in system have some faults.